公开(公告)号：US20160187369A1

公开(公告)日：2016-06-30

申请号：US14625106

申请日：2015-02-18

Applicant: National Applied Research Laboratories

Inventor： Sheng-Hsiang TSENG ,  Yi-Jen WANG ,  Hann-Huei TSAI ,  Ying-Zong JUANG

IPC: G01P15/02

CPC classification number: G01P15/125 ,  G01P15/0802 ,  G01P2015/0831

Abstract: The present invention discloses a monolithic z-axis torsional CMOS MEMS accelerometer, it includes a curl matching frame, two anchors, a first comb structure, a second comb structure and a proof mass. With the implementation of the present invention, the capacitance sensitivity of Z+ direction and Z− direction sensing signals by the accelerometer can be improved. On the other hand, due to the feasibility of applying micromachining etch processes from the top side, the ease and the yield of production are both promoted.

Abstract translation: 本发明公开了一种单片z轴扭转CMOS MEMS加速度计，其包括卷曲匹配框架，两个锚固件，第一梳状结构，第二梳状结构和证明块。 通过实施本发明，可以提高加速度计的Z +方向和Z方向感测信号的电容灵敏度。 另一方面，由于从上侧施加微加工蚀刻工艺的可行性，促进了生产的容易性和产量。

公开(公告)号：US20150168362A1

公开(公告)日：2015-06-18

申请号：US14185245

申请日：2014-02-20

Applicant: National Applied Research Laboratories

Inventor： Che-Hsin LIN ,  Jun-Jie WANG ,  Ying-Zong JUANG ,  Hann-Huei TSAI ,  Hsin-Hao LIAO

IPC: G01N33/00 ,  G01N27/00 ,  H05K3/00 ,  B29C65/00 ,  B29C43/02

CPC classification number: G01N33/0009 ,  B01L3/502707 ,  B01L3/502715 ,  B01L2300/0645 ,  B01L2300/0816 ,  B01L2400/0415 ,  B29C43/18 ,  B29K2083/005 ,  B29L2031/752 ,  H01L2224/16225 ,  H01L2224/49171 ,  H01L2924/15174 ,  H05K1/0272 ,  H05K2201/10151 ,  Y10T29/49124

Abstract: A microfluidic channel detection system for environmental or biomedical detection includes a chip having a first surface where a sensing region is located, a substrate having a recess for containing the chip, in which the first surface is exposed, a first inactive layer filling gaps between the chip and the substrate in the recess, so as to form a plane with the first surface of the chip, an electrical connection member electrically connected to the chip, a cover having a microfluidic channel and disposed on the plane. The flow path in the microfluidic channel is smooth, and further the measurement accuracy is improved via the plane formed by the first inactive layer and the first surface.

Abstract translation: 用于环境或生物医学检测的微流体通道检测系统包括具有感测区域所在的第一表面的芯片，具有用于容纳第一表面露出的芯片的凹部的基板，填充第一表面之间的间隙的第一非活性层 芯片和衬底，以便与芯片的第一表面形成平面，与芯片电连接的电连接构件，具有微流体通道并设置在平面上的盖。 微流体通道中的流动路径是平滑的，并且还通过由第一非活性层和第一表面形成的平面来提高测量精度。