MEASUREMENT SYSTEM, MEASUREMENT SUPPORT METHOD, AND COMPUTER-READABLE MEDIUM

    公开(公告)号:US20220107169A1

    公开(公告)日:2022-04-07

    申请号:US17493745

    申请日:2021-10-04

    Abstract: A measurement system includes: an optical measurement instrument that measures a surface of a specimen; and a control apparatus that controls the measurement instrument. The control apparatus includes: one or more non-transitory computer-readable media that include an instruction; and one or more processors that execute the instruction. The instruction is configured to cause the one or more processors to execute an operation. The operation includes: causing the measurement instrument to repetitively measure the surface of the specimen without changing the setting; and evaluating appropriateness of the setting for measuring surface texture of the specimen, based on comparison between a measurement value of the surface texture of the specimen calculated from a measurement data item output from the measurement instrument, and a degree of variation in measurement by the measurement instrument calculated from a plurality of measurement data items output from the measurement instrument.

    MICROSCOPE DEVICE, STORAGE MEDIUM AND OBSERVATION METHOD

    公开(公告)号:US20180172975A1

    公开(公告)日:2018-06-21

    申请号:US15822959

    申请日:2017-11-27

    Inventor: Yosuke TANI

    Abstract: A microscope device 10 includes a color camera 3 that obtains observation images of a sample, an image process device that performs a mapped image generation process of generating a mapped image by combining a plurality of observation images obtained by the color camera 3, and a determination device that performs a first determination process of determining whether or not to use the observation images for the mapped image generation process. The image process device generates a mapped image by combining the observation images, including an observation image determined to be used for the mapped image generation process in the first determination process, and refrains from using, for the mapped image generation process, an observation image determined to be not used for the mapped image generation process in the first determination process.

    MICROSCOPE DEVICE, STORAGE MEDIUM AND OBSERVATION METHOD

    公开(公告)号:US20180164570A1

    公开(公告)日:2018-06-14

    申请号:US15822717

    申请日:2017-11-27

    Inventor: Yosuke TANI

    Abstract: A microscope device 10 includes a color camera 4 that obtains an observation image, and a control device 20 functioning as an image process device that performs, in a state in which the color camera 4 is obtaining the observation images under a particular observation condition, a mapped image generation process in which the obtained observation images are combined so as to generate a mapped image, halts the mapped image generation process when the state transitions to a state that is an observation condition other than the particular observation condition from the state, and restarts the mapped image generation process when the state again transitions to a state in which the color camera 4 is obtaining the observation images under the particular observation condition.

    SCANNING CONFOCAL MICROSCOPE APPARATUS, SCANNING CONTROL METHOD, AND RECORDING MEDIUM

    公开(公告)号:US20180164563A1

    公开(公告)日:2018-06-14

    申请号:US15819358

    申请日:2017-11-21

    Abstract: A scanning confocal microscope apparatus includes: a scanning confocal microscope that includes an objective lens; a computing device that divides a range in a direction of an optical axis of the objective lens of a preliminary scanning area on which preliminary scanning has been performed into a plurality of groups, in accordance with data obtained by performing the preliminary scanning using the scanning confocal microscope; and a controller that controls the scanning confocal microscope so as to perform principal scanning in which at least a portion of the preliminary scanning area is scanned under a measurement condition determined for each of the plurality of groups.

    MICROSCOPE SYSTEM AND PROJECTION UNIT

    公开(公告)号:US20210192181A1

    公开(公告)日:2021-06-24

    申请号:US17196921

    申请日:2021-03-09

    Abstract: A microscope system includes an eyepiece, an objective, a tube lens that is disposed between the eyepiece and the objective, a projection apparatus that projects a projection image onto an image plane on which an optical image is formed by the tube lens, and a processor that performs processes. The processes include performing for digital image data of the sample at least one analysis process selected from a plurality of analysis processes, and generating projection image data representing the projection image on the basis of the analysis result and the at least one analysis process. The projection image data indicates the analysis result in a display format including an image color corresponding to the at least one analysis process. The generating the projection image data includes determining a color for the projection image in accordance with the at least one analysis process selected from the plurality of analysis processes.

