公开(公告)号：US09093201B2

公开(公告)日：2015-07-28

申请号：US14155771

申请日：2014-01-15

Applicant: IMS NANOFABRICATION AG

Inventor： Elmar Platzgummer ,  Andreas Chylik ,  Gerald Kratzert ,  Roman Oberleitner

IPC: H01J1/90 ,  H01B17/14 ,  H01J37/147 ,  H01J37/02 ,  H01J37/04 ,  H01J37/15 ,  H01J37/317 ,  B82Y10/00 ,  B82Y40/00

CPC classification number: H01B17/14 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/023 ,  H01J37/04 ,  H01J37/147 ,  H01J37/15 ,  H01J37/3177 ,  H01J2237/036 ,  H01J2237/038 ,  H01J2237/1502

Abstract: A high-voltage insulation device (300) for use in a charged-particle optical apparatus comprises a plurality of rigid pillars (320) made of electrically insulating material. These pillars (320) are arranged around a central passage (310) which traverses the insulating device along its longitudinal axis (L), and the two ends of each pillar are configured to be respectively fixed to two separate electrostatic housings (221, 231) of the charged-particle optical apparatus by means of two respective end plates (311, 312), with the pillars (320) being oriented at an angle so as to be inclined with regard to said longitudinal axis (L). Advantageously, the pillars are mechanically adjustable with regard to their effective length, and each pillar (320) is arranged outside the central passage with its two ends at either of the first and second end plates (311, 312), preferably in a zig-zag arrangement.

Abstract translation: 用于带电粒子光学装置的高压绝缘装置（300）包括由电绝缘材料制成的多个刚性支柱（320）。 这些支柱（320）围绕其纵向轴线（L）穿过绝缘装置的中心通道（310）布置，并且每个支柱的两端被分别固定在两个独立的静电外壳（221,231）上， 通过两个相应的端板（311,312）连接带电粒子光学装置，柱子（320）以相对于所述纵向轴线（L）倾斜的角度定向。 有利地，支柱可相对于它们的有效长度机械地调节，并且每个支柱（320）布置在中心通道的外侧，其两端位于第一和第二端板（311,312）中的任一个处， 扎格布置。

公开(公告)号：US20140197327A1

公开(公告)日：2014-07-17

申请号：US14155771

申请日：2014-01-15

Applicant: IMS NANOFABRICATION AG

Inventor： Elmar Platzgummer ,  Andreas Chylik ,  Gerald Kratzert ,  Roman Oberleitner

IPC: H01B17/14 ,  H01J37/147

CPC classification number: H01B17/14 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/023 ,  H01J37/04 ,  H01J37/147 ,  H01J37/15 ,  H01J37/3177 ,  H01J2237/036 ,  H01J2237/038 ,  H01J2237/1502

Abstract: A high-voltage insulation device (300) for use in a charged-particle optical apparatus comprises a plurality of rigid pillars (320) made of electrically insulating material. These pillars (320) are arranged around a central passage (310) which traverses the insulating device along its longitudinal axis (L), and the two ends of each pillar are configured to be respectively fixed to two separate electrostatic housings (221, 231) of the charged-particle optical apparatus by means of two respective end plates (311, 312), with the pillars (320) being oriented at an angle so as to be inclined with regard to said longitudinal axis (L). Advantageously, the pillars are mechanically adjustable with regard to their effective length, and each pillar (320) is arranged outside the central passage with its two ends at either of the first and second end plates (311,312), preferably in a zig-zag arrangement.

Abstract translation: 用于带电粒子光学装置的高压绝缘装置（300）包括由电绝缘材料制成的多个刚性支柱（320）。 这些支柱（320）围绕其纵向轴线（L）穿过绝缘装置的中心通道（310）布置，并且每个支柱的两端被分别固定在两个独立的静电外壳（221,231）上， 通过两个相应的端板（311,312）连接带电粒子光学装置，柱子（320）以相对于所述纵向轴线（L）倾斜的角度定向。 有利地，支柱可相对于它们的有效长度机械地调节，并且每个支柱（320）布置在中心通道的外侧，其两端位于第一和第二端板（311,312）中的任一个处，优选地以Z字形布置 。