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公开(公告)号:US11415457B2
公开(公告)日:2022-08-16
申请号:US16170471
申请日:2018-10-25
Applicant: NATIONAL APPLIED RESEARCH LABORATORIES
Inventor: Yu-Sheng Lai , Jui-Min Liu , Hsu-Chun Cheng , Mei-I Li , Chun-Chi Chen , Cheng-San Wu , Jia-Min Shieh
IPC: G01H11/02
Abstract: The present invention provides a vibration sensor, which comprises a circuit board having an accommodating space. A sensing assembly is disposed in the accommodating space. A recess for magnet sliding is disposed in the sensing assembly. Dispose a magnet in the recess and then dispose a coil layer on an arbitrary side or both sides of the sensing assembly. Furthermore, a lubricating layer is coated on the recess. Alternatively, the recess can be a vacuum structure or a hollow cross-sectional structure for reducing the friction between the recess and the magnet. Alternatively, the coil layer can be coated with a protective layer or multiple layers can be stacked. Without increasing the area of the sensor, the sensing on the variation of magnetic flux can be improved. Accordingly, the vibration sensor according to the present invention can achieve wideband detection of vibrations.
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公开(公告)号:US10180509B2
公开(公告)日:2019-01-15
申请号:US14876812
申请日:2015-10-06
Applicant: National Applied Research Laboratories
Inventor: Yung-Bin Lin , Yu-Sheng Lai , Meng-Huang Gu , Ho-Min Chang , Kuo-Chun Chang , Yuan-Chen Liao , Yung-Kang Wang , Mei-Yi Li , Cheng-San Wu , Wen-Kuan Yeh
Abstract: An environment monitoring system is utilized for monitoring an environmental variation status of a riverbed, a lake floor, or a seabed. The environment monitor system includes a wire drawing device configured at a monitoring point for releasing and tightening a transmission wire; a fixing pipe laid between the monitoring point and a structure layer for containing the transmission wire; a plurality of vibration sensing devices respectively configured on the transmission wire for converting sensed vibration energy to a plurality of electric signals and transmitting the plurality of electric signals by the transmission wire; an analyzing device coupled with the wire drawing device and the transmission wire for obtaining a released length of the transmission wire by the wire drawing device and determining the environmental variation status according to the released length and the plurality of electric signals to perform monitoring.
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公开(公告)号:US20160154128A1
公开(公告)日:2016-06-02
申请号:US14876812
申请日:2015-10-06
Applicant: National Applied Research Laboratories
Inventor: Yung-Bin Lin , Yu-Sheng Lai , Meng-Huang Gu , Ho-Min Chang , Kuo-Chun Chang , Yuan-Chen Liao , Yung-Kang Wang , Mei-Yi Li , Cheng-San Wu , Wen-Kuan Yeh
Abstract: An environment monitoring system is utilized for monitoring an environmental variation status of a riverbed, a lake floor, or a seabed. The environment monitor system includes a wire drawing device configured at a monitoring point for releasing and tightening a transmission wire; a fixing pipe laid between the monitoring point and a structure layer for containing the transmission wire; a plurality of vibration sensing devices respectively configured on the transmission wire for converting sensed vibration energy to a plurality of electric signals and transmitting the plurality of electric signals by the transmission wire; an analyzing device coupled with the wire drawing device and the transmission wire for obtaining a released length of the transmission wire by the wire drawing device and determining the environmental variation status according to the released length and the plurality of electric signals to perform monitoring.
Abstract translation: 利用环境监测系统监测河床,湖底或海底的环境变化状况。 环境监视器系统包括配置在用于释放和紧固传输线的监控点处的拉丝装置; 位于监测点和用于容纳传输线的结构层之间的固定管; 分别配置在所述传输线上的多个振动感测装置,用于将检测到的振动能量转换为多个电信号,并通过所述传输线传输所述多个电信号; 与拉丝装置和传输线耦合的分析装置,用于通过拉丝装置获得传输线的释放长度,并根据释放的长度和多个电信号确定环境变化状态以进行监视。
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公开(公告)号:US08679728B2
公开(公告)日:2014-03-25
申请号:US13684019
申请日:2012-11-21
Applicant: National Applied Research Laboratories
Inventor: Chien-Chao Huang , Chun-Chi Chen , Shyi-Long Shy , Cheng-San Wu , Fu-Liang Yang
CPC classification number: G03F7/2022 , C23C14/048 , C23C16/047 , G03F7/20 , G03F7/203 , G03F7/2059 , H01L21/0337 , H01L21/31105 , H01L21/3213 , Y10T428/24612 , Y10T428/24802
Abstract: A method for fabricating a patterned layer is disclosed. Firstly, a semiconductor substrate is provided. Then, a precursory gas on the semiconductor substrate is formed. Finally, a patterned layer on the semiconductor substrate is deposited by reacting the precursory gas with at least one electron beam or at least one ion beam. The present invention not only fabricates a patterned layer on the substrate in a single step but also achieves a high lithographic resolution and avoids remains of contaminations by using the properties of the electron beam or the ion beam and the precursory gas.
Abstract translation: 公开了一种用于制造图案层的方法。 首先,提供半导体衬底。 然后,形成半导体衬底上的前体气体。 最后,通过使前体气体与至少一个电子束或至少一个离子束反应来沉积半导体衬底上的图案层。 本发明不仅在单个步骤中在基板上制造图案层,而且还实现了高的光刻分辨率,并且通过使用电子束或离子束和前体气体的性质避免了污染物的残留。
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