公开(公告)号：US20220262597A1

公开(公告)日：2022-08-18

申请号：US17669503

申请日：2022-02-11

Applicant: JEOL Ltd.

Inventor： Akiho Nakamura

IPC: H01J37/26 ,  H01J37/28 ,  H01J37/147

Abstract: A method of measuring a relative rotational angle includes: shifting an electron beam on a specimen plane by using a deflector; tilting the electron beam with respect to the specimen plane by using the deflector; acquiring a first STEM image including information of a scattering azimuth angle and a second STEM image not including the information of the scattering azimuth angle, before the shifting and the tilting; acquiring a third STEM image including the information of the scattering azimuth angle and a fourth STEM image not including the information of the scattering azimuth angle, after the shifting and the tilting; and obtaining the relative rotational angle based on the first STEM image, the second STEM image, the third STEM image and the fourth STEM image.

公开(公告)号：US10886099B2

公开(公告)日：2021-01-05

申请号：US16282897

申请日：2019-02-22

Applicant: JEOL Ltd.

Inventor： Yuji Kohno ,  Akiho Nakamura

IPC: H01J37/00 ,  H01J37/22 ,  H01J37/28 ,  H01J37/26 ,  H01J37/153

Abstract: There is provided a method of aberration measurement capable of reducing the effects of image drift. The novel method of aberration measurement is for use in an electron microscope. The method comprises the steps of: acquiring a first image that is a TEM (transmission electron microscope) image of a sample; scanning the illumination angle of an electron beam impinging on the sample and acquiring a second image by multiple exposure of a plurality of TEM images generated at different illumination angles; and calculating aberrations from the first and second images.

公开(公告)号：US10923314B2

公开(公告)日：2021-02-16

申请号：US15830304

申请日：2017-12-04

Applicant: JEOL Ltd.

Inventor： Akiho Nakamura

IPC: H01J37/22 ,  H01J37/28 ,  H01J37/20 ,  H01J37/147 ,  H01J37/244 ,  G01N23/041 ,  G01N9/24

Abstract: There is provided a method of image acquisition capable of reducing the effects of diffraction contrast. This method of image acquisition is implemented in an electron microscope for generating electron microscope images with electrons transmitted through a sample. The method starts with obtaining the plural electron microscope images while causing relative variations in the direction of incidence of an electron beam with respect to the sample. An image is generated by accumulating the plural electron microscope images.

公开(公告)号：US20180158646A1

公开(公告)日：2018-06-07

申请号：US15830304

申请日：2017-12-04

Applicant: JEOL Ltd.

Inventor： Akiho Nakamura

IPC: H01J37/22 ,  H01J37/28 ,  H01J37/20 ,  H01J37/147 ,  H01J37/244

CPC classification number: H01J37/222 ,  H01J37/147 ,  H01J37/20 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/20207 ,  H01J2237/221 ,  H01J2237/24578 ,  H01J2237/2614 ,  H01J2237/2802 ,  H01J2237/2804 ,  H01J2237/2809

Abstract: There is provided a method of image acquisition capable of reducing the effects of diffraction contrast. This method of image acquisition is implemented in an electron microscope for generating electron microscope images with electrons transmitted through a sample. The method starts with obtaining the plural electron microscope images while causing relative variations in the direction of incidence of an electron beam with respect to the sample. An image is generated by accumulating the plural electron microscope images.

公开(公告)号：US11837433B2

公开(公告)日：2023-12-05

申请号：US17669503

申请日：2022-02-11

Applicant: JEOL Ltd.

Inventor： Akiho Nakamura

IPC: H01J37/26 ,  H01J37/28 ,  H01J37/147

CPC classification number: H01J37/265 ,  H01J37/1474 ,  H01J37/28 ,  H01J2237/2802 ,  H01J2237/2804

Abstract: A method of measuring a relative rotational angle includes: shifting an electron beam on a specimen plane by using a deflector; tilting the electron beam with respect to the specimen plane by using the deflector; acquiring a first STEM image including information of a scattering azimuth angle and a second STEM image not including the information of the scattering azimuth angle, before the shifting and the tilting; acquiring a third STEM image including the information of the scattering azimuth angle and a fourth STEM image not including the information of the scattering azimuth angle, after the shifting and the tilting; and obtaining the relative rotational angle based on the first STEM image, the second STEM image, the third STEM image and the fourth STEM image.

公开(公告)号：US20190267210A1

公开(公告)日：2019-08-29

申请号：US16282897

申请日：2019-02-22

Applicant: JEOL Ltd.

Inventor： Yuji Kohno ,  Akiho Nakamura

IPC: H01J37/22 ,  H01J37/28

Abstract: There is provided a method of aberration measurement capable of reducing the effects of image drift. The novel method of aberration measurement is for use in an electron microscope. The method comprises the steps of: acquiring a first image that is a TEM (transmission electron microscope) image of a sample; scanning the illumination angle of an electron beam impinging on the sample and acquiring a second image by multiple exposure of a plurality of TEM images generated at different illumination angles; and calculating aberrations from the first and second images.

公开(公告)号：US20190066968A1

公开(公告)日：2019-02-28

申请号：US16109837

申请日：2018-08-23

Applicant: JEOL Ltd.

Inventor： Yuji Kohno ,  Akiho Nakamura

IPC: H01J37/153 ,  H01J37/26 ,  H01J37/28 ,  H01J37/244 ,  H01J37/147

Abstract: An aberration measurement method for an objective lens in an electron microscope including an objective lens which focuses an electron beam that illuminates a specimen, and a detector which detects an electron beam having passed through the specimen, includes: introducing a coma aberration to the objective lens; measuring an aberration of the objective lens before introducing the coma aberration to the objective lens; measuring an aberration of the objective lens after introducing the coma aberration to the objective lens; and obtaining a position of an optical axis of the objective lens on a detector plane of the detector based on measurement results of the aberration of the objective lens before and after introducing the coma aberration.