公开(公告)号：US10106700B2

公开(公告)日：2018-10-23

申请号：US15127378

申请日：2015-03-23

申请人： Lintec Corporation

发明人： Daisuke Yamamoto ,  Hiroyuki Yoneyama ,  Youichi Inao

IPC分类号： C09D163/00 ,  H01L23/544 ,  H01L21/66 ,  H01L23/31 ,  H01L21/683 ,  H01L21/78 ,  C09J7/02 ,  H01L23/29 ,  C08K5/00 ,  C08K3/00 ,  C08K3/013

摘要： A protection membrane-forming film (1) containing a filler, wherein the average particle size of the filler is not more than 0.4 μm, a protection membrane-forming sheet (2), a production method and an inspection method for a workpiece or a processed product which use the film and the sheet, and a workpiece and a processed product determined as adequate products by the inspection method. The protection membrane-forming film and the protection membrane-forming sheet of the invention enable the formation of a protection membrane having excellent print legibility when subjected to print processing by laser irradiation.

公开(公告)号：US09890293B2

公开(公告)日：2018-02-13

申请号：US15032515

申请日：2014-11-10

申请人： LINTEC CORPORATION

发明人： Daisuke Yamamoto ,  Hiroyuki Yoneyama

IPC分类号： C08K3/38 ,  C09D133/08 ,  C08K3/00 ,  C08L33/06 ,  C09D133/06 ,  C08J5/18 ,  H01L21/56 ,  H01L23/29 ,  C09D163/00

CPC分类号： C09D133/08 ,  C08J5/18 ,  C08J2333/08 ,  C08K3/00 ,  C08K2201/001 ,  C08L33/06 ,  C09D133/06 ,  C09D163/00 ,  H01L21/563 ,  H01L23/295 ,  H01L2924/0002 ,  H01L2924/00

摘要： A composition for protective film formation capable of forming a protective film excellent in attachability by a tape mounter or the like, with good visibility at a laser-printed portion and heat dissipation properties, allowing a protective film-equipped chip having high reliability to be manufactured, and a sheet for protective film formation and a protective film-equipped chip are provided. The composition for protective film formation contains a polymer component (A), a curable component (B), and a heat conductive filler (C) having an average particle size of 2.0 to 10.0 μm. The content of components that are liquid at 25° C. contained in the composition for protective film formation is 20 to 70 parts by mass relative to 100 parts by mass of the total of the (A) component and the (B) component.

公开(公告)号：US10559505B2

公开(公告)日：2020-02-11

申请号：US15112940

申请日：2015-01-21

申请人： Lintec Corporation

发明人： Daisuke Yamamoto ,  Hiroyuki Yoneyama

IPC分类号： H01L23/29 ,  H01L21/66 ,  C09J7/00 ,  C09J133/10

摘要： Provided is a sheet (2) for forming protective film, including: a protective film-forming film (1) characterized in that the light transmittance thereof at a wavelength of 1600 nm of 72% or more, and the light transmittance thereof at a wavelength of 550 nm of 20% or less; and a release sheet (21) laminated upon one or both faces of the protective film-forming film (1). According to this sheet (2) for forming a protective film, it is possible to form a protective film that allows for the inspection of cracks, etc., on a workpiece or a product obtained by processing the workpiece, while preventing grinding marks on the workpiece or the product from being visible to the naked eye.

公开(公告)号：US20160167345A1

公开(公告)日：2016-06-16

申请号：US14908524

申请日：2014-01-30

申请人： LINTEC CORPORATION

发明人： Naoya Saiki ,  Daisuke Yamamoto ,  Hiroyuki Yamamoto ,  Ken Takano

IPC分类号： B32B27/06 ,  C09D133/08 ,  H01L21/683 ,  B32B27/30 ,  H01L21/66 ,  H01L23/31 ,  C09D5/00 ,  B32B27/38

CPC分类号： B32B27/06 ,  B32B7/06 ,  B32B7/12 ,  B32B27/08 ,  B32B27/308 ,  B32B27/32 ,  B32B27/36 ,  B32B27/38 ,  B32B2255/10 ,  B32B2255/26 ,  B32B2307/40 ,  B32B2307/54 ,  B32B2307/748 ,  B32B2457/14 ,  B32B2571/00 ,  C09D5/00 ,  C09D133/08 ,  C09J7/22 ,  C09J7/30 ,  C09J133/06 ,  C09J2201/622 ,  C09J2203/326 ,  H01L21/6836 ,  H01L22/12 ,  H01L23/3157 ,  H01L23/544 ,  H01L2221/68318 ,  H01L2221/68336 ,  H01L2221/68377 ,  H01L2221/68381 ,  H01L2223/54486 ,  H01L2924/0002 ,  H01L2924/00

摘要： Provided is a sheet 2 for forming a protective film including a protective film-forming film 1 of which the light transmittance at a wavelength of 1600 nm is 25% or greater, and light transmittance at a wavelength of 550 nm is 20% or less, and a release sheet 21 which is laminated on one or both surfaces of the protective film-forming film 1. According to such a sheet 2 for forming a protective film, cracks existing in a workpiece or a manufactured product obtained by processing the workpiece can be inspected and a protective film in which grinding marks existing in the workpiece or the manufactured product are not visually recognized can be formed.

