公开(公告)号：US08679728B2

公开(公告)日：2014-03-25

申请号：US13684019

申请日：2012-11-21

Applicant: National Applied Research Laboratories

Inventor： Chien-Chao Huang ,  Chun-Chi Chen ,  Shyi-Long Shy ,  Cheng-San Wu ,  Fu-Liang Yang

IPC: G03F7/20 ,  G03C5/00

CPC classification number: G03F7/2022 ,  C23C14/048 ,  C23C16/047 ,  G03F7/20 ,  G03F7/203 ,  G03F7/2059 ,  H01L21/0337 ,  H01L21/31105 ,  H01L21/3213 ,  Y10T428/24612 ,  Y10T428/24802

Abstract: A method for fabricating a patterned layer is disclosed. Firstly, a semiconductor substrate is provided. Then, a precursory gas on the semiconductor substrate is formed. Finally, a patterned layer on the semiconductor substrate is deposited by reacting the precursory gas with at least one electron beam or at least one ion beam. The present invention not only fabricates a patterned layer on the substrate in a single step but also achieves a high lithographic resolution and avoids remains of contaminations by using the properties of the electron beam or the ion beam and the precursory gas.

Abstract translation: 公开了一种用于制造图案层的方法。 首先，提供半导体衬底。 然后，形成半导体衬底上的前体气体。 最后，通过使前体气体与至少一个电子束或至少一个离子束反应来沉积半导体衬底上的图案层。 本发明不仅在单个步骤中在基板上制造图案层，而且还实现了高的光刻分辨率，并且通过使用电子束或离子束和前体气体的性质避免了污染物的残留。

公开(公告)号：US11415457B2

公开(公告)日：2022-08-16

申请号：US16170471

申请日：2018-10-25

Applicant: NATIONAL APPLIED RESEARCH LABORATORIES

Inventor： Yu-Sheng Lai ,  Jui-Min Liu ,  Hsu-Chun Cheng ,  Mei-I Li ,  Chun-Chi Chen ,  Cheng-San Wu ,  Jia-Min Shieh

IPC: G01H11/02

Abstract: The present invention provides a vibration sensor, which comprises a circuit board having an accommodating space. A sensing assembly is disposed in the accommodating space. A recess for magnet sliding is disposed in the sensing assembly. Dispose a magnet in the recess and then dispose a coil layer on an arbitrary side or both sides of the sensing assembly. Furthermore, a lubricating layer is coated on the recess. Alternatively, the recess can be a vacuum structure or a hollow cross-sectional structure for reducing the friction between the recess and the magnet. Alternatively, the coil layer can be coated with a protective layer or multiple layers can be stacked. Without increasing the area of the sensor, the sensing on the variation of magnetic flux can be improved. Accordingly, the vibration sensor according to the present invention can achieve wideband detection of vibrations.