Inspection jig and inspection device

    公开(公告)号:US12072352B2

    公开(公告)日:2024-08-27

    申请号:US17636901

    申请日:2020-08-08

    Inventor: Michio Kaida

    CPC classification number: G01R1/07314 G01R31/2831

    Abstract: An inspection jig includes: film-shaped wiring substrates each having one surface provided with an electrode; a pedestal that supports the wiring substrates which are laminated such that electrode regions are exposed, the electrode region being a region where the electrode is provided in each of the wiring substrates; and a plurality of probes which have base end portions in contact with the electrode regions and extend in a direction away from the electrode regions.

    Inspection jig
    4.
    发明授权

    公开(公告)号:US11977100B2

    公开(公告)日:2024-05-07

    申请号:US17432114

    申请日:2020-02-20

    Inventor: Michio Kaida

    CPC classification number: G01R1/07342

    Abstract: An inspection jig includes contact terminals and a pitch conversion unit electrically connected to the contact terminals and configured to convert a first pitch between adjacent two of the contact terminals into a second pitch different from the first pitch. The contact terminals each include a tubular body that extends in an axial direction of the contact terminal and is electrically conductive, and a conductor that is electrically conductive and has a stick shape. The tubular body includes a spring portion that has a helical shape along a peripheral surface of the tubular body. The conductor includes an uninserted portion that protrudes from the tubular body toward a first side in the axial direction, and an inserted portion that is disposed in the tubular body and is fixed to a first axial end portion of the tubular body. The pitch conversion unit includes a board portion and a protruding portion.

    Contact terminal, inspection jig, and inspection device

    公开(公告)号:US12013416B2

    公开(公告)日:2024-06-18

    申请号:US17598918

    申请日:2020-03-12

    CPC classification number: G01R1/07342 G01R31/2818

    Abstract: In a contact terminal, the first insertion portion includes a first contact portion having a first flat surface along an axial direction, the second insertion portion includes a second contact portion having a second flat surface along the axial direction, the first flat surface and the second flat surface are in contact with each other, the tubular body includes at least one of a first end side notch provided along the axial direction on a peripheral surface of the one end portion in the axial direction of the tubular body and a second end side notch provided along the axial direction on a peripheral surface of the other end portion in the axial direction of the tubular body.

    Probe, inspection jig, inspection device, and method of manufacturing probe

    公开(公告)号:US10962569B2

    公开(公告)日:2021-03-30

    申请号:US16413609

    申请日:2019-05-16

    Abstract: Provided are a probe that enables control of a bending direction and can be simply manufactured, an inspection jig using the probe, an inspection device, and a method of manufacturing the probe. A probe has a substantially bar-like shape extending linearly and includes: a tip end portion, a body portion continuous with the tip end portion Pa; and a base end portion continuous with the body portion. The body portion includes a first connection region having a thickness in a thickness direction perpendicular to an axial direction of the bar-like shape that gradually decreases away from the tip end portion, and a second connection region having a thickness that gradually decreases away from the base end portion. A dimension of the body portion in a width direction perpendicular to the thickness direction is larger than dimensions of the tip end portion and the base end portion.

    PROCESSING OBJECT TRANSPORT SYSTEM, AND SUBSTRATE INSPECTION SYSTEM
    8.
    发明申请
    PROCESSING OBJECT TRANSPORT SYSTEM, AND SUBSTRATE INSPECTION SYSTEM 审中-公开
    加工对象运输系统和基板检查系统

    公开(公告)号:US20150086303A1

    公开(公告)日:2015-03-26

    申请号:US14487126

    申请日:2014-09-16

    Abstract: A substrate inspection system includes a plurality of processing units, and each processing unit is provided with a transport mechanism configured to transport an substrate to be inspected along a transport passage which extends substantially horizontally, a lift mechanism configured to lift the substrate to be inspected to a height position, at a set position on the transport passage, and processors each configured to perform a predetermined process on the substrate to be inspected positioned at the height position. The processing units are arranged such that transport passages thereof are aligned and such that the transport directions thereof are the same direction. Between two adjacent transport passages, the substrate to be inspected is delivered from the transport passage on an upstream side to the transport passage on a downstream side.

    Abstract translation: 基板检查系统包括多个处理单元,并且每个处理单元设置有传送机构,其构造成沿着基本上水平地延伸的传送通道传送待检查的基板;升降机构,其构造成将要检查的基板提升到 高度位置,在输送通道上的设定位置,以及处理器,每个处理器被配置为在待检查的基板上执行预定处理,位于高度位置。 处理单元布置成使得其输送通道对齐并使其输送方向相同。 在两个相邻的输送通道之间,待检查的基板在上游侧从输送通道在下游侧输送到输送通道。

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