公开(公告)号：US20130314922A1

公开(公告)日：2013-11-28

申请号：US13480883

申请日：2012-05-25

申请人： Joshua Monroe Cobb

发明人： Joshua Monroe Cobb

IPC分类号： F21V13/04

CPC分类号： G02B19/0052 ,  G02B27/0966 ,  G02B27/0977 ,  H01S5/005 ,  H01S5/02284

摘要： An apparatus emits a laser light beam with a first aspect ratio of etendue R1, wherein the optical invariant with respect to a first direction is less than half the optical invariant with respect to a second orthogonal direction. A first cylindrical lens collimates the beam in the first direction. A second cylindrical lens collimates the light beam in the second direction. A bisecting reflective surface has an edge that splits the collimated beam into undeviated and first deviated beam paths. A folding reflective surface redirects the first deviated beam path back toward the bisecting reflective surface, optically parallel with and displaced from the undeviated beam path with respect to the first direction. At least a portion of the redirected first deviated beam path passes the edge and combines with the undeviated path to form an output beam having a second aspect ratio of etendue R2 not equal to R1.

摘要翻译： 一种装置发射具有光密度R1的第一长宽比的激光束，其中相对于第一方向的光学不变量小于相对于第二正交方向的光学不变量的一半。 第一柱面透镜沿第一方向准直光束。 第二柱面透镜在第二方向准直光束。 平分反射表面具有将准直束分裂成未变形和第一偏离光束路径的边缘。 折叠反射表面将第一偏离的光束路径重新定向到平分的反射表面，与未展开的光束路径相对于第一方向光学平行并且从未展开的光束路径移位。 重定向的第一偏离光束路径的至少一部分通过边缘并与未展开的路径组合以形成具有不等于R1的延迟梯度R2的第二纵横比的输出光束。

公开(公告)号：US08444272B2

公开(公告)日：2013-05-21

申请号：US12972752

申请日：2010-12-20

申请人： Joshua Monroe Cobb

发明人： Joshua Monroe Cobb

IPC分类号： G03B21/26 ,  G02F1/00 ,  G02F1/135 ,  G06F17/00 ,  G06F3/00 ,  G09G3/36 ,  G02B26/00

CPC分类号： H04N9/3147 ,  H04N9/3111

摘要： An apparatus for forming a color image has at least a first, a second, and a third illumination source, each illumination source energizable to provide continuous illumination of a first, a second, or a third wavelength band, respectively, to an optical multiplexer. The optical multiplexer is actuable to cyclically switch received light from each one of the illumination sources, in turn, to each one of at least a first, a second, and a third projector channel in a repeated sequence. The first projector channel connects to a first projector apparatus, the second projector channel connects to a second projector apparatus, and the third projector channel connects to a third projector apparatus. Each projector apparatus has a light modulator that is energizable to form an image from the light of the first, second, or third wavelength band that is cyclically switched onto its projector channel from the optical multiplexer.

摘要翻译： 用于形成彩色图像的装置具有至少第一，第二和第三照明源，每个照明源可激励以分别向光学多路复用器提供第一，第二或第三波长带的连续照明。 光复用器可致动以将来自每个照明源的接收光循环地重复地依次重复到至少第一，第二和第三投影仪通道中的每一个。 第一投影仪通道连接到第一投影仪设备，第二投影仪通道连接到第二投影仪设备，第三投影仪通道连接到第三投影仪设备。 每个投影仪设备具有光调制器，该光调制器能够从第一，第二或第三波长带的光形成图像，该第一，第二或第三波长带从光复用器循环切换到其投影仪通道上。

公开(公告)号：US20110181840A1

公开(公告)日：2011-07-28

申请号：US12972752

申请日：2010-12-20

申请人： Joshua Monroe Cobb

发明人： Joshua Monroe Cobb

IPC分类号： G03B21/14

CPC分类号： H04N9/3147 ,  H04N9/3111

摘要： An apparatus for forming a color image has at least a first, a second, and a third illumination source, each illumination source energizable to provide continuous illumination of a first, a second, or a third wavelength band, respectively, to an optical multiplexer. The optical multiplexer is actuable to cyclically switch received light from each one of the illumination sources, in turn, to each one of at least a first, a second, and a third projector channel in a repeated sequence. The first projector channel connects to a first projector apparatus, the second projector channel connects to a second projector apparatus, and the third projector channel connects to a third projector apparatus. Each projector apparatus has a light modulator that is energizable to form an image from the light of the first, second, or third wavelength band that is cyclically switched onto its projector channel from the optical multiplexer.