摘要翻译： 提供一种用于形成保护膜的片材2，其包括其中在1600nm波长下的透光率为25％或更高的保护膜形成膜1，并且在550nm的波长下的透光率为20％以下， 以及层压在保护膜形成膜1的一个或两个表面上的剥离片21.根据这种用于形成保护膜的片材2，存在于通过加工工件获得的工件或制造产品中的裂纹可以是 并且可以形成保护膜，其中存在于工件或制造产品中的磨痕不能被目视识别。

公开(公告)号：US20170005016A1

公开(公告)日：2017-01-05

申请号：US15112940

申请日：2015-01-21

申请人： LINTEC CORPORATION

发明人： Daisuke Yamamoto ,  Hiroyuki Yoneyama

IPC分类号： H01L21/66 ,  C09J7/02 ,  H01L23/29 ,  C09J7/00

摘要： Provided is a sheet (2) for forming protective film, including: a protective film-forming film (1) characterized in that the light transmittance thereof at a wavelength of 1600 nm of 72% or more, and the light transmittance thereof at a wavelength of 550 nm of 20% or less; and a release sheet (21) laminated upon one or both faces of the protective film-forming film (1). According to this sheet (2) for forming a protective film, it is possible to form a protective film that allows for the inspection of cracks, etc., on a workpiece or a product obtained by processing the workpiece, while preventing grinding marks on the workpiece or the product from being visible to the naked eye.

摘要翻译： 提供一种用于形成保护膜的片材（2），其包括：保护膜形成膜（1），其特征在于，其波长为1600nm的透光率为72％以上，其波长 为550nm以上20％以下; 和层压在保护膜形成膜（1）的一面或两面上的剥离片（21）。 根据用于形成保护膜的该片材（2），可以形成保护膜，该保护膜能够检测通过加工工件而获得的工件或产品上的裂纹等，同时防止在 工件或产品从肉眼可见。

公开(公告)号：US09953856B2

公开(公告)日：2018-04-24

申请号：US15113561

申请日：2015-01-21

申请人： Lintec Corporation

发明人： Daisuke Yamamoto ,  Hiroyuki Yoneyama

IPC分类号： H01L21/683 ,  C09J7/02 ,  C09J7/00 ,  C09J11/06 ,  C09J133/10 ,  H01L21/268 ,  H01L21/56 ,  H01L21/78

CPC分类号： H01L21/6836 ,  C08K2201/002 ,  C09J7/00 ,  C09J7/10 ,  C09J7/20 ,  C09J7/255 ,  C09J7/35 ,  C09J11/06 ,  C09J133/10 ,  C09J2201/622 ,  C09J2203/326 ,  C09J2205/102 ,  C09J2205/114 ,  C09J2400/22 ,  C09J2467/006 ,  H01L21/268 ,  H01L21/561 ,  H01L21/78 ,  H01L2221/68327 ,  H01L2221/68336

摘要： Provided is protective film-forming sheet (2) including: a protective film-forming film (1) having a light transmittance at a wavelength of 1064 nm of 55% or greater and a light transmittance at a wavelength of 550 nm of 20% or less; and a release sheet (21) which is laminated on one or both faces of the protective film-forming film (1). According to this protective film-forming sheet (2), it is possible to form a protective film which allows a workpiece such as a semiconductor wafer to have a modified layer disposed in advance therein by a laser so that the workpiece can be split through the application of force thereon, while preventing grinding marks on the workpiece or a product formed therefrom from being visible to the naked eye.

公开(公告)号：US10510578B2

公开(公告)日：2019-12-17

申请号：US15120492

申请日：2014-09-03

申请人： Lintec Corporation

发明人： Naoya Saiki ,  Daisuke Yamamoto ,  Hiroyuki Yoneyama ,  Youichi Inao

IPC分类号： H01L21/683 ,  B23K26/53 ,  B32B27/08 ,  B32B27/16 ,  C08J7/04 ,  C09D133/10 ,  C09D163/00 ,  C09D163/04 ,  C09J133/10 ,  C09J163/00 ,  C09J163/04 ,  H01L21/268 ,  H01L21/78 ,  C09J7/29

摘要： A protective film forming film 1 is provided in which the product of the breaking stress (MPa) measured at a measurement temperature of 0° C. and the breaking strain (unit: %) measured at a measurement temperature of 0° C. in at least one of the protective film forming film 1 and a protective film formed from the protective film forming film 1 is in a range of 1 MPa·% to 250 MPa·%. According to such a protective film forming film 1, the protective film forming film 1 or the protective film formed from the protective film forming film 1 can be suitably divided in an expanding process performed on a workpiece when the workpiece is divided to obtain a work product.

