Abstract:
According to one embodiment, a treatment solution is provided. The treatment solution is used for treating a byproduct stemming from a process of depositing a silicon-containing material on a member using a gas which includes silicon and halogen. The treatment solution includes at least one of an inorganic base or an organic base and being basic.
Abstract:
According to one embodiment, a treatment method may include making a byproduct come into contact with a treatment solution, wherein the byproduct is a solid or liquid byproduct formed by polymerizing components contained in an exhaust gas discharged by synthesizing a silicon-containing material using a gas which includes silicon and halogen. The treatment solution may include at least one of an inorganic base or an organic base, and is basic.
Abstract:
According to one embodiment, a treatment solution is provided. The treatment solution is used for treating halosilanes having a cyclic structure. The treatment solution includes at least one of an inorganic base or an organic base and being basic.
Abstract:
According to one embodiment, a determination method is provided. The determination method determines progress of a treatment of a side-product produced in a process of reacting a substance containing a halogen and silicon or reacting a substance containing silicon and a substance containing a halogen. The treatment of the side-product includes bringing the side-product into contact with a treatment fluid containing water to obtain a first solid matter. The determination method includes determining the progress of the treatment of the side-product based on a signal according to a chemical analysis of at least one of an Si-α bond (α is at least one selected from the group consisting of F, Cl, Br, and I) and an Si—H bond, of the first solid matter.
Abstract:
According to an embodiment, a process apparatus performs processing on a byproduct generated in a reaction of a raw material including silicon and a halogen element or in a reaction between a raw material including silicon and a raw material including a halogen element. The apparatus includes a process liquid tank, a processing tank, a supplier and an exhauster. A process target member including the byproduct is introduced into the processing tank. The supplier supplies the process liquid from the process liquid tank to the processing tank and performs processing on the byproduct with the supplied process liquid. The exhauster exhausts a gas generated by reaction between the process liquid and the byproduct from the processing tank.
Abstract:
According to one embodiment, a treatment solution is provided. The treatment solution is used for treating halosilanes having a cyclic structure. The treatment solution includes at least one of an inorganic base or an organic base and being basic.
Abstract:
According to one embodiment, a manufacturing method of an electrode includes supplying a current collector, coating the current collector with a slurry and drying the slurry. In the manufacturing method of the electrode, the current collector is supplied onto a backup roll including annular protruding portions formed on an outer circumferential surface of the backup roll. A surface of the current collector excluding a portion arranged on a plurality of the annular protruding portions is coated with slurry containing an active material. And, then, the slurry is dried.
Abstract:
According to one embodiment, a laminate includes a first active material-containing layer, a first film and a second film. The first film includes an inorganic material, and a back surface thereof is in contact with a front surface of the first active material-containing layer. The second film includes organic fibers, and one of front and back surfaces is in contact with a front surface of the first film. An absolute value of a difference between surface roughness Ra1 of the front surface of the first active material-containing layer and surface roughness Ra2 of the back surface of the first film is 0.6 μm or less (including 0).
Abstract:
An optical-waveguide sensor chip includes an optical waveguide having a first substance immobilized on the surface thereof, the first substance being specifically reactive with an analyte substance, and fine particles dispersed on the optical waveguide and having a second substance immobilized on the surface thereof, the second substance being specifically reactive with the analyte substance.
Abstract:
According to one embodiment, an examination device includes a reagent, a sheet and a detection unit. The reagent reacts with a measurement target and thereby causes light emission. The sheet is capable of adsorbing the reagent and gradually releasing the adsorbed reagent. The detection unit detects optical characteristics of the light emission caused by the reaction between the measurement target and the reagent.