Invention Grant
- Patent Title: Pressure sensing device having Dirac material and method of operating the same
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Application No.: US15192466Application Date: 2016-06-24
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Publication No.: US09976918B2Publication Date: 2018-05-22
- Inventor: Seung-Beck Lee , Onejae Sul
- Applicant: INDUSTRIY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY
- Applicant Address: KR Seoul
- Assignee: INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY
- Current Assignee: INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY
- Current Assignee Address: KR Seoul
- Agency: Ladas & Parry LLP
- Priority: KR10-2015-0090446 20150625
- Main IPC: G01L5/00
- IPC: G01L5/00 ; G01L1/00 ; G01L5/22 ; G01L9/00 ; H01L29/16 ; H01L29/84 ; H01L29/778 ; G01L1/22 ; H01L29/66 ; G01L1/14

Abstract:
A pressure sensing device having a Dirac material and a method of operating the same are provided. The pressure sensing device includes a Dirac material pattern disposed on a substrate and having a band structure in which Dirac cones meet at a Dirac point. A source electrode and a drain electrode are respectively connected to the Dirac material pattern. A spacer layer including a cavity on the Dirac material pattern is disposed on the substrate. A gate electrode overlapping the Dirac material pattern is disposed on the cavity.
Public/Granted literature
- US20160377492A1 PRESSURE SENSING DEVICE HAVING DIRAC MATERIAL AND METHOD OF OPERATING THE SAME Public/Granted day:2016-12-29
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