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    Accurate Raman spectroscopy
    1.
    发明授权
    Accurate Raman spectroscopy 有权

    公开(公告)号：US12163892B2

    公开(公告)日：2024-12-10

    申请号：US18452494

    申请日：2023-08-18

    Applicant: NOVA LTD.

    Inventor： Elad Schleifer ,  Yonatan Oren ,  Amir Shayari ,  Eyal Hollander ,  Valery Deich ,  Shimon Yalov ,  Gilad Barak

    IPC: G01J3/44 ,  G01J3/02 ,  G01N21/65

    Abstract: A method, a system, and a non-transitory computer readable medium for accurate Raman spectroscopy. The method may include executing at least one iteration of the steps of: (i) performing, by an optical measurement system, a calibration process that comprises (a) finding a misalignment between a region of interest defined by a spatial filter, and an impinging beam of radiation that is emitted from an illuminated area of a sample, the impinging beam impinges on the spatial filter; and (b) determining a compensating path of propagation of the impinging beam that compensates the misalignment; and (ii) performing a measurement process, while the optical measurement system is configured to provide the compensating path of propagation of the impinging beam, to provide one or more Raman spectra.

    Method and system for broadband photoreflectance spectroscopy
    2.
    发明授权
    Method and system for broadband photoreflectance spectroscopy 有权

    公开(公告)号：US11802829B2

    公开(公告)日：2023-10-31

    申请号：US17757224

    申请日：2020-12-08

    Applicant: NOVA LTD.

    Inventor： Yonatan Oren ,  Gilad Barak

    IPC: G01N21/25 ,  G01N21/17

    CPC classification number: G01N21/1717 ,  G01N21/25 ,  G01N2021/1725

    Abstract: Photoreflectance (PR) spectroscopy system and method for accumulating separately a “pump on” light beam and a “pump off light beam reflecting off a sample. The system comprises: (a) a probe source for producing a probe beam, the probe beam is used for measuring spectral reflectivity of a sample, (b) a pump source for producing a pump beam, (c) at least one spectrometer, (d) a first modulation device to allow the pump beam to alternatingly modulate the spectral reflectivity of the sample, so that, a light beam reflecting from the sample is alternatingly a “pump on” light beam and a “pump off light beam, (e) a second modulation device in a path of the light beam reflecting off the sample to alternatingly direct the “pump on” light beam and the “pump off light beam to the at least one spectrometer, and (f) a computer.

    ACCURATE RAMAN SPECTROSCOPY
    3.
    发明申请
    ACCURATE RAMAN SPECTROSCOPY 有权

    公开(公告)号：US20250130172A1

    公开(公告)日：2025-04-24

    申请号：US18936790

    申请日：2024-11-04

    Applicant: NOVA LTD.

    Inventor： Elad Schleifer ,  Yonatan Oren ,  Amir Shayari ,  Eyal Hollander ,  Valery Deich ,  Shimon YALOV ,  Gilad Barak

    IPC: G01N21/65 ,  G01J3/02 ,  G01J3/44

    Abstract: An optical measurement system, which include an illumination path that is configured to illuminate an illuminated area of a sample; a collection path configured to collect illumination emitted from the illuminated area as a result of the illumination of the illuminated area; a spatial filter that is tunable; a Raman detector; and wherein the spatial filter is positioned upstream to the Raman detector, and is configured to spatially filter the illumination emitted from the illuminated area to provide spatially filtered illumination. The Raman detector is configured to receive the spatially filtered illumination and to generate one or more Raman spectra.

    Accurate raman spectroscopy
    4.
    发明授权
    Accurate raman spectroscopy 有权

    公开(公告)号：US11860104B2

    公开(公告)日：2024-01-02

    申请号：US17816713

    申请日：2022-08-01

    Applicant: NOVA LTD.

    Inventor： Eyal Hollander ,  Gilad Barak ,  Elad Schleifer ,  Yonatan Oren ,  Amir Shayari

    IPC: G01J3/44 ,  G01N21/65 ,  G01J3/02

    CPC classification number: G01N21/65 ,  G01J3/0205 ,  G01J3/027 ,  G01J3/4412 ,  G01N2201/0636 ,  G01N2201/06113

    Abstract: A method, a system, and a non-transitory computer readable medium for Raman spectroscopy. The method may include determining first acquisition parameters of a Raman spectroscope to provide a first acquisition set-up, the determining is based on at least one expected radiation pattern to be detected by a sensor of the Raman spectroscope as a result of an illumination of a first area of a sample, the first area comprises a first nano-scale structure, wherein at least a part of the at least one expected radiation pattern is indicative of at least one property of interest of the first nano-scale structure of the sample; wherein the first acquisition parameters belong to a group of acquisition parameters; setting the Raman spectroscope according to the first acquisition set-up; and acquiring at least one first Raman spectrum of the first nano-scale structure of the sample, while being set according to the first acquisition set-up.