    SCANNING MICROSCOPE
    6.
    发明申请
    SCANNING MICROSCOPE 审中-公开

    公开(公告)号:US20180003938A1

    公开(公告)日:2018-01-04

    申请号:US15629539

    申请日:2017-06-21

    CPC classification number: G02B21/0084 G01B11/2518 G02B21/0024 G02B21/0048

    Abstract: A scanning microscope includes a two-dimensional scanning device that includes a first scanner and a second scanner for scanning, in oscillation motion and with light, a sample in directions orthogonal to each other, the first scanner scanning the sample at a speed higher than a speed of the second scanner, and a scan controller that controls the two-dimensional scanning device.

    THREE-DIMENSIONAL SHAPE MEASUREMENT APPARATUS
    8.
    发明申请
    THREE-DIMENSIONAL SHAPE MEASUREMENT APPARATUS 审中-公开
    三维形状测量装置

    公开(公告)号:US20160275689A1

    公开(公告)日:2016-09-22

    申请号:US15057943

    申请日:2016-03-01

    Abstract: A technology is provided that makes it possible for even a beginner to determine whether a measurement result is correct, to thereby prevent the use of incorrect measurement data, and to improve the reliability of an analysis result. In a three-dimensional shape measurement apparatus 100 that measures a three-dimensional shape of a specimen 3 in a non-contacting manner, a score that evaluates the reliability of measurement data is calculated for each measurement point by use of information obtained during a process of estimating the height of the specimen 3 or the estimated height. Measurement data is processed according to a result of evaluating the measurement data for each measurement point by use of the score.

    Abstract translation: 提供了一种技术,即使是初学者也可以确定测量结果是否正确,从而防止使用不正确的测量数据,并提高分析结果的可靠性。 在以非接触的方式测量样本3的三维形状的三维形状测量装置100中,通过使用在处理期间获得的信息,针对每个测量点计算评估测量数据的可靠性的评分 估计样品3的高度或估计的高度。 根据通过使用评分对每个测量点的测量数据进行评估的结果来处理测量数据。

    CONFOCAL LASER SCANNING MICROSCOPE
    9.
    发明申请
    CONFOCAL LASER SCANNING MICROSCOPE 审中-公开
    共焦激光扫描显微镜

    公开(公告)号:US20160054552A1

    公开(公告)日:2016-02-25

    申请号:US14931455

    申请日:2015-11-03

    Inventor: Yosuke TANI

    CPC classification number: G02B21/0032 G02B21/0044 G02B21/0052 G02B21/008

    Abstract: A confocal laser scanning microscope includes a laser light source configured to emit laser light as illumination light, an objective, a scanner placed in an optical path between the laser light source and the objective for scanning the sample with the illumination light, and a stop placed on a pupil plane of the objective or in its vicinity, or on a plane that is optically conjugate with the pupil plane of the objective or in its vicinity, configured to block, of light from the sample, light that is a regular reflection of the illumination light cast on the sample. The stop is placed on a plane that is conjugate with the pupil plane of the objective or in its vicinity in an optical path between the laser light source and the scanner.

    Abstract translation: 共聚焦激光扫描显微镜包括配置为发射激光作为照明光的激光光源,物镜,放置在激光光源和用于用照明光扫描样品的物镜之间的光路中的扫描仪,以及停止放置 在物镜的光瞳平面上,或者在与物镜的光瞳平面或其附近光学共轭的平面上,被配置为阻挡来自样品的光,作为该物体的正常反射的光 样品照射光。 将停止件放置在与物体的光瞳平面共轭的平面上或其在激光光源和扫描仪之间的光路中的附近。

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