公开(公告)号：US07595708B2

公开(公告)日：2009-09-29

申请号：US11809894

申请日：2007-06-01

Applicant: Markus Lutz ,  Aaron Partridge ,  Zhiyu Pan

Inventor： Markus Lutz ,  Aaron Partridge ,  Zhiyu Pan

IPC: H03H9/46

CPC classification number: H03H9/2405 ,  H03H3/0076 ,  H03H9/02338 ,  H03H9/02448 ,  H03H9/2431 ,  H03H9/462 ,  H03H9/505 ,  H03H2009/02354 ,  H03H2009/0244 ,  H03H2009/02496 ,  H03H2009/02503 ,  H03H2009/02511 ,  H03H2009/02527

Abstract: A MEMS array structure includes MEMS resonators that form an array. Each MEMS resonator includes beam sections. At least one of the beam sections of a first one of the MEMS resonators is a shared beam section that is also included in another of the MEMS resonators adjacent to the first MEMS resonator.

Abstract translation: MEMS阵列结构包括形成阵列的MEMS谐振器。 每个MEMS谐振器包括梁部分。 MEMS谐振器中的第一个的至少一个光束部分是共享光束部分，其也包括在与第一MEMS谐振器相邻的另一个MEMS谐振器中。

公开(公告)号：US20070001783A1

公开(公告)日：2007-01-04

申请号：US11172143

申请日：2005-06-30

Applicant: Markus Lutz ,  Aaron Partridge ,  Zhiyu Pan

Inventor： Markus Lutz ,  Aaron Partridge ,  Zhiyu Pan

IPC: H03H9/50

CPC classification number: H03H9/2405 ,  H03H3/0076 ,  H03H9/02338 ,  H03H9/02448 ,  H03H9/2431 ,  H03H9/462 ,  H03H9/505 ,  H03H2009/02354 ,  H03H2009/0244 ,  H03H2009/02496 ,  H03H2009/02503 ,  H03H2009/02511 ,  H03H2009/02527

Abstract: A plurality of mechanically coupled MEMS resonators that are arranged in an N×M MEMS array structure. Each MEMS resonators includes a plurality of straight (or substantially straight) elongated beam sections that are connected by curved/rounded sections. Each elongated beam section is connected to another elongated beam section at a distal end via the curved/rounded sections thereby forming a geometric shape (e.g., a rounded square). Further, each resonator is mechanically coupled to at least one other adjacent resonator of the array via a resonator coupling section. The resonator coupling sections may be disposed between elongated beam sections of adjacent resonators. The resonators, when induced, oscillate at the same or substantially the same frequency. The resonators oscillate in a combined elongating (or breathing) mode and bending mode; that is, the beam sections exhibit an elongating-like (or breathing-like) motion and a bending-like motion. The one or more of the resonators of the array structure may include one or more nodal points or areas (i.e., portions of the resonator that are stationary, experience little movement, and/or are substantially stationary during oscillation of the resonator/array) in one or more portions or areas of the curved sections of the structure. The nodal points are suitable and/or preferable locations to anchor the resonator/array to the substrate.

Abstract translation: 以N×M MEMS阵列结构排列的多个机械耦合的MEMS谐振器。 每个MEMS谐振器包括通过弯曲/圆形部分连接的多个直的（或基本上直的）细长的梁部分。 每个细长梁部分经由弯曲/圆形部分在远端连接到另一个细长梁部分，从而形成几何形状（例如，圆形方形）。 此外，每个谐振器经由谐振器耦合部分机械耦合到阵列的至少一个其它相邻的谐振器。 谐振器耦合部分可以设置在相邻谐振器的细长波束部分之间。 谐振器在感应时以相同或基本相同的频率振荡。 谐振器以组合延长（或呼吸）模式和弯曲模式振荡; 也就是说，梁段呈现伸长状（或呼吸状）运动和弯曲状运动。 阵列结构的一个或多个谐振器可以包括一个或多个节点或区域（即谐振器的静止的部分，在谐振器/阵列的振荡期间经历少量运动和/或基本上静止） 结构的弯曲部分的一个或多个部分或区域。 节点是合适的和/或优选的位置以将谐振器/阵列锚固到基底。

