公开(公告)号：US20170247256A1

公开(公告)日：2017-08-31

申请号：US15523341

申请日：2014-11-21

申请人： PEKING UNIVERSITY

发明人： Jin ZHANG ,  Yue HU ,  Lixing KANG ,  Qiuchen ZHAO ,  Shuchen ZHANG

IPC分类号： H01L51/00 ,  C30B25/18 ,  C30B29/02 ,  C30B29/20 ,  C30B31/04 ,  H01L51/05 ,  C23C16/26 ,  C23C16/02 ,  C23C16/455 ,  B05D1/00 ,  B05D3/04 ,  B05D3/00 ,  C01B31/02

CPC分类号： C30B29/02 ,  B05D1/005 ,  B05D1/60 ,  B05D3/007 ,  B05D3/0406 ,  B05D3/0453 ,  B82Y10/00 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/162 ,  C01B2202/02 ,  C01B2202/08 ,  C01B2202/22 ,  C23C16/0272 ,  C23C16/26 ,  C23C16/45512 ,  C30B25/186 ,  C30B29/20 ,  C30B29/60 ,  C30B31/04 ,  H01L51/0002 ,  H01L51/0048 ,  H01L51/0541 ,  H01L51/0558 ,  H01L51/0566 ,  Y10S977/75 ,  Y10S977/843 ,  Y10S977/938

摘要： The present invention discloses single-walled carbon nanotubes horizontal arrays with ultra-high density and the preparation method. The method comprises the following steps: loading a catalyst on a single crystal growth substrate; after annealing, introducing hydrogen into a chemical vapor deposition system to conduct a reduction reaction of the catalyst; and maintaining the introduction of the hydrogen to conduct the orientated growth of a single-walled carbon nanotube. The density of the ultra-high density single-walled carbon nanotube horizontal array obtained by this method exceeds 130 tubes/micrometer, and an electrical performance test is performed on the prepared ultra-high density single-walled carbon nanotube horizontal array shows a high on-current density of 380 μA/μm, and the transconductance of 102.5 μS/μm.