公开(公告)号：US20190353872A1

公开(公告)日：2019-11-21

申请号：US16415190

申请日：2019-05-17

申请人： MITUTOYO CORPORATION

发明人： Hiroshi SAKAI ,  Yutaka WATANABE ,  Gyokubu CHO

IPC分类号： G02B7/10 ,  H04N5/225 ,  G02B21/24

摘要： A variable focal length lens device includes: a lens system whose refractive index changes in accordance with a drive signal to be inputted; an objective lens disposed on the same optical axis as the lens system; an image detector configured to detect an image of a measurement target through the lens system and the objective lens: a resonance-lock controller configured to tune the drive signal to a resonance frequency of the lens system; and a resonance-lock delay controller configured to divide a change in a frequency of the drive signal by a change amount set by the resonance-lock controller to step-by-step changes for n times by a preset reference value to delay the change in the frequency of the drive signal.

公开(公告)号：US20180314033A1

公开(公告)日：2018-11-01

申请号：US15951599

申请日：2018-04-12

申请人： MITUTOYO CORPORATION

发明人： Hiroshi SAKAI ,  Yutaka WATANABE

IPC分类号： G02B7/10 ,  H04N5/225 ,  H04N5/232 ,  G06F3/048 ,  G02B15/14

CPC分类号： G02B7/102 ,  G02B3/14 ,  G02B7/04 ,  G02B15/04 ,  G02B15/14 ,  G06F3/048 ,  H04N5/2254 ,  H04N5/2256 ,  H04N5/23203 ,  H04N5/23216

摘要： A variable focal length lens device includes: a lens system whose refractive index is variable in response to an inputted drive signal; an image detector for detecting an image of a target object through the lens system; a lens controller for outputting the drive signal and an illumination signal; and a lens operation unit for adjusting a frequency and amplitude of the drive signal outputted by the lens controller and an image-detection timing for the image detector. The lens controller includes a resonance-lock controller for tuning the drive signal to a resonance frequency of the lens system. The lens operation unit includes a resonance-lock operation unit for switchably enabling and suspending the resonance-lock controller.

公开(公告)号：US20200208965A1

公开(公告)日：2020-07-02

申请号：US16717320

申请日：2019-12-17

申请人： MITUTOYO CORPORATION

发明人： Satoru YOSHIDA ,  Tatsuya NAGAHAMA ,  Hitoshi ISOBE ,  Masafumi YAMANAKA ,  Naoto OITA ,  Koji KUBO ,  Yuko SHISHIDO ,  Nobuo OHBA ,  Takahisa OOTAKE ,  Hiroki MATSUI ,  Masanori ARAI ,  Shiro IGASAKI ,  Yuki KURAHASHI ,  Hiroshi SAKAI ,  Yutaka WATANABE

IPC分类号： G01B11/24 ,  G02B21/36 ,  H04N5/225

摘要： An image measurement apparatus, which functions as a non-contact profile-measuring device, includes: an image sensor as an image pick-up device; a variable focal length lens (liquid lens unit) disposed on an optical axis extending from a workpiece to the image sensor; and a controller (image-pickup lens controller and image measurement processor) configured to control the variable focal length lens and process a detected image by the image sensor. The image measurement apparatus, which also functions as a non-contact displacement-detecting device, includes: an image sensor; a variable focal length lens (liquid lens unit) disposed on an optical axis extending from the workpiece to the image sensor; and a controller (displacement-detection lens controller and profile measurement processor) configured to control the variable focal length lens and a detected image by the image sensor.

公开(公告)号：US20190356860A1

公开(公告)日：2019-11-21

申请号：US16414148

申请日：2019-05-16

申请人： MITUTOYO CORPORATION

发明人： Hiroshi SAKAI ,  Yutaka WATANABE

IPC分类号： H04N5/232 ,  G02B7/04 ,  G02B26/00 ,  G02B3/14 ,  H04N17/00

摘要： A calibration method of a variable-focal-length lens including a liquid lens unit whose focal-length is periodically varied in response to a periodic drive-signal includes: using a calibration tool having a plurality of height-different parts on a surface; preparing a calibration table by repeating outputting a drive-signal having a predetermined voltage to the variable-focal-length lens, detecting a surface image of the calibration tool using an image detector, detecting two points having maximum image contrast in the surface image, calculating a focal-depth from a difference in a focal-length between the two points; and recording the focal-depth and the voltage of the drive-signal in a corresponding combination, and retrieving a value of the voltage corresponding to a desired focal-depth from the calibration table to set the variable-focal-length lens at the desired focal-depth, and adjusting the voltage of the drive-signal outputted to the variable-focal-length lens based on the retrieved value.