公开(公告)号：US10399306B2

公开(公告)日：2019-09-03

申请号：US14908524

申请日：2014-01-30

申请人： Lintec Corporation

发明人： Naoya Saiki ,  Daisuke Yamamoto ,  Hiroyuki Yoneyama ,  Ken Takano

IPC分类号： B32B27/06 ,  H01L21/683 ,  B32B7/06 ,  B32B27/30 ,  B32B27/38 ,  C09D5/00 ,  C09D133/08 ,  H01L21/66 ,  H01L23/31 ,  C09J133/06 ,  B32B7/12 ,  B32B27/08 ,  B32B27/32 ,  B32B27/36 ,  C09J7/22 ,  C09J7/30 ,  H01L23/544

摘要： Provided is a sheet 2 for forming a protective film including a protective film-forming film 1 of which the light transmittance at a wavelength of 1600 nm is 25% or greater, and light transmittance at a wavelength of 550 nm is 20% or less, and a release sheet 21 which is laminated on one or both surfaces of the protective film-forming film 1. According to such a sheet 2 for forming a protective film, cracks existing in a workpiece or a manufactured product obtained by processing the workpiece can be inspected and a protective film in which grinding marks existing in the workpiece or the manufactured product are not visually recognized can be formed.

公开(公告)号：US20170130090A1

公开(公告)日：2017-05-11

申请号：US15127378

申请日：2015-03-23

申请人： Lintec Corporation

发明人： Daisuke Yamamoto ,  Hiroyuki Yoneyama ,  Youichi Inao

IPC分类号： C09D163/00 ,  H01L23/544 ,  H01L21/66 ,  H01L23/31 ,  H01L21/683 ,  H01L21/78 ,  C09J7/02 ,  H01L23/29

CPC分类号： C09D163/00 ,  C08K3/013 ,  C08K3/36 ,  C08K3/40 ,  C08K5/0041 ,  C08K2003/2227 ,  C08K2201/003 ,  C09J7/22 ,  C09J7/38 ,  C09J201/00 ,  C09J2201/622 ,  C09J2203/326 ,  C09J2205/106 ,  C09J2433/00 ,  C09J2463/003 ,  C09J2463/006 ,  H01L21/6836 ,  H01L21/78 ,  H01L22/12 ,  H01L23/295 ,  H01L23/3171 ,  H01L23/544 ,  H01L2221/68327 ,  H01L2221/6834 ,  H01L2223/54406 ,  H01L2223/54433

摘要： A protection membrane-forming film (1) containing a filler, wherein the average particle size of the filler is not more than 0.4 μm, a protection membrane-forming sheet (2), a production method and an inspection method for a workpiece or a processed product which use the film and the sheet, and a workpiece and a processed product determined as adequate products by the inspection method. The protection membrane-forming film and the protection membrane-forming sheet of the invention enable the formation of a protection membrane having excellent print legibility when subjected to print processing by laser irradiation.

公开(公告)号：US20170011949A1

公开(公告)日：2017-01-12

申请号：US15120492

申请日：2014-09-03

申请人： Lintec Corporation

发明人： Naoya Saiki ,  Daisuke Yamamoto ,  Hiroyuki Yoneyama ,  Youichi Inao

IPC分类号： H01L21/683 ,  B32B27/16 ,  H01L21/268 ,  H01L21/78 ,  C08J7/04 ,  C09J163/04 ,  C09D163/00 ,  C09D163/04 ,  C09J7/02 ,  C09J133/10 ,  C09J163/00 ,  B32B27/08 ,  C09D133/10

摘要： A protective film forming film 1 is provided in which the product of the breaking stress (MPa) measured at a measurement temperature of 0° C. and the breaking strain (unit: %) measured at a measurement temperature of 0° C. in at least one of the protective film forming film 1 and a protective film formed from the protective film forming film 1 is in a range of 1 MPa·% to 250 MPa·%. According to such a protective film forming film 1, the protective film forming film 1 or the protective film formed from the protective film forming film 1 can be suitably divided in an expanding process performed on a workpiece when the workpiece is divided to obtain a work product.

摘要翻译： 提供保护膜形成膜1，其中在测量温度为0℃下测量的断裂应力（MPa）和在0℃的测量温度下测量的断裂应变（单位：％）的乘积 保护膜形成膜1和由保护膜形成膜1形成的保护膜中的至少一个在1MPa·250MPa·％的范围内。 根据这样的保护膜形成膜1，保护膜形成膜1或由保护膜形成膜1形成的保护膜可以在工件被分割时在工件上进行的扩大过程中适当地划分以获得工件 。