公开(公告)号：US07777596B2

公开(公告)日：2010-08-17

申请号：US12002936

申请日：2007-12-18

Applicant: Markus Lutz ,  Zhiyu Pan ,  Aaron Partridge

Inventor： Markus Lutz ,  Zhiyu Pan ,  Aaron Partridge

IPC: H03H9/02 ,  H03H9/24

CPC classification number: H03H9/02244 ,  B81B3/007 ,  B81B3/0072 ,  B81B2201/0271 ,  B81B2203/0109 ,  B81B2203/0163 ,  H03H3/0076 ,  H03H9/02338 ,  H03H2009/0233 ,  H03H2009/02496 ,  H03H2009/02503

Abstract: A microelectromechanical resonator may include one or more resonator masses that oscillates in a bulk mode and that includes a first plurality of regions each having a density, and a second plurality of regions each having a density, the density of each of the second plurality of regions differing from the density of each of the first plurality of regions. The second plurality of regions may be disposed in a non-uniform arrangement. The oscillation may include a first state in which the resonator mass is contracted, at least in part, in a first and/or a second direction, and expanded, at least in part, in a third and/or a fourth direction, the second direction being opposite the first direction, the fourth direction being opposite the third direction.

Abstract translation: 微机电谐振器可以包括以体模式振荡的一个或多个谐振器质量块，并且其包括每个具有密度的第一多个区域和每个具有密度的第二多个区域，第二多个区域中的每个第二多个区域的密度 不同于第一多个区域中的每一个的密度。 第二多个区域可以以非均匀的布置设置。 振荡可以包括其中谐振器质量至少部分地以第一和/或第二方向收缩并且至少部分地在第三和/或第四方向上膨胀的第一状态，第二状态 方向与第一方向相反，第四方向与第三方向相反。

公开(公告)号：US20090058561A1

公开(公告)日：2009-03-05

申请号：US11850625

申请日：2007-09-05

Applicant: Zhiyu Pan ,  Robert Candler ,  Markus Lutz ,  Aaron Partridge ,  Gary Yama

Inventor： Zhiyu Pan ,  Robert Candler ,  Markus Lutz ,  Aaron Partridge ,  Gary Yama

IPC: H03H9/00

CPC classification number: H03H9/2431 ,  H03H9/02338 ,  H03H9/505 ,  H03H2009/02496 ,  H03H2009/02503 ,  H03H2009/02527

Abstract: A system and method are provided which includes ring resonator structures coupled together with beam structure(s). The ring resonators are configured to operate in the contour or breathe mode. The center of the coupling beam structure is used as a nodal anchor point for anchoring the ring resonators and the beam structures, and also provides a reflecting interface. In an embodiment, the coupling beam structure includes two quarter-wavelength matched beams and an anchor located at a nodal point for coupling the two quarter-wavelength matched beams and ring resonator structures. The symmetric ring design also provides a differential drive and sense configuration while balancing the driving forces about the anchor located at the center of the beam structure. The system exhibits low energy losses while providing large sensing signals and a high quality factor (Q) of about 186,000 at a resonant frequency of about twenty-nine (29) MHz.

Abstract translation: 提供了一种系统和方法，其包括与光束结构耦合在一起的环形谐振器结构。 环形谐振器被配置为在轮廓或呼吸模式下操作。 耦合梁结构的中心用作锚定环形谐振器和梁结构的节点锚点，并且还提供反射界面。 在一个实施例中，耦合波束结构包括两个四分之一波长匹配的波束和位于节点处的用于耦合两个四分之一波长匹配的波束和环形谐振器结构的锚。 对称环设计还提供差速驱动和感测构造，同时平衡位于梁结构中心处的锚的驱动力。 该系统在大约二十九（29）MHz的谐振频率下提供大的感测信号和约186,000的高质量因子（Q），表现出低能量损失。