    Raman spectroscopy based measurements in patterned structures
    5.
    发明授权
    Raman spectroscopy based measurements in patterned structures 有权

    公开(公告)号：US11275027B2

    公开(公告)日：2022-03-15

    申请号：US16792937

    申请日：2020-02-18

    Applicant: NOVA LTD

    Inventor： Gilad Barak ,  Yanir Hainick ,  Yonatan Oren ,  Vladimir Machavariani

    IPC: G01N21/65 ,  G01B11/06 ,  G01N21/95 ,  G03F7/20 ,  H01L21/66 ,  G01L1/24

    Abstract: A method for use in measuring one or more characteristics of patterned structures, the method including providing measured data comprising data indicative of at least one Raman spectrum obtained from a patterned structure under measurements using at least one selected optical measurement scheme each with a predetermined configuration of at least one of illuminating and collected light conditions corresponding to the one or more characteristics to be measured, processing the measured data, and determining, for each of the at least one Raman spectrum, a distribution of Raman-contribution efficiency (RCE) within at least a part of the structure under measurements, being dependent on characteristics of the structure and the predetermined configuration of the at least one of illuminating and collected light conditions in the respective optical measurement scheme, and analyzing the distribution of Raman-contribution efficiency and determining the one or more characteristics of the structure.

    ACCURATE RAMAN SPECTROSCOPY
    7.
    发明公开
    ACCURATE RAMAN SPECTROSCOPY 审中-公开

    公开(公告)号：US20240085333A1

    公开(公告)日：2024-03-14

    申请号：US18452494

    申请日：2023-08-18

    Applicant: NOVA LTD.

    Inventor： Elad Schleifer ,  Yonatan Oren ,  Amir Shayari ,  Eyal Hollander ,  Valery Deich ,  Shimon YALOV ,  Gilad BARAK

    IPC: G01N21/65 ,  G01J3/02 ,  G01J3/44

    CPC classification number: G01N21/65 ,  G01J3/0205 ,  G01J3/027 ,  G01J3/4412 ,  G01N2201/06113 ,  G01N2201/0636

    Abstract: A method, a system, and a non-transitory computer readable medium for accurate Raman spectroscopy. The method may include executing at least one iteration of the steps of: (i) performing, by an optical measurement system, a calibration process that comprises (a) finding a misalignment between a region of interest defined by a spatial filter, and an impinging beam of radiation that is emitted from an illuminated area of a sample, the impinging beam impinges on the spatial filter; and (b) determining a compensating path of propagation of the impinging beam that compensates the misalignment; and (ii) performing a measurement process, while the optical measurement system is configured to provide the compensating path of propagation of the impinging beam, to provide one or more Raman spectra.

    Hybrid metrology method and system
    9.
    发明授权
    Hybrid metrology method and system 有权

    公开(公告)号：US11150190B2

    公开(公告)日：2021-10-19

    申请号：US16945975

    申请日：2020-08-03

    Applicant: NOVA LTD.

    Inventor： Gilad Barak ,  Yanir Hainick ,  Yonatan Oren

    IPC: G01N21/65 ,  G01B11/06 ,  G01N21/95 ,  G03F7/20 ,  H01L21/66 ,  G01L1/24

    Abstract: A method and system are presented for use in measuring characteristic(s) of patterned structures. The method utilizes processing of first and second measured data, wherein the first measured data is indicative of at least one Raman spectrum obtained from a patterned structure under measurements using at least one selected optical measurement scheme each with a predetermined configuration of illuminating and/or collected light conditions corresponding to the characteristic(s) to be measured, and the second measured data comprises at least one spectrum obtained from the patterned structure in Optical Critical Dimension (OCD) measurement session. The processing comprises applying model-based analysis to the at least one Raman spectrum and the at least one OCD spectrum, and determining the characteristic(s) of the patterned structure under measurements.

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