Method for forming capacitor of semiconductor device

    公开(公告)号:US06410381B1

    公开(公告)日:2002-06-25

    申请号:US09867658

    申请日:2001-05-31

    Abstract: The present invention discloses a method for forming a capacitor of a semiconductor device which can increase a capacitance and prevent a leakage current at the same time. The method includes the steps of depositing a cap oxide film on a semiconductor substrate, patterning the cap oxide film to expose a capacitor region of the semiconductor substrate, consecutively depositing an Ru film for a lower electrode on the patterned cap oxide film and the semiconductor substrate in in-situ according to a low pressure chemical vapor deposition(LPCVD) and a plasma enhanced chemical vapor deposition(PECVD), forming a cylindrical lower electrode, by performing a chemical mechanical polishing process on the Ru film and removing the cap oxide film, forming an amorphous TaON film having a high dielectric constant on the lower electrode, crystallizing the amorphous TaON film according to a thermal treatment, and forming a metal film for an upper electrode on the crystallized TaON film.

    Method of manufacturing a capacitor in a semiconductor device
    3.
    发明授权
    Method of manufacturing a capacitor in a semiconductor device 有权
    在半导体器件中制造电容器的方法

    公开(公告)号:US06365487B2

    公开(公告)日:2002-04-02

    申请号:US09852929

    申请日:2001-05-10

    Abstract: A method of manufacturing a capacitor in a semiconductor device wherein a first a Ru film used as a lower electrode is deposited by an LPCVD method, a mixed plasma process of Ar and H2 is performed, and a second Ru film is deposited by an LPCVD method, thus improving the surface roughness of the Ru film. The method can obtain a high capacitance and a low leakage current in a capacitor using a Ta2O5 film as a dielectric film.

    Abstract translation: 一种在半导体器件中制造电容器的方法,其中通过LPCVD方法沉积用作下电极的第一Ru膜,进行Ar和H2的混合等离子体处理,并通过LPCVD法沉积第二Ru膜 ,从而提高Ru膜的表面粗糙度。 该方法可以在使用Ta 2 O 5膜作为电介质膜的电容器中获得高电容和低漏电流。

    Method for fabricating capacitor of semiconductor device
    4.
    发明授权
    Method for fabricating capacitor of semiconductor device 失效
    制造半导体器件电容器的方法

    公开(公告)号:US06716717B2

    公开(公告)日:2004-04-06

    申请号:US09867527

    申请日:2001-05-31

    Abstract: Disclosed herein is a method for the fabrication of a capacitor of semiconductor device, which is capable of increasing a charge storage capacitance of the capacitor while preventing generation of leakage current in the capacitor. The disclosed method comprises comprising the steps of: forming a ruthenium film as a lower electrode on a semiconductor substrate; depositing an amorphous TaON film having an excellent dielectric constant on the ruthenium film; subjecting the resulting substrate to a first thermal treatment to prevent oxidation of the lower electrode and to remove carbons present in the amorphous TaON thin film; subjecting the resulting substrate to a second thermal treatment to crystallize the amorphous TaON thin film; and forming a metal film as a metal film on the crystalline TaON film.

    Abstract translation: 这里公开了一种用于制造半导体器件的电容器的方法,其能够增加电容器的电荷存储电容,同时防止在电容器中产生漏电流。 所公开的方法包括以下步骤:在半导体衬底上形成作为下电极的钌膜; 在所述钌膜上沉积具有优异介电常数的无定形TaON膜; 对所得到的基板进行第一热处理以防止下电极的氧化并除去存在于非晶态TaON薄膜中的碳; 对所得衬底进行第二次热处理以使无定形TaON薄膜结晶; 并在结晶TaON膜上形成金属膜作为金属膜。

    SMALL CALIBER LAPAROSCOPE SURGICAL APPARATUS
    6.
    发明申请
    SMALL CALIBER LAPAROSCOPE SURGICAL APPARATUS 有权
    小标尺手术器械

