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公开(公告)号：US20100188723A1
公开(公告)日：2010-07-29
申请号：US12602037
申请日：2008-05-29
申请人： Joshua Monroe Cobb , Paul G. Dewa , Justin Kreuzer
发明人： Joshua Monroe Cobb , Paul G. Dewa , Justin Kreuzer
CPC分类号： G03F7/70041
摘要： An apparatus for providing a modulated pulsed radiation beam (20) has a radiation source (16) for providing a pulsed radiation beam (10) at a constant pulse repetition frequency and a number of beam intensity modulators (18a-18e). A beam-deflecting element (12) in the path of the pulsed radiation beam and rotatable about an axis redirects the pulsed radiation beam cyclically towards each of the plurality of beam intensity modulators in turn. A beam-recombining element rotatable about the axis in synchronization with the beam-deflecting element combines modulated light, from each of the beam intensity modulators in order to form the modulated pulsed radiation beam at the constant pulse repetition frequency. At least one beam-pointing correction apparatus optically conjugates the beam-deflecting element and the beam recombining element at least one rotational position about the axis.
摘要翻译： 用于提供调制的脉冲辐射束（20）的装置具有用于以恒定的脉冲重复频率和多个束强度调制器（18a-18e）提供脉冲辐射束（10）的辐射源（16）。 脉冲辐射束的路径中的光束偏转元件（12）可以绕轴线转动，依次将脉冲辐射束周期性地引向多个光束强度调制器中的每一个。 可以与光束偏转元件同步地围绕轴旋转的光束重组元件组合来自每个光束强度调制器的调制光，以便以恒定脉冲重复频率形成调制的脉冲辐射束。 至少一个光束指向校正装置将光束偏转元件和光束复合元件以围绕轴线的至少一个旋转位置光学地共轭。
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公开(公告)号：US20090052480A1
公开(公告)日：2009-02-26
申请号：US11895225
申请日：2007-08-23
申请人： Joshua Monroe Cobb , Paul G. Dewa
发明人： Joshua Monroe Cobb , Paul G. Dewa
IPC分类号： H01S3/10
CPC分类号： G03F7/70583 , G02F1/01 , G03F7/70025 , G03F7/70041 , H01S3/005 , H01S3/0057 , H01S3/0085
摘要： A light pulse conditioning apparatus has at least first and second curved reflective surfaces that share a common focus and a light-redirecting element disposed between the first and second curved reflective surfaces to redirect at least a portion of an incident light beam toward the second curved reflective surface as a delayed beam portion. A beam-shifting compensating element is disposed between the first curved reflective surface and the light-redirecting element and in the path of the delayed beam portion, for shifting the optical path of the delayed beam portion as it returns toward the light-redirecting element.
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3.发明授权Grazing incidence interferometry for measuring transparent plane-parallel plates 失效用于测量透明平面平行板的掠入射干涉测量
公开(公告)号：US5923425A
公开(公告)日：1999-07-13
申请号：US975145
申请日：1997-11-20
申请人： Paul G. Dewa , Andrew W. Kulawiec
发明人： Paul G. Dewa , Andrew W. Kulawiec
CPC分类号： G01B11/06 , G01B9/02021 , G01B9/02022 , G01B9/02028 , G01B9/02058
摘要： A grazing incidence interferometer includes an extended light source for limiting spatial coherence of reference and test beams. A test plate is oriented at a grazing incidence to the test beam so that a first portion of the test beam is reflected from the front surface of the test plate, a second portion of the test beam is reflected from the back surface of the test plate, and the two test beam portions are sheared with respect to each other. The spatial coherence of the test beam is related to the lateral shear between the first and second test beam portions to significantly reduce contrast of an interference fringe pattern between the front and back surfaces of the test plate. Also, the reference beam is realigned with just one of the two test beam portions to favor the formation of an interference pattern between the reference surface and one of the front and back surfaces of the test plate over the formation of an interference pattern between the reference surface and the other of the front and back surfaces of the test plate.