摘要翻译： 用于形成彩色图像的装置具有至少第一，第二和第三照明源，每个照明源可激励以分别向光学多路复用器提供第一，第二或第三波长带的连续照明。 光复用器可致动以将来自每个照明源的接收光循环地重复地依次重复到至少第一，第二和第三投影仪通道中的每一个。 第一投影仪通道连接到第一投影仪设备，第二投影仪通道连接到第二投影仪设备，第三投影仪通道连接到第三投影仪设备。 每个投影仪设备具有光调制器，该光调制器能够从第一，第二或第三波长带的光形成图像，该第一，第二或第三波长带从光复用器循环切换到其投影仪通道上。

公开(公告)号：US07741557B2

公开(公告)日：2010-06-22

申请号：US11498673

申请日：2006-08-03

申请人： Joshua Monroe Cobb ,  John H Bruning

发明人： Joshua Monroe Cobb ,  John H Bruning

IPC分类号： H01L31/042 ,  H02N6/00 ,  G02B27/14

CPC分类号： G02B19/0028 ,  F24S23/00 ,  F24S23/79 ,  G02B19/0042 ,  H01L31/0543 ,  H01L31/0547 ,  H01L31/0549 ,  Y02E10/52

摘要： An apparatus for obtaining energy from a polychromatic radiant energy source has a light concentrator for concentrating and redirecting incident radiant energy, having an optical axis, and a spectral separator disposed along the optical axis, apart from the light concentrator and in the path of concentrated, redirected radiant energy. The spectral separator has a first planar surface treated to reflect a first spectral band of light toward a first focal region and to transmit a second spectral band and a second planar surface spaced apart from the first planar surface and oblique with respect to the first planar surface. The second planar surface is treated to reflect the second spectral band back through the first planar surface and toward a second focal region spaced apart from the first focal region. First and second light receivers are disposed nearest each respective focal region for receiving the first and second spectral bands.

摘要翻译： 用于从多色辐射能源获得能量的装置具有聚光器，用于将具有光轴的入射辐射能集中和重定向，并且沿着光轴设置的光谱分离器，远离光聚集器并且在集中的路径中， 重定向的辐射能量。 光谱分离器具有第一平面表面，被处理以朝向第一焦点区域反射第一光谱带光并透射与第一平面表面间隔开的第二光谱带和第二平面，并且相对于第一平面倾斜 。 处理第二平坦表面以将第二光谱带反射穿过第一平面表面并朝向与第一焦点区域间隔开的第二焦点区域。 第一和第二光接收器被布置为最靠近各个聚焦区域以接收第一和第二光谱带。

公开(公告)号：US20090052480A1

公开(公告)日：2009-02-26

申请号：US11895225

申请日：2007-08-23

申请人： Joshua Monroe Cobb ,  Paul G. Dewa

发明人： Joshua Monroe Cobb ,  Paul G. Dewa

IPC分类号： H01S3/10

CPC分类号： G03F7/70583 ,  G02F1/01 ,  G03F7/70025 ,  G03F7/70041 ,  H01S3/005 ,  H01S3/0057 ,  H01S3/0085

摘要： A light pulse conditioning apparatus has at least first and second curved reflective surfaces that share a common focus and a light-redirecting element disposed between the first and second curved reflective surfaces to redirect at least a portion of an incident light beam toward the second curved reflective surface as a delayed beam portion. A beam-shifting compensating element is disposed between the first curved reflective surface and the light-redirecting element and in the path of the delayed beam portion, for shifting the optical path of the delayed beam portion as it returns toward the light-redirecting element.

公开(公告)号：US08599485B1

公开(公告)日：2013-12-03

申请号：US13480883

申请日：2012-05-25

申请人： Joshua Monroe Cobb

发明人： Joshua Monroe Cobb

IPC分类号： G02B27/14 ,  G02B27/10 ,  G02B27/30

CPC分类号： G02B19/0052 ,  G02B27/0966 ,  G02B27/0977 ,  H01S5/005 ,  H01S5/02284

摘要： An apparatus emits a laser light beam with a first aspect ratio of etendue R1, wherein the optical invariant with respect to a first direction is less than half the optical invariant with respect to a second orthogonal direction. A first cylindrical lens collimates the beam in the first direction. A second cylindrical lens collimates the light beam in the second direction. A bisecting reflective surface has an edge that splits the collimated beam into undeviated and first deviated beam paths. A folding reflective surface redirects the first deviated beam path back toward the bisecting reflective surface, optically parallel with and displaced from the undeviated beam path with respect to the first direction. At least a portion of the redirected first deviated beam path passes the edge and combines with the undeviated path to form an output beam having a second aspect ratio of etendue R2 not equal to R1.

摘要翻译： 一种装置发射具有光密度R1的第一长宽比的激光束，其中相对于第一方向的光学不变量小于相对于第二正交方向的光学不变量的一半。 第一柱面透镜沿第一方向准直光束。 第二柱面透镜在第二方向准直光束。 平分反射表面具有将准直束分裂成未变形和第一偏离光束路径的边缘。 折叠反射表面将第一偏离的光束路径重新定向到平分的反射表面，与未展开的光束路径相对于第一方向光学平行并且从未展开的光束路径移位。 重定向的第一偏离光束路径的至少一部分通过边缘并与未展开的路径组合以形成具有不等于R1的延迟梯度R2的第二纵横比的输出光束。

公开(公告)号：US08526008B2

公开(公告)日：2013-09-03

申请号：US13312099

申请日：2011-12-06

申请人： Joshua Monroe Cobb ,  Thomas James Dunn ,  John Weston Frankovich

发明人： Joshua Monroe Cobb ,  Thomas James Dunn ,  John Weston Frankovich

IPC分类号： G01B11/02

CPC分类号： G01B9/02057 ,  G01B9/02004 ,  G01B9/02059 ,  G01B11/2441

摘要： A Fizeau interferometer incorporates an off-axis paraboloidal reflector that forms virtual images of reference and test surfaces and a camera lens that converts the virtual images into real images on a camera detector surface. The camera detector surface is arranged together with the camera lens to accommodate tilting of the virtual images by the off-axis paraboloidal reflector.

