公开(公告)号：US09976918B2

公开(公告)日：2018-05-22

申请号：US15192466

申请日：2016-06-24

Applicant: INDUSTRIY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY

Inventor： Seung-Beck Lee ,  Onejae Sul

IPC: G01L5/00 ,  G01L1/00 ,  G01L5/22 ,  G01L9/00 ,  H01L29/16 ,  H01L29/84 ,  H01L29/778 ,  G01L1/22 ,  H01L29/66 ,  G01L1/14

CPC classification number: G01L1/005 ,  G01L1/148 ,  G01L1/2293 ,  G01L5/228 ,  G01L9/0098 ,  H01L29/1606 ,  H01L29/66015 ,  H01L29/66045 ,  H01L29/778 ,  H01L29/84

Abstract: A pressure sensing device having a Dirac material and a method of operating the same are provided. The pressure sensing device includes a Dirac material pattern disposed on a substrate and having a band structure in which Dirac cones meet at a Dirac point. A source electrode and a drain electrode are respectively connected to the Dirac material pattern. A spacer layer including a cavity on the Dirac material pattern is disposed on the substrate. A gate electrode overlapping the Dirac material pattern is disposed on the cavity.