摘要:
A sputtering target which is composed of a sintered body of an oxide which contains at least indium, tin, and zinc and includes a spinel structure compound of Zn2SnO4 and a bixbyite structure compound of In2O3. A sputtering target includes indium, tin, zinc, and oxygen with only a peak ascribed to a bixbyite structure compound being substantially observed by X-ray diffraction (XRD).
摘要翻译:一种溅射靶,其由至少含有铟,锡和锌的氧化物的烧结体构成,并且包括Zn2SnO4的尖晶石结构化合物和In 2 O 3的菱沸石结构化合物。 溅射靶包括铟,锡,锌和氧,只有通过X射线衍射(XRD)基本观察到由比克比结构化合物引起的峰。
摘要:
A sputtering target which is composed of a sintered body of an oxide which contains at least indium, tin, and zinc and includes a spinel structure compound of Zn2SnO4 and a bixbyite structure compound of In2O3. A sputtering target includes indium, tin, zinc, and oxygen with only a peak ascribed to a bixbyite structure compound being substantially observed by X-ray diffraction (XRD).
摘要翻译:一种溅射靶,其由至少含有铟,锡和锌的氧化物的烧结体构成,并且包括Zn2SnO4的尖晶石结构化合物和In 2 O 3的菱沸石结构化合物。 溅射靶包括铟,锡,锌和氧,只有通过X射线衍射(XRD)基本观察到由比克比结构化合物引起的峰。
摘要:
A transparent conductive film including an indium oxide, a tin oxide and at least one lanthanoid metal oxide, the film including a portion connected to a conductor, and at least the connection portion having crystallinity.
摘要:
A transparent conductive film including an indium oxide, a tin oxide and at least one lanthanoid metal oxide, the film including a portion connected to a conductor, and at least the connection portion having crystallinity.
摘要:
A transparent electrode film including an oxide containing indium, zinc and tin and having a thickness of 25 nm or less. A transparent electrode film including an oxide containing indium and zinc and having a thickness of 30 nm or less.
摘要:
A multilayer structure including a transparent conductive thin film and a molybdenum metal thin film, the transparent conductive thin film having a thickness of 35 nm or less.
摘要:
A multilayer structure including a transparent conductive thin film and a molybdenum metal thin film wherein difference of internal stress between the transparent conductive thin film and the molybdenum metal thin film is 1600 MPa or less.
摘要:
A multilayer structure including a transparent conductive thin film and a molybdenum metal thin film wherein difference of internal stress between the transparent conductive thin film and the molybdenum metal thin film is 1600 MPa or less.
摘要:
A multilayer structure including a transparent conductive thin film and a molybdenum metal thin film, the transparent conductive thin film having a thickness of 35 nm or less.
摘要:
A fired material including at least one metal atom selected from indium, zinc and tin, at least one alkali metal atom selected from cesium, potassium and lithium, and an oxygen atom, wherein the atomic ratio (alkali metal atom)/(metal atom+alkali metal atom) is 0.1 to 80 at. %.