公开(公告)号：US20160187369A1

公开(公告)日：2016-06-30

申请号：US14625106

申请日：2015-02-18

Applicant: National Applied Research Laboratories

Inventor： Sheng-Hsiang TSENG ,  Yi-Jen WANG ,  Hann-Huei TSAI ,  Ying-Zong JUANG

IPC: G01P15/02

CPC classification number: G01P15/125 ,  G01P15/0802 ,  G01P2015/0831

Abstract: The present invention discloses a monolithic z-axis torsional CMOS MEMS accelerometer, it includes a curl matching frame, two anchors, a first comb structure, a second comb structure and a proof mass. With the implementation of the present invention, the capacitance sensitivity of Z+ direction and Z− direction sensing signals by the accelerometer can be improved. On the other hand, due to the feasibility of applying micromachining etch processes from the top side, the ease and the yield of production are both promoted.

Abstract translation: 本发明公开了一种单片z轴扭转CMOS MEMS加速度计，其包括卷曲匹配框架，两个锚固件，第一梳状结构，第二梳状结构和证明块。 通过实施本发明，可以提高加速度计的Z +方向和Z方向感测信号的电容灵敏度。 另一方面，由于从上侧施加微加工蚀刻工艺的可行性，促进了生产的容易性和产量。