SCANNING CONFOCAL MICROSCOPE APPARATUS, SCANNING CONTROL METHOD, AND RECORDING MEDIUM

    公开(公告)号:US20180164563A1

    公开(公告)日:2018-06-14

    申请号:US15819358

    申请日:2017-11-21

    Abstract: A scanning confocal microscope apparatus includes: a scanning confocal microscope that includes an objective lens; a computing device that divides a range in a direction of an optical axis of the objective lens of a preliminary scanning area on which preliminary scanning has been performed into a plurality of groups, in accordance with data obtained by performing the preliminary scanning using the scanning confocal microscope; and a controller that controls the scanning confocal microscope so as to perform principal scanning in which at least a portion of the preliminary scanning area is scanned under a measurement condition determined for each of the plurality of groups.

    THREE-DIMENSIONAL SHAPE MEASUREMENT APPARATUS
    3.
    发明申请
    THREE-DIMENSIONAL SHAPE MEASUREMENT APPARATUS 审中-公开
    三维形状测量装置

    公开(公告)号:US20160275689A1

    公开(公告)日:2016-09-22

    申请号:US15057943

    申请日:2016-03-01

    Abstract: A technology is provided that makes it possible for even a beginner to determine whether a measurement result is correct, to thereby prevent the use of incorrect measurement data, and to improve the reliability of an analysis result. In a three-dimensional shape measurement apparatus 100 that measures a three-dimensional shape of a specimen 3 in a non-contacting manner, a score that evaluates the reliability of measurement data is calculated for each measurement point by use of information obtained during a process of estimating the height of the specimen 3 or the estimated height. Measurement data is processed according to a result of evaluating the measurement data for each measurement point by use of the score.

    Abstract translation: 提供了一种技术,即使是初学者也可以确定测量结果是否正确,从而防止使用不正确的测量数据,并提高分析结果的可靠性。 在以非接触的方式测量样本3的三维形状的三维形状测量装置100中,通过使用在处理期间获得的信息,针对每个测量点计算评估测量数据的可靠性的评分 估计样品3的高度或估计的高度。 根据通过使用评分对每个测量点的测量数据进行评估的结果来处理测量数据。

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