公开(公告)号：US20150340195A1

公开(公告)日：2015-11-26

申请号：US14296960

申请日：2014-06-05

Applicant: KLA-Tencor Corporation

Inventor： Alan D. BRODIE ,  Yehiel GOTKIS ,  Allen CARROLL ,  Leonid BARANOV

IPC: H01J37/10 ,  H01J37/317

CPC classification number: H01L21/20 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/045 ,  H01J37/3177 ,  H01J2237/0437 ,  H01J2237/1205 ,  Y10T156/10

Abstract: One embodiment relates to a pillar-supported array of micro electron lenses. The micro-lens array includes a base layer on a substrate, the base layer including an array of base electrode pads and an insulating border surrounding the base electrode pads so as to electrically isolate the base electrode pads from each other. The micro-lens array further includes an array of lens holes aligned with the array of base electrode pads and one or more stacked electrode layers having openings aligned with the array of lens holes. The micro-lens array further includes one or more layers of insulating pillars, each layer of insulating pillars supporting a stacked electrode layer. Another embodiment relates to a method of fabricating a pillar-supported array of micro electron lenses. Other embodiments, aspects and features are also disclosed.

Abstract translation: 一个实施例涉及一种立柱支撑的微电子透镜阵列。 微透镜阵列包括在基板上的基底层，基底层包括基极电极焊盘的阵列和围绕基极电极焊盘的绝缘边界，以将基极电极彼此电隔离。 微透镜阵列还包括与基极阵列阵列对准的透镜孔阵列和一个或多个具有与透镜孔阵列对准的开口的堆叠电极层。 微透镜阵列还包括一层或多层绝缘柱，每层绝缘柱支撑堆叠的电极层。 另一实施例涉及一种制造支柱支撑的微电子透镜阵列的方法。 还公开了其它实施例，方面和特征。

公开(公告)号：US20130134324A1

公开(公告)日：2013-05-30

申请号：US13679072

申请日：2012-11-16

Applicant: KLA-TENCOR CORPORATION

Inventor： Alan D. BRODIE ,  Joseph MAURINO ,  Mark A. McCORD ,  Paul F. PETRIC

IPC: H01J23/06 ,  G21K5/08

CPC classification number: H01J23/06 ,  G21K5/08 ,  H01J23/08 ,  H01J29/48 ,  H01J29/488 ,  H01J37/065 ,  H01J2237/038 ,  H01J2237/06341 ,  H01J2237/06375 ,  H01J2237/3175

Abstract: One embodiment relates to a high-voltage electron gun including an insulator stand-off having a resistive layer. The resistive layer is at least on an interior surface of the insulator stand-off. A cathode holder is coupled to one end of the insulator 115 stand-off, and an anode is coupled to the other end. The resistive layer advantageously increases the surface breakdown field strength for the insulator stand-off and so enables a compact design for the high-voltage electron gun. Other embodiments, aspects and feature are also disclosed.

Abstract translation: 一个实施例涉及一种包括具有电阻层的绝缘体支架的高压电子枪。 电阻层至少在绝缘体支座的内表面上。 阴极保持器联接到绝缘体115的一端，并且阳极耦合到另一端。 电阻层有利地增加了用于绝缘体间隔的表面击穿场强，因此能够实现高压电子枪的紧凑设计。 还公开了其它实施例，方面和特征。