Method for automatic correction of astigmatism

    公开(公告)号:US09928989B2

    公开(公告)日:2018-03-27

    申请号:US15620942

    申请日:2017-06-13

    CPC classification number: H01J37/153 H01J37/26 H01J2237/1532 H01J2237/223

    Abstract: The method is for automatic astigmatism correction of a lens system. A first image of a first frequency spectrum in a microscope is provided. The first image of a view is not in focus. The first image is then imaged. A first roundness measure of a distribution and directions of intensities in the first image is determined. The lens is changed to a second stigmator setting to provide a second image of a second frequency spectrum. The second image of the view is not in focus. The second image is the same view as the first image of the view at the first stigmator setting. A second roundness measure of a distribution and directions of intensities in the second image is determined. The first roundness measure is compared with the second roundness measure. The image with the roundness measure indicating the roundest distribution is selected.

    High precision quantification of sub-visible particles

    公开(公告)号:US10345207B2

    公开(公告)日:2019-07-09

    申请号:US16277393

    申请日:2019-02-15

    Abstract: The method is for quantification of sub-visible particles. A filter membrane is provided that has a plurality of pores defined therethrough. The filter membrane is in operational engagement with a vacuum chamber. The pores are sealed with a sealant. A sample droplet, containing a liquid and sub-visible particles, is applied onto the filter membrane. The liquid dissolves the sealant in pores disposed directly below the sample droplet. The liquid flows through the pores in which the sealant has been dissolved and the sub-visible particles remain on top of the filter membrane. The particles are enumerated in an electron microscope.

    High precision quantification of sub-visible particles

    公开(公告)号:US10247648B2

    公开(公告)日:2019-04-02

    申请号:US15736621

    申请日:2016-10-21

    Abstract: The method is for quantification of sub-visible particles. A filter membrane is provided that has a plurality of pores defined therethrough. The filter membrane is in operational engagement with a vacuum chamber. The pores are sealed with a sealant. A sample droplet, containing a liquid and sub-visible particles, is applied onto the filter membrane. The liquid dissolves the sealant in pores disposed directly below the sample droplet. The liquid flows through the pores in which the sealant has been dissolved and the sub-visible particles remain on top of the filter membrane. The particles are enumerated in an electron microscopy.

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