公开(公告)号：US07323952B2

公开(公告)日：2008-01-29

申请号：US11219569

申请日：2005-09-02

Applicant: Zhiyu Pan ,  Aaron Partridge ,  Markus Lutz

Inventor： Zhiyu Pan ,  Aaron Partridge ,  Markus Lutz

IPC: H03H9/46 ,  H03H9/48

CPC classification number: H03H9/2431 ,  H03H3/0077 ,  H03H9/0023 ,  H03H9/02244 ,  H03H9/02259 ,  H03H9/02338 ,  H03H2009/02354 ,  H03H2009/02496 ,  H03H2009/02503 ,  H03H2009/02527

Abstract: There are many inventions described and illustrated herein, as well as many aspects and embodiments of those inventions. In one aspect, the present invention is directed to one or more microelectromechanical ring resonator structures having a circular or substantially circular outer surface and a circular or substantially circular inner surface. The microelectromechanical ring resonator(s) include an anchor support element having an impedance matching structure coupled to at least one substrate anchor. The impedance matching structure may be a beam, having a predetermined length, which couples the ring resonator(s) to substrate anchor. In one embodiment, the impedance matching structure operates in a bulk-elongation mode. In another embodiment, the impedance matching structure operates in a flexure mode. In operation, when induced, the microelectromechanical ring resonator structure oscillates in an elongating/compressing or breathing mode (or in a primarily or substantially elongating or breathing mode). In this regard, the ring resonator structure exhibits an elongating/compressing-like or breathing-like motion.

Abstract translation: 这里描述和示出了许多发明，以及这些发明的许多方面和实施例。 一方面，本发明涉及一种或多种具有圆形或基本圆形的外表面和圆形或基本圆形的内表面的微机电环形谐振器结构。 微机电环谐振器包括具有耦合到至少一个衬底锚的阻抗匹配结构的锚固支撑元件。 阻抗匹配结构可以是具有预定长度的光束，其将环形谐振器耦合到衬底锚固件。 在一个实施例中，阻抗匹配结构以体伸长模式工作。 在另一个实施例中，阻抗匹配结构以弯曲模式工作。 在操作中，当感应时，微机电环谐振器结构以伸长/压缩或呼吸模式（或主要或基本上延长或呼吸模式）振荡。 在这方面，环形谐振器结构呈现伸长/压缩状或呼吸状运动。

公开(公告)号：US07319372B2

公开(公告)日：2008-01-15

申请号：US11182299

申请日：2005-07-15

Applicant: Zhiyu Pan ,  Rob Norris Candler ,  Markus Lutz ,  Aaron Partridge ,  Volker Materna ,  Gary Yama ,  Wilhelm Frey

Inventor： Zhiyu Pan ,  Rob Norris Candler ,  Markus Lutz ,  Aaron Partridge ,  Volker Materna ,  Gary Yama ,  Wilhelm Frey

IPC: H03H9/50 ,  H03H9/21

CPC classification number: H03H9/505 ,  H03H9/0023 ,  H03H9/02338 ,  H03H9/2468 ,  H03H2009/02496

Abstract: There are many inventions described and illustrated herein, as well as many aspects and embodiments of those inventions. In one aspect, the present invention is directed to a resonator architecture including a plurality of in-plane vibration microelectromechanical resonators (for example, 2 or 4 resonators) that are mechanically coupled to provide, for example, a differential signal output. In one embodiment, the present invention includes four commonly shaped microelectromechanical tuning fork resonators (for example, tuning fork resonators having two or more rectangular-shaped or square-shaped tines). Each resonator is mechanically coupled to another resonator of the architecture. For example, each resonator of the architecture is mechanically coupled to another one of the resonators on one side or a corner of one of the sides. In this way, all of the resonators, when induced, vibrate at the same frequency.

