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公开(公告)号：US20150346475A1
公开(公告)日：2015-12-03
申请号：US14718349
申请日：2015-05-21
申请人： MITUTOYO CORPORATION
发明人： Eisuke MORIUCHI , Tatsuya NAGAHAMA , Yuko SHISHIDO
CPC分类号： G02B21/244 , G02B7/34 , G02B7/38 , G02B21/245
摘要： A focus detection unit to adjust a focal point of an image, of an object, formed by an optical system includes a first output section, a second output section, and a projection optical system. The first output section includes a first light modulation element configured to generate a first pattern image based on incident light and is configured to output the generated first pattern image. The second output section includes a second light modulation element configured to generate a second pattern image based on incident light and is configured to output the generated second pattern image. The projection optical system is configured to project the output first pattern image and the output second pattern image such that the output first pattern image and the output second pattern image have a predetermined positional relationship at an in-focus position of the optical system.
摘要翻译： 调整由光学系统形成的物体的焦点的焦点检测单元包括第一输出部分，第二输出部分和投影光学系统。 第一输出部包括：第一光调制元件，被配置为基于入射光生成第一图案图像，并且被配置为输出所生成的第一图案图像。 第二输出部分包括第二光调制元件，其被配置为基于入射光产生第二图案图像，并且被配置为输出所生成的第二图案图像。 投影光学系统被配置为投影输出第一图案图像和输出第二图案图像，使得输出第一图案图像和输出第二图案图像在光学系统的对焦位置处具有预定的位置关系。
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公开(公告)号：US20190121056A1
公开(公告)日：2019-04-25
申请号：US16161835
申请日：2018-10-16
申请人： MITUTOYO CORPORATION
发明人： Tatsuya NAGAHAMA , Koji KUBO , Yuko SHISHIDO , Masaki OKAYASU , Atsushi USAMI
摘要： A variable focal length lens apparatus includes an objective lens and an imaging lens that are aligned on the same optical axis; a front side lens system and a rear side lens system that are disposed in a section between the objective lens and the imaging lens on the optical axis, and change a refractive index in accordance with an input drive signal; and a diaphragm disposed in the section between the front side lens system and the rear side lens system on the optical axis.
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公开(公告)号：US20180180774A1
公开(公告)日：2018-06-28
申请号：US15854251
申请日：2017-12-26
申请人： MITUTOYO CORPORATION
发明人： Tatsuya NAGAHAMA , Yuko SHISHIDO , Yuki KURAHASHI
摘要： A variable focal length lens apparatus includes a lens system where a refractive index changes in response to an input drive signal; a field lens arranged on the same optical axis as the lens system; an image detector detecting an image of a measured object through the lens system and the field lens; a pulse illuminator providing pulse illumination of the measured object based on an input light emission signal; a temperature sensor detecting temperature information for an interior of the lens system; and a controller outputting the drive signal and the light emission signal in addition to correcting the timing of the light emission signal based on the temperature information.
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公开(公告)号：US20210223443A1
公开(公告)日：2021-07-22
申请号：US17148998
申请日：2021-01-14
申请人： MITUTOYO CORPORATION
发明人： Koji KUBO , Yuko SHISHIDO
摘要： A variable focal length optical system includes: an imaging lens configured to condense a parallel beam of light from an objective lens to form an intermediate image; a relay system including, in sequence from an object side, a first relay lens and a second relay lens and configured to relay the intermediate image to infinity; and a lens system of a liquid resonant type which is located between the first relay lens and the second relay lens. A front principal point of the lens system is located to be conjugated with an exit pupil of the objective lens and an expression, 1.90≤fTube/fR1≤2.15, is satisfied. In the expression, fTube denotes a focal length of the imaging lens and fR1 denote a focal length of the first relay lens.
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公开(公告)号：US20200208965A1
公开(公告)日：2020-07-02
申请号：US16717320
申请日：2019-12-17
申请人： MITUTOYO CORPORATION
发明人： Satoru YOSHIDA , Tatsuya NAGAHAMA , Hitoshi ISOBE , Masafumi YAMANAKA , Naoto OITA , Koji KUBO , Yuko SHISHIDO , Nobuo OHBA , Takahisa OOTAKE , Hiroki MATSUI , Masanori ARAI , Shiro IGASAKI , Yuki KURAHASHI , Hiroshi SAKAI , Yutaka WATANABE
摘要： An image measurement apparatus, which functions as a non-contact profile-measuring device, includes: an image sensor as an image pick-up device; a variable focal length lens (liquid lens unit) disposed on an optical axis extending from a workpiece to the image sensor; and a controller (image-pickup lens controller and image measurement processor) configured to control the variable focal length lens and process a detected image by the image sensor. The image measurement apparatus, which also functions as a non-contact displacement-detecting device, includes: an image sensor; a variable focal length lens (liquid lens unit) disposed on an optical axis extending from the workpiece to the image sensor; and a controller (displacement-detection lens controller and profile measurement processor) configured to control the variable focal length lens and a detected image by the image sensor.
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公开(公告)号：US20200041267A1
公开(公告)日：2020-02-06
申请号：US16519117
申请日：2019-07-23
申请人： MITUTOYO CORPORATION
发明人： Koji KUBO , Yuko SHISHIDO
摘要： A non-contact type displacement sensor includes a light source that emits measurement light; a liquid lens apparatus in which a refractive index periodically changes in response to an input drive signal; an objective lens emitting, at a measurable object, the measurement light that is emitted from the light source and has passed through the liquid lens apparatus; a photodetector receiving the measurement light that is reflected by the measurable object and outputs a photodetection signal; and a signal processor (controller) that calculates focus timing with which the measurement light is in focus on a surface of the measurable object based on the photodetection signal output from the photodetector, and that obtains a position of the measurable object based on a phase of the focus timing with respect to a cycle of the drive signal.
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