公开(公告)号：US20190353976A1

公开(公告)日：2019-11-21

申请号：US16415306

申请日：2019-05-17

申请人： MITUTOYO CORPORATION

发明人： Yutaka WATANABE ,  Hiroshi SAKAI

IPC分类号： G02F1/29 ,  H04N5/225 ,  H04N5/232

摘要： A variable focal length lens device includes an image-detection-condition setting unit configured to set image detection conditions. The image-detection-condition setting unit is configured to set, as image detection conditions, a combined mode of repeating an image detection loop including at least one multi-plane-image-detecting operation and at least one single-plane-image-detecting operation. In the multi-plane-image-detecting operation, a plurality of values of the focal length, at each of which the image detection is performed, are set in one cycle in which the focal length of the variable focal length lens is varied. In the single-plane-image-detecting operation, a single value of the focal length, at which the image detection is performed, is set in one cycle in which the focal length of the variable focal length lens is varied.

公开(公告)号：US20170248410A1

公开(公告)日：2017-08-31

申请号：US15440118

申请日：2017-02-23

申请人： MITUTOYO CORPORATION

发明人： Hiroshi SAKAI ,  Yutaka WATANABE ,  Yasuhiro TAKAHAMA ,  Harumasa ITO ,  Yuji KUDO

IPC分类号： G01B11/24 ,  G01B11/30 ,  G01B11/14

CPC分类号： G01B11/2441 ,  G01B11/14 ,  G01B11/303 ,  G01B21/04 ,  G01B2210/52

摘要： According to an embodiment of the present invention, a method of measuring a surface of an object having a curved shape by measuring a distance from a measurement head to the object, includes: setting a measuring region of the object and a threshold value of concave and convex; acquiring shape reference data including the curved shape of the object; acquiring three-dimensional data of the surface of the object by measuring the distance between the object in the measuring region and the measurement head; acquiring curve removed data by removing the shape reference data from the three-dimensional data; calculating second reference data by calculating first reference data based on the curve removed data, by removing data exceeding the threshold value with respect to the first reference data, from the curve removed data, and by averaging the curve removed data; and calculating shape data of the concave and convex.

公开(公告)号：US20160131474A1

公开(公告)日：2016-05-12

申请号：US14928252

申请日：2015-10-30

申请人： MITUTOYO CORPORATION

发明人： Takeshi SAEKI ,  Yutaka WATANABE ,  Takuho MAEDA

IPC分类号： G01B11/24 ,  G01B9/02

CPC分类号： G01B9/0209 ,  G01B9/0205

摘要： A non-contact surface-shape measuring method uses a white light interferometer optical head that divides, through a beam splitter, light emitted from a white light source into reference light for a reference mirror and measurement light for a measured object surface; obtains an image having interference fringes generated from an optical path difference of light reflecting from the reference mirror and light reflecting from the measured object surface; and is displaced for scanning in a vertical direction with respect to the measured object surface in order to obtain the image having interference fringes. While the white light interferometer optical head is displaced in a scanning direction, a position of the optical head in the scanning direction is detected, and the image having interference fringes is obtained at predetermined spatial intervals in the scanning direction.

摘要翻译： 非接触表面形状测量方法使用白光干涉仪光头，其通过分束器将从白光源发射的光分成用于参考反射镜的参考光和用于被测物体表面的测量光; 获得具有从参考镜反射的光的光程差产生的干涉条纹和从所测量的物体表面反射的光的图像; 并且相对于被测量的物体表面在垂直方向扫描，以获得具有干涉条纹的图像。 当白光干涉仪光头沿扫描方向位移时，检测光头在扫描方向上的位置，并且在扫描方向上以预定的空间间隔获得具有干涉条纹的图像。