摘要翻译： Fizeau干涉仪结合了离轴抛物面反射器，形成参考和测试曲面的虚拟图像，以及将相机镜头转换为相机检测器表面上的实际图像的相机镜头。 相机检测器表面与照相机镜头一起布置，以容纳通过离轴抛物面反射器的虚像的倾斜。

公开(公告)号：US20120154819A1

公开(公告)日：2012-06-21

申请号：US13312099

申请日：2011-12-06

申请人： Joshua Monroe Cobb ,  Thomas James Dunn ,  John Weston Frankovich

发明人： Joshua Monroe Cobb ,  Thomas James Dunn ,  John Weston Frankovich

IPC分类号： G01B11/02

CPC分类号： G01B9/02057 ,  G01B9/02004 ,  G01B9/02059 ,  G01B11/2441

摘要： A Fizeau interferometer incorporates an off-axis paraboloidal reflector that forms virtual images of reference and test surfaces and a camera lens that converts the virtual images into real images on a camera detector surface. The camera detector surface is arranged together with the camera lens to accommodate tilting of the virtual images by the off-axis paraboloidal reflector.

摘要翻译： Fizeau干涉仪结合了离轴抛物面反射器，形成参考和测试曲面的虚拟图像，以及将相机镜头转换为相机检测器表面上的实际图像的相机镜头。 相机检测器表面与照相机镜头一起布置，以容纳通过离轴抛物面反射器的虚像的倾斜。

公开(公告)号：US20090296064A1

公开(公告)日：2009-12-03

申请号：US12471642

申请日：2009-05-26

申请人： Joshua Monroe Cobb ,  Paul Francis Michaloski

发明人： Joshua Monroe Cobb ,  Paul Francis Michaloski

IPC分类号： G03B27/72

CPC分类号： G03F7/70291 ,  G03F7/70091 ,  G03F7/70275

摘要： An optical system for producing a pattern of focused spots, such as a maskless lithographic projection system, includes an illuminator, a pattern generator, and an imager. The illuminator includes a light source for generating a light beam, a homogenizer for evenly dispersing light within the light beam, and a condenser for coupling the light source to the homogenizer. The pattern generator has individually addressable elements illuminated by the light beam from the illuminator. The imager images the addressable elements of the pattern generator onto corresponding focusing elements for forming focused spots that are conjugate to aperture stops in both the imager and the illuminator. The illuminator underfills the imager aperture stop for reducing the size of the focused spots. The condenser underfills the illuminator aperture stop for further controlling the size and shape of the focused spots.

摘要翻译： 用于产生聚焦点图案的光学系统，例如无掩模光刻投影系统，包括照明器，图案发生器和成像器。 照明器包括用于产生光束的光源，用于在光束内均匀分散光的均质器，以及用于将光源耦合到均化器的冷凝器。 图案发生器具有由来自照明器的光束照亮的单独的可寻址元件。 成像器将图案发生器的可寻址元件图像到相应的聚焦元件上，以形成与成像器和照明器中的孔径光阑共轭的聚焦点。 照明器底部填充成像器孔径光阑，以减小聚焦斑点的大小。 冷凝器底部填充照明器孔径光阑，以进一步控制聚焦斑点的尺寸和形状。

公开(公告)号：US07620080B2

公开(公告)日：2009-11-17

申请号：US11895225

申请日：2007-08-23

申请人： Joshua Monroe Cobb ,  Paul G Dewa

发明人： Joshua Monroe Cobb ,  Paul G Dewa

IPC分类号： H01S3/10

CPC分类号： G03F7/70583 ,  G02F1/01 ,  G03F7/70025 ,  G03F7/70041 ,  H01S3/005 ,  H01S3/0057 ,  H01S3/0085

摘要： A light pulse conditioning apparatus has at least first and second curved reflective surfaces that share a common focus and a light-redirecting element disposed between the first and second curved reflective surfaces to redirect at least a portion of an incident light beam toward the second curved reflective surface as a delayed beam portion. A beam-shifting compensating element is disposed between the first curved reflective surface and the light-redirecting element and in the path of the delayed beam portion, for shifting the optical path of the delayed beam portion as it returns toward the light-redirecting element.

摘要翻译： 光脉冲调节装置具有共享共同焦点的至少第一和第二弯曲反射表面和设置在第一和第二弯曲反射表面之间的光重定向元件，以将至少一部分入射光束朝向第二弯曲反射 表面作为延迟光束部分。 光束移动补偿元件设置在第一弯曲反射表面和光重定向元件之间以及延迟光束部分的路径中，用于当延迟光束部分朝向光重定向元件返回时移动延迟光束部分的光路。