摘要翻译： 掠入射干涉仪包括用于限制参考和测试光束的空间相干性的扩展光源。 测试板以测试光束的掠入射取向，使得测试光束的第一部分从测试板的前表面反射，测试光束的第二部分从测试板的后表面反射 并且两个测试光束部分相对于彼此剪切。 测试光束的空间相干性与第一和第二测试光束部分之间的横向剪切有关，以显着降低测试板的前表面和后表面之间的干涉条纹图案的对比度。 此外，参考光束仅与两个测试光束部分中的一个重新对准，以有利于在参考表面与测试板的前表面和后表面中的一个之间形成干涉图案，以形成干涉图案之间的干涉图案 表面和测试板的前表面和后表面中的另一个。
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公开(公告)号：US20140022414A1
公开(公告)日：2014-01-23
申请号：US13555428
申请日：2012-07-23
CPC分类号： G01J3/021 , G01J3/0294 , G01J3/04 , G01J3/08 , G01J3/2823 , G01J3/36
摘要： A hyperspectral imaging system and method are described herein for providing a hyperspectral image of an area of a remote object (e.g., scene of interest). The hyperspectral imaging system includes at least one optic, a scannable slit mechanism, a spectrometer, a two-dimensional image sensor, and a controller. The scannable slit mechanism can be a micro-electromechanical system spatial light modulator (MEMS SLM), a diffractive Micro-Opto-Electro-Mechanical Systems (MOEMS) spatial light modulator (SLM), a digital light processing (DLP) system, a liquid crystal display, a rotating drum with at least one slit formed therein, or a rotating disk with at least one slit formed therein.
摘要翻译： 本文描述了一种用于提供远程对象（例如，感兴趣的场景）的区域的高光谱图像的高光谱成像系统和方法。 高光谱成像系统包括至少一个光学元件，可扫描狭缝机构，光谱仪，二维图像传感器和控制器。 可扫描狭缝机构可以是微机电系统空间光调制器（MEMS SLM），衍射微光电机械系统（MOEMS）空间光调制器（SLM），数字光处理（DLP）系统，液体 晶体显示器，其中形成有至少一个狭缝的旋转滚筒或其中形成有至少一个狭缝的旋转盘。
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公开(公告)号：US20120114875A1
公开(公告)日：2012-05-10
申请号：US13285090
申请日：2011-10-31
申请人： Paul G. Dewa
发明人： Paul G. Dewa
CPC分类号： G01N21/94 , G01N21/6486 , G01N21/958
摘要： The present disclosure is directed to a method for determining the state of cleanliness of an optical component (an optic) before any coating is applied to the surface. In method is particularly applicable to optical elements and components that are intended for uses in the DUV (deep ultraviolet) and EUV (extreme ultraviolet) wavelength regions. The disclosure combines a cleaning procedure with contamination metrology utilizing a spectrometer to provide a method that will determine the state of cleanliness of the component surface by measurement of the fluorescence spectrum of the optic and comparing the measured value with a standard or reference optic of known, acceptable cleanliness. The disclosure is further directed to an optic having a selected coating thereon that is formed according to the method described herein.
摘要翻译： 本公开涉及一种在将任何涂层施加到表面之前确定光学部件（光学部件）的清洁度的状态的方法。 该方法特别适用于用于DUV（深紫外）和EUV（极紫外））波长区域的光学元件和组件。 本公开结合了利用光谱仪的清洁程序与污染计量，以提供通过测量光学元件的荧光光谱来确定组件表面的清洁度的状态的方法，并将测量值与已知的， 可接受的清洁度。 本公开进一步涉及根据本文所述的方法形成的在其上具有选择的涂层的光学元件。
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公开(公告)号：US06456384B1
公开(公告)日：2002-09-24
申请号：US09710660
申请日：2000-11-09
IPC分类号： G01B1114
CPC分类号： G01B11/254
摘要： A moiré interferometer has an illumination system and an imaging system that share a common focusing optic, which preferably takes the form of a concave mirror. Within the illumination system, the common focusing optic collimates light en route to a test surface. Within the imaging system, the common focusing optic telecentrically images a grating pattern appearing on the test surface onto a fringe pattern detector.
摘要翻译： 莫尔干涉仪具有照明系统和成像系统，其共享共同的聚焦光学元件，其优选地采用凹面镜的形式。 在照明系统内，公共聚焦光学器件将路线中的光准直到测试表面。 在成像系统内，公共聚焦光学器件将出现在测试表面上的光栅图案中心地成像到条纹图案检测器上。
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公开(公告)号：US20080055579A1
公开(公告)日：2008-03-06
申请号：US11605886
申请日：2006-11-29
申请人： Joshua Monroe Cobb , Paul G. Dewa
发明人： Joshua Monroe Cobb , Paul G. Dewa
CPC分类号： G03B27/42 , G03F7/70041
摘要： An apparatus for providing a pulsed radiation beam has a radiation source providing a pulsed radiation beam at a constant pulse repetition frequency. A beam deflector in the path of the pulsed radiation beam is actuable to redirect the pulsed radiation beam cyclically towards each of a plurality of beam intensity modulators in turn. A beam recombiner combines modulated light from each of the plurality of beam intensity modulators in order to form the modulated pulsed radiation beam at the constant pulse repetition frequency.