Abstract translation: 这里描述和示出了许多发明，以及这些发明的许多方面和实施例。 在一个方面，本发明涉及一种包括机械耦合以提供例如差分信号输出的多个平面内振动微机电谐振器（例如，2或4个谐振器）的谐振器结构。 在一个实施例中，本发明包括四个通常形状的微机电音叉谐振器（例如，具有两个或更多个矩形或正方形形状的叉的音叉谐振器）。 每个谐振器机械耦合到该架构的另一谐振器。 例如，该架构的每个谐振器在其中一个侧面的一侧或拐角上机械耦合到另一个谐振器。 以这种方式，所有谐振器在被感应时以相同的频率振动。

公开(公告)号：US20070052498A1

公开(公告)日：2007-03-08

申请号：US11219569

申请日：2005-09-02

Applicant: Zhiyu Pan ,  Aaron Partridge ,  Markus Lutz

Inventor： Zhiyu Pan ,  Aaron Partridge ,  Markus Lutz

IPC: H03H9/00

CPC classification number: H03H9/2431 ,  H03H3/0077 ,  H03H9/0023 ,  H03H9/02244 ,  H03H9/02259 ,  H03H9/02338 ,  H03H2009/02354 ,  H03H2009/02496 ,  H03H2009/02503 ,  H03H2009/02527

Abstract: There are many inventions described and illustrated herein, as well as many aspects and embodiments of those inventions. In one aspect, the present invention is directed to one or more microelectromechanical ring resonator structures having a circular or substantially circular outer surface and a circular or substantially circular inner surface. The microelectromechanical ring resonator(s) include an anchor support element having an impedance matching structure coupled to at least one substrate anchor. The impedance matching structure may be a beam, having a predetermined length, which couples the ring resonator(s) to substrate anchor. In one embodiment, the impedance matching structure operates in a bulk-elongation mode. In another embodiment, the impedance matching structure operates in a flexure mode. In operation, when induced, the microelectromechanical ring resonator structure oscillates in an elongating/compressing or breathing mode (or in a primarily or substantially elongating or breathing mode). In this regard, the ring resonator structure exhibits an elongating/compressing-like or breathing-like motion.

Abstract translation: 这里描述和示出了许多发明，以及这些发明的许多方面和实施例。 一方面，本发明涉及一种或多种具有圆形或基本圆形的外表面和圆形或基本圆形的内表面的微机电环形谐振器结构。 微机电环谐振器包括具有耦合到至少一个衬底锚的阻抗匹配结构的锚固支撑元件。 阻抗匹配结构可以是具有预定长度的光束，其将环形谐振器耦合到衬底锚固件。 在一个实施例中，阻抗匹配结构以体伸长模式工作。 在另一个实施例中，阻抗匹配结构以弯曲模式工作。 在操作中，当感应时，微机电环谐振器结构以伸长/压缩或呼吸模式（或主要或基本上延长或呼吸模式）振荡。 在这方面，环形谐振器结构呈现伸长/压缩状或呼吸状运动。

公开(公告)号：US08222974B2

公开(公告)日：2012-07-17

申请号：US12841017

申请日：2010-07-21

Applicant: Markus Lutz ,  Zhiyu Pan ,  Aaron Partridge

Inventor： Markus Lutz ,  Zhiyu Pan ,  Aaron Partridge

IPC: H03H9/02 ,  H03H9/24

CPC classification number: H03H9/02244 ,  B81B3/007 ,  B81B3/0072 ,  B81B2201/0271 ,  B81B2203/0109 ,  B81B2203/0163 ,  H03H3/0076 ,  H03H9/02338 ,  H03H2009/0233 ,  H03H2009/02496 ,  H03H2009/02503

Abstract: A microelectromechanical resonator may include one or more resonator masses that oscillates in a bulk mode and that includes a first plurality of regions each having a density, and a second plurality of regions each having a density, the density of each of the second plurality of regions differing from the density of each of the first plurality of regions. The second plurality of regions may be disposed in a non-uniform arrangement. The oscillation may include a first state in which the resonator mass is contracted, at least in part, in a first and/or a second direction, and expanded, at least in part, in a third and/or a fourth direction, the second direction being opposite the first direction, the fourth direction being opposite the third direction.

