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    PROCESSING OBJECT TRANSPORT SYSTEM, AND SUBSTRATE INSPECTION SYSTEM
    3.
    发明申请
    PROCESSING OBJECT TRANSPORT SYSTEM, AND SUBSTRATE INSPECTION SYSTEM 审中-公开
    加工对象运输系统和基板检查系统

    公开(公告)号：US20150086303A1

    公开(公告)日：2015-03-26

    申请号：US14487126

    申请日：2014-09-16

    Applicant: NIDEC-READ CORPORATION

    Inventor： Takashi Nakagawa ,  Toshihide Matsukawa ,  Osamu Hikita ,  Akira Ogata ,  Michio Kaida

    IPC: H01L21/677 ,  H01L21/67

    CPC classification number: H01L21/67721 ,  H01L21/67173 ,  H01L21/67242 ,  H01L21/67253 ,  H01L21/67703 ,  H01L21/67748 ,  H01L21/6776

    Abstract: A substrate inspection system includes a plurality of processing units, and each processing unit is provided with a transport mechanism configured to transport an substrate to be inspected along a transport passage which extends substantially horizontally, a lift mechanism configured to lift the substrate to be inspected to a height position, at a set position on the transport passage, and processors each configured to perform a predetermined process on the substrate to be inspected positioned at the height position. The processing units are arranged such that transport passages thereof are aligned and such that the transport directions thereof are the same direction. Between two adjacent transport passages, the substrate to be inspected is delivered from the transport passage on an upstream side to the transport passage on a downstream side.

    Abstract translation: 基板检查系统包括多个处理单元，并且每个处理单元设置有传送机构，其构造成沿着基本上水平地延伸的传送通道传送待检查的基板;升降机构，其构造成将要检查的基板提升到 高度位置，在输送通道上的设定位置，以及处理器，每个处理器被配置为在待检查的基板上执行预定处理，位于高度位置。 处理单元布置成使得其输送通道对齐并使其输送方向相同。 在两个相邻的输送通道之间，待检查的基板在上游侧从输送通道在下游侧输送到输送通道。

    CONTACT APPARATUS
    4.
    发明申请
    CONTACT APPARATUS 审中-公开
    联系设备

    公开(公告)号：US20150083449A1

    公开(公告)日：2015-03-26

    申请号：US14488378

    申请日：2014-09-17

    Applicant: NIDEC-READ CORPORATION

    Inventor： Takashi Nakagawa ,  Toshihide Matsukawa

    IPC: B25B28/00

    CPC classification number: B25B28/00 ,  B25B5/061 ,  H01L21/67132 ,  H01L21/67138 ,  H01L21/67144 ,  H01L24/01

    Abstract: A contact head unit provided in a contact apparatus may be provided with a contact rod, a housing, a thrust air passage, and a cancel air passage. The housing supports the contact rod linearly movably by a static pressure air bearing, which allows the contact rod to be brought into contact with an object. If a compressed air is supplied to the thrust air passage, a force in a direction of approaching the object acts on the contact rod. If the compressed air is supplied to the cancel air passage, a force in an opposite direction acts on the contact rod. A control unit sets applied pressure on the object by controlling the pressure of the compressed air of the thrust air passage and the pressure of the compressed air of the cancel air passage while the contact rod is in contact with the object.

    Abstract translation: 设置在接触装置中的接触头单元可以设置有接触杆，壳体，推力空气通道和取消空气通道。 壳体通过静压空气轴承线性地可移动地支撑接触杆，这允许接触杆与物体接触。 如果向推力空气通道供应压缩空气，则接近对象的方向上的力作用在接触杆上。 如果压缩空气被供应到取消空气通道，则相反方向的力作用在接触杆上。 控制单元通过控制推力空气通道的压缩空气的压力和抵消空气通道的压缩空气的压力，同时在接触杆与物体接触的同时，对物体施加压力。

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