公开(公告)号：US20180217500A1

公开(公告)日：2018-08-02

申请号：US15694597

申请日：2017-09-01

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Michihiko NISHIGAKI ,  Yutaka ONOZUKA ,  Shouhei KOUSAI ,  Yosuke AKIMOTO ,  Miyu NAGAI ,  Kaita IMAI

IPC: G03F7/075 ,  H01L21/027 ,  G03F7/11 ,  G03F7/20 ,  G03F7/32

CPC classification number: G03F7/0757 ,  B01L3/5085 ,  B01L2200/12 ,  B01L2300/0636 ,  B01L2300/0663 ,  B01L2300/0829 ,  B01L2300/0851 ,  G01N21/6486 ,  G01N2021/054 ,  G01N2021/6482 ,  G03F7/11 ,  G03F7/2004 ,  G03F7/325 ,  H01L21/0274

Abstract: According to one embodiment, a pattern forming method includes forming a resist pattern on a substrate, forming a first silicone resin layer so as to bury the resist pattern on the substrate, pressing a film on the surface of the first silicone resin layer to adhere the film thereto, curing the first silicone resin layer after the adhesion of the film, peeling the film from the first silicone resin layer before or after the curing of the first silicone resin layer, and removing the resist pattern after the peeling of the film.

公开(公告)号：US20240201124A1

公开(公告)日：2024-06-20

申请号：US18458335

申请日：2023-08-30

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Miyu NAGAI ,  Yoshiaki SUGIZAKI ,  Hideyuki TOMIZAWA

IPC: G01N27/414

CPC classification number: G01N27/4145

Abstract: According to one embodiment, a sensor module system includes a first sensor module including a probe molecule that responds to light irradiation with charge, and a second sensor module including no probe molecule. A first flow path is connected to one end side of the first sensor module, and a second flow path is connected to the other end side. A third flow path branching from the first flow path is connected to one end side of the second sensor module, and a fourth flow path joining the first flow path is connected to the other end side. A valve capable of opening and closing the third flow path is connected to a junction of the first flow path and the third flow path.

公开(公告)号：US20230375498A1

公开(公告)日：2023-11-23

申请号：US18183545

申请日：2023-03-14

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Miyu NAGAI ,  Yoshiaki SUGIZAKI ,  Hideyuki TOMIZAWA

IPC: G01N27/414 ,  B01L3/00

CPC classification number: G01N27/414 ,  B01L3/502761 ,  B01L2300/0645 ,  B01L2200/0689 ,  B01L2200/0652

Abstract: According to one embodiment, the storing method includes (S1) preparing the chemical sensor in which a probe molecule for capturing the target substance is immobilized on at least a part of a surface of the sensitive film, and (S2) forming a protective film that is formed of a water-soluble material on the surface so as to cover the surface on which the probe molecule is immobilized.

公开(公告)号：US20190283284A1

公开(公告)日：2019-09-19

申请号：US16113293

申请日：2018-08-27

Applicant: KABUSHIKI KAISHA TOSHIBA ,  TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATION

Inventor： Michihiko NISHIGAKI ,  Miyu NAGAI ,  Shouhei KOUSAI ,  Yosuke AKIMOTO ,  Kaita IMAI ,  Yutaka ONOZUKA

IPC: B29C41/20 ,  B81C1/00 ,  B29C41/00 ,  B29C41/42 ,  B29C35/08 ,  B01L3/00

Abstract: According to one embodiment, a method of manufacturing a microchannel includes coating a silicone resin onto a mold corresponding to a microchannel and a first opening communicating with the microchannel, curing the silicone resin by light using a mask having a light shielding portion corresponding to the first opening, removing an uncured silicone resin, and releasing the cured silicone resin from the mold.