公开(公告)号：US20220107169A1

公开(公告)日：2022-04-07

申请号：US17493745

申请日：2021-10-04

Applicant: OLYMPUS CORPORATION

Inventor： Yosuke TANI ,  Hirofumi HORI ,  Takahiro FURUKAWA ,  Tsukasa NITTONO ,  Takayuki KOMIYA

IPC: G01B11/06 ,  G01B11/30 ,  G06T7/40

Abstract: A measurement system includes: an optical measurement instrument that measures a surface of a specimen; and a control apparatus that controls the measurement instrument. The control apparatus includes: one or more non-transitory computer-readable media that include an instruction; and one or more processors that execute the instruction. The instruction is configured to cause the one or more processors to execute an operation. The operation includes: causing the measurement instrument to repetitively measure the surface of the specimen without changing the setting; and evaluating appropriateness of the setting for measuring surface texture of the specimen, based on comparison between a measurement value of the surface texture of the specimen calculated from a measurement data item output from the measurement instrument, and a degree of variation in measurement by the measurement instrument calculated from a plurality of measurement data items output from the measurement instrument.

公开(公告)号：US20220108064A1

公开(公告)日：2022-04-07

申请号：US17493763

申请日：2021-10-04

Applicant: OLYMPUS CORPORATION

Inventor： Yosuke TANI ,  Hirofumi HORI ,  Takahiro FURUKAWA ,  Tsukasa NITTONO ,  Takayuki KOMIYA

IPC: G06F40/177 ,  G06F40/171 ,  G06F40/106 ,  G06T7/00

Abstract: An experiment support apparatus includes: one or more non-transitory computer-readable media that include an instruction; and one or more processors that execute the instruction. The instruction is configured to cause the one or more processors to execute an operation, the operation includes: causing a display device to display a condition table TB that indicates an experiment condition for measurement, in response to an input of the experiment condition; and causing the display device to display at least one of a measurement result based on measurement data, or an analysis result of the measurement data, in a cell of the condition table TB, in response to an input of the measurement data, the measurement data being obtained using a measurement apparatus under the experiment condition corresponding to the cell.