摘要翻译： 用于提供脉冲辐射束的装置具有以恒定脉冲重复频率提供脉冲辐射束的辐射源。 在脉冲辐射束的路径中的光束偏转器可致动以依次将脉冲辐射束循环地重定向到多个光束强度调制器中的每一个。 束复合器组合来自多个束强度调制器中的每一个的调制光，以便以恒定脉冲重复频率形成调制的脉冲辐射束。
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公开(公告)号：US5757470A
公开(公告)日：1998-05-26
申请号：US516521
申请日：1995-08-17
CPC分类号： G03F7/70108 , G03F7/70141 , G03F7/702
摘要： The illumination of a photolithographic projection imager is given a variable annular intensity profile by using diverging and counter diverging elements that are movable relative to each other in the illumination path. An upstream element diverges the illumination into an annular configuration, the radius of which is set by the distance downstream to the counter diverging element. Convex and concave conical surfaces on the movable elements can accomplish this.
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公开(公告)号：US5532821A
公开(公告)日：1996-07-02
申请号：US404923
申请日：1995-03-16
CPC分类号： G01B11/306
摘要： An interferometer (10) includes a prism extender (50) appended to a prism (32) for directing a beam of light (42) into a recess (44) of a test piece (34). A first portion (42a) of the beam (42) refracts from a reference surface (54) of the prism extender (50) to an angle (.alpha.) of grazing incidence on a bottom surface (46) of the recess (44), and a second portion (42b) of the beam (42) reflects from the reference surface (54). The two portions (42 aand 42b) of the beam (42) recombine at the reference surface (54) forming an interference pattern indicative of differences between the reference surface (54) and the bottom surface (46) of the recess (44).
摘要翻译： 干涉仪（10）包括附加到棱镜（32）的棱镜扩展器（50），用于将光束（42）引导到测试片（34）的凹部（44）中。 梁（42）的第一部分（42a）从棱镜扩展器（50）的参考表面（54）折射到在凹部（44）的底表面（46）上掠入射的角度（α） 并且所述梁（42）的第二部分（42b）从所述基准表面（54）反射。 光束（42）的两个部分（42a和42b）在参考表面（54）处复合，形成表示参考表面（54）和凹部（44）的底表面（46）之间的差异的干涉图案。
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10.发明申请SYSTEMS AND METHODS FOR PERFORMING PHOTOREACTIONS USING LIGHT-DIFFUSING OPTICAL FIBER 有权使用光扩散光纤进行光电转换的系统和方法公开(公告)号：US20130090402A1
公开(公告)日：2013-04-11
申请号：US13269071
申请日：2011-10-07
CPC分类号： G02B7/025 , C03C13/045 , C03C25/105 , C03C25/106 , C03C25/475 , G02B6/001 , G02B6/02319 , G02B6/02342
摘要： Systems and methods for performing photoreactions in a photoreactive material using scattered actinic light from at least one light-diffusing optical fiber are disclosed. The systems and methods include disposing a light-diffusing optical fiber relative to the photoreactive material. The light-diffusing optical fiber has a glass core, a surrounding cladding, and nano-sized structures situated either within the glass core or at the core-cladding boundary. The nano-sized structures are configured to scatter guided actinic light that travels in the light-diffusing optical fiber from an actinic light source. The scattered actinic light is provided throughout the photoreactive material and causes a photoreaction throughout the photoreactive material.
摘要翻译： 公开了使用来自至少一种光散射光纤的分散光化光在光反应性材料中进行光反应的系统和方法。 该系统和方法包括相对于光反应性材料设置光漫射光纤。 光扩散光纤具有玻璃芯，周围包层和位于玻璃芯内或芯 - 包层边界处的纳米尺寸结构。 纳米尺寸结构被配置为散射在光扩散光纤中从光化光源行进的引导光化光。 在整个光反应性材料中提供分散的光化光，并在整个光反应性材料中引起光反应。
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