    公开(公告)号:US20100280543A1

    公开(公告)日:2010-11-04

    申请号:US12738478

    申请日:2008-10-16

    Abstract: A laparoscopic surgical instrument includes a shaft and a head having a distal end to which a variety of surgical instruments are attached. The laparoscopic surgical instrument also includes a flexible joint installed between the shaft and the head; a longitudinal-driving unit including a longitudinal-driving wire connected with both longitudinal ends of the head and a longitudinal-driving roller turning the longitudinal-driving wire and a transverse-driving unit including a transverse-driving wire connected with both transverse ends of the head and a transverse-driving roller turning the transverse-driving wire. The longitudinal-driving unit turns the flexible joint in the longitudinal direction, the transverse-driving unit turns the flexible joint in the transverse direction, and the shaft has a small diameter.

    Abstract translation: 腹腔镜手术器械包括轴和具有远端的头部,多个外科器械附接到该远端。 腹腔镜手术器械还包括安装在轴和头部之间的柔性接头; 纵向驱动单元,包括与头部的两个纵向端连接的纵向驱动线和转动纵向驱动线的纵向驱动辊;以及横向驱动单元,横向驱动单元包括横向驱动线,该横向驱动线与 头部和横向驱动辊转动横向驱动线。 纵向驱动单元沿纵向旋转柔性接头,横向驱动单元使柔性接头在横向上转动,并且轴具有小的直径。

    Jig device usable with flat display panel and endurance test method using the same
    8.
    发明授权
    Jig device usable with flat display panel and endurance test method using the same 有权
    可用于平板显示面板的夹具装置及使用其的耐久试验方法

    公开(公告)号:US08950264B2

    公开(公告)日:2015-02-10

    申请号:US12984667

    申请日:2011-01-05

    CPC classification number: G01M7/027

    Abstract: A jig device usable with a flat display panel which includes a frame including a base frame having an opening and a vertical frame which extends vertically along a perimeter of the base frame and a supporting frame coupled to the base frame within the frame, on which the flat display panel is disposed, wherein the supporting frame includes fixing portions provided at corners thereof to support respective corners of the flat display panel.

    Abstract translation: 一种可用于平板显示面板的夹具装置,其包括框架,该框架包括具有开口的基座框架和沿着所述底座框架的周边垂直延伸的垂直框架,以及支撑框架,其联接到所述框架内的所述基座框架, 平面显示面板设置在其中,支撑框架包括设置在其角部的固定部分,以支撑平面显示面板的各个角部。

    PASTE COMPOSITION FOR SOLAR CELL ELECTRODE AND ELECTRODE PRODUCED THEREFROM
    9.
    发明申请
    PASTE COMPOSITION FOR SOLAR CELL ELECTRODE AND ELECTRODE PRODUCED THEREFROM 审中-公开
    用于太阳能电池的电极组合物及其生产的电极

    公开(公告)号:US20140373904A1

    公开(公告)日:2014-12-25

    申请号:US14362736

    申请日:2012-03-30

    CPC classification number: H01L31/022425 H01B1/16 H01B1/22 Y02E10/50

    Abstract: The present invention relates to a paste composition for a solar cell electrode and an electrode produced therefrom. The present invention relates to a paste composition for a solar cell electrode, and an electrode produced therefrom, the paste composition comprising conductive powders, a glass frit, and an organic vehicle, the glass frit including PbO, SiO2, and TeO2, wherein an amount of said TeO2 included in the glass frit is about 1-20% by weight.

    Abstract translation: 本发明涉及一种太阳能电池用电极用糊料组合物及其制造的电极。 本发明涉及一种太阳能电池用电极用糊料组合物及由其制造的电极,所述糊料组合物含有导电粉末,玻璃料和有机载体,所述玻璃料包含PbO,SiO 2和TeO 2,其中, 所述玻璃料中包含的所述TeO 2为约1-20重量%。

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