发明申请
US20070001783A1 MEMS resonator array structure and method of operating and using same
有权
MEMS谐振器阵列结构及其操作和使用方法
- 专利标题: MEMS resonator array structure and method of operating and using same
- 专利标题(中): MEMS谐振器阵列结构及其操作和使用方法
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申请号: US11172143申请日: 2005-06-30
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公开(公告)号: US20070001783A1公开(公告)日: 2007-01-04
- 发明人: Markus Lutz , Aaron Partridge , Zhiyu Pan
- 申请人: Markus Lutz , Aaron Partridge , Zhiyu Pan
- 主分类号: H03H9/50
- IPC分类号: H03H9/50
摘要:
A plurality of mechanically coupled MEMS resonators that are arranged in an N×M MEMS array structure. Each MEMS resonators includes a plurality of straight (or substantially straight) elongated beam sections that are connected by curved/rounded sections. Each elongated beam section is connected to another elongated beam section at a distal end via the curved/rounded sections thereby forming a geometric shape (e.g., a rounded square). Further, each resonator is mechanically coupled to at least one other adjacent resonator of the array via a resonator coupling section. The resonator coupling sections may be disposed between elongated beam sections of adjacent resonators. The resonators, when induced, oscillate at the same or substantially the same frequency. The resonators oscillate in a combined elongating (or breathing) mode and bending mode; that is, the beam sections exhibit an elongating-like (or breathing-like) motion and a bending-like motion. The one or more of the resonators of the array structure may include one or more nodal points or areas (i.e., portions of the resonator that are stationary, experience little movement, and/or are substantially stationary during oscillation of the resonator/array) in one or more portions or areas of the curved sections of the structure. The nodal points are suitable and/or preferable locations to anchor the resonator/array to the substrate.
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