公开(公告)号：US20220334004A1

公开(公告)日：2022-10-20

申请号：US17742877

申请日：2022-05-12

Applicant: Photon Control Inc.

Inventor： Hamed AKBARI KHORAMI ,  Michael FEAVER ,  Pranshu Vyomesh SHELAT

IPC: G01K11/20 ,  G01K13/00 ,  G01K3/14 ,  G01K1/14 ,  H01L21/67

Abstract: There is provided a temperature sensor including an optical fiber, and a sensing element spaced from the optical fiber. The sensing element is encapsulated in a optically transparent, non-porous material, isolating the sensing element from a surrounding environment. The optical fiber is aligned with the sensing element to deliver a source beam to interact with the sensing element and detect a return beam, where the return beam exhibits a temperature dependent property that is measured to determine a temperature of a measured object thermally coupled to the sensing element.