- 专利标题： Protective film forming film, protective film forming sheet and work product manufacturing method
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申请号： US15120492申请日： 2014-09-03
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公开(公告)号： US10510578B2公开(公告)日： 2019-12-17
- 发明人: Naoya Saiki , Daisuke Yamamoto , Hiroyuki Yoneyama , Youichi Inao
- 申请人： Lintec Corporation
- 申请人地址： JP Tokyo
- 专利权人： Lintec Corporation
- 当前专利权人： Lintec Corporation
- 当前专利权人地址： JP Tokyo
- 代理商 Christopher Casieri
- 优先权： JP2014-060938 20140324
- 国际申请： PCT/JP2014/073265 WO 20140903
- 国际公布： WO2015/145807 WO 20151001
- 主分类号： H01L21/683
- IPC分类号： H01L21/683 ; B23K26/53 ; B32B27/08 ; B32B27/16 ; C08J7/04 ; C09D133/10 ; C09D163/00 ; C09D163/04 ; C09J133/10 ; C09J163/00 ; C09J163/04 ; H01L21/268 ; H01L21/78 ; C09J7/29
摘要：
A protective film forming film 1 is provided in which the product of the breaking stress (MPa) measured at a measurement temperature of 0° C. and the breaking strain (unit: %) measured at a measurement temperature of 0° C. in at least one of the protective film forming film 1 and a protective film formed from the protective film forming film 1 is in a range of 1 MPa·% to 250 MPa·%. According to such a protective film forming film 1, the protective film forming film 1 or the protective film formed from the protective film forming film 1 can be suitably divided in an expanding process performed on a workpiece when the workpiece is divided to obtain a work product.
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