Abstract translation: 微机电谐振器可以包括以体模式振荡的一个或多个谐振器质量块，并且其包括每个具有密度的第一多个区域和每个具有密度的第二多个区域，第二多个区域中的每个第二多个区域的密度 不同于第一多个区域中的每一个的密度。 第二多个区域可以以非均匀的布置设置。 振荡可以包括其中谐振器质量至少部分地以第一和/或第二方向收缩并且至少部分地在第三和/或第四方向上膨胀的第一状态，第二状态 方向与第一方向相反，第四方向与第三方向相反。

公开(公告)号：US07907035B2

公开(公告)日：2011-03-15

申请号：US12002894

申请日：2007-12-18

Applicant: Markus Lutz ,  Zhiyu Pan ,  Aaron Partridge

Inventor： Markus Lutz ,  Zhiyu Pan ,  Aaron Partridge

IPC: H03H9/05 ,  H03H9/09 ,  H03H9/46 ,  H03H9/50

CPC classification number: H03B5/30 ,  H03H9/02259 ,  H03H9/02338 ,  H03H9/2405 ,  H03H9/2447 ,  H03H9/505 ,  H03H2009/0233 ,  H03H2009/02385 ,  H03H2009/0244 ,  H03H2009/02503

Abstract: A MEMS array structure including a plurality of bulk mode resonators may include at least one resonator coupling section disposed between the plurality of bulk mode resonators. The plurality of resonators may oscillate by expansion and/or contraction in at least one direction/dimension. The MEMS array structure may include a plurality of sense electrodes and drive electrodes spaced apart from the plurality of bulk mode resonators by a gap. The MEMS array structure may further include at least one anchor coupling section disposed between the at least one resonator coupling section and a substrate anchor.

Abstract translation: 包括多个体模式谐振器的MEMS阵列结构可以包括设置在多个体模式谐振器之间的至少一个谐振器耦合部分。 多个谐振器可以通过在至少一个方向/尺寸上的膨胀和/或收缩而振荡。 MEMS阵列结构可以包括多个感测电极和与多个体模式谐振器间隔开的间隙的驱动电极。 MEMS阵列结构还可以包括设置在至少一个谐振器耦合部分和基板锚固件之间的至少一个锚耦合部分。

公开(公告)号：US20110018655A1

公开(公告)日：2011-01-27

申请号：US12841017

申请日：2010-07-21

Applicant: Markus Lutz ,  Zhiyu Pan ,  Aaron Partridge

Inventor： Markus Lutz ,  Zhiyu Pan ,  Aaron Partridge

IPC: H03H9/24

CPC classification number: H03H9/02244 ,  B81B3/007 ,  B81B3/0072 ,  B81B2201/0271 ,  B81B2203/0109 ,  B81B2203/0163 ,  H03H3/0076 ,  H03H9/02338 ,  H03H2009/0233 ,  H03H2009/02496 ,  H03H2009/02503

Abstract: A microelectromechanical resonator may include one or more resonator masses that oscillates in a bulk mode and that includes a first plurality of regions each having a density, and a second plurality of regions each having a density, the density of each of the second plurality of regions differing from the density of each of the first plurality of regions. The second plurality of regions may be disposed in a non-uniform arrangement. The oscillation may include a first state in which the resonator mass is contracted, at least in part, in a first and/or a second direction, and expanded, at least in part, in a third and/or a fourth direction, the second direction being opposite the first direction, the fourth direction being opposite the third direction.

Abstract translation: 微机电谐振器可以包括以体模式振荡的一个或多个谐振器质量块，并且其包括每个具有密度的第一多个区域和每个具有密度的第二多个区域，第二多个区域中的每个第二多个区域的密度 不同于第一多个区域中的每一个的密度。 第二多个区域可以以非均匀的布置设置。 振荡可以包括其中谐振器质量至少部分地以第一和/或第二方向收缩并且至少部分地在第三和/或第四方向上膨胀的第一状态，第二状态 方向与第一方向相反，第四方向与第三方向相反。