Abstract:
The present invention discloses a structure and method for determining a defect in integrated circuit manufacturing process, wherein the structure comprises a plurality of normal active areas formed in a plurality of first arrays and a plurality of defective active areas formed in a plurality of second arrays. The first arrays and second arrays are interlaced, and the defect is determined by monitoring a voltage contrast from a charged particle microscope image of the active areas.
Abstract:
A method for heating a substrate in a vacuum environment and a system therefor is provided. The system includes a chamber capable of holding the substrate located in the vacuum environment and a light source capable of projecting a light beam only on a portion of the substrate. The method includes the following steps. First, the substrate is placed in the vacuumed chamber. Thereafter, the light beam emitted from the light source is projected on the portion of the substrate, such that the portion is significantly heated before whole the substrate is heated. When the light beam is a charged particle beam projected by a charged particle beam assembly and projected on defects located on the substrate, the defects are capable of being identified by an examination result provided by an examination assembly after termination of light beam projection.
Abstract:
A method of inspecting for plug-to-plug short (short circuit) defects on a sample is disclosed. A charged particle beam for imaging the sample is repeatedly line-scanned over the sample with a line-to-line advancement direction perpendicular to the line-scan direction. The method includes scanning the sample with a line-to-line advancement along a first and a second direction, to obtain a first and a second image of the sample, respectively. Then, the method includes identifying plug patterns, represented in the obtained images with abnormal grey levels, as abnormal plug patterns. Next, the method compares the locations of the abnormal plug patterns to determine the presence of plug-to-plug short defects on the sample.
Abstract:
The present invention discloses a structure and a method for determining a defect in integrated circuit manufacturing process. Test keys are designed for the structure to be the interlaced arrays of grounded and floating conductive cylinders, and the microscopic image can be predicted to be an interlaced pattern of bright voltage contrast (BVC) and dark voltage contrast (DVC) signals for a charged particle beam imaging system. The system can detect the defects by comparing patterns of the detected VC signals and the predicted VC signals.
Abstract:
One embodiment relates to a method of reviewing defects using a scanning electron microscope (SEM). A defect location having a defect for review is selected, and the SEM is configured to be in a first imaging configuration. The selected defect location is imaged using the SEM to generate a first SEM image of the selected defect location. A determination is made as to whether the defect is visible or non-visible in the first SEM image. If the defect is non-visible in the first SEM image, then the SEM is configured to be into a second imaging configuration, the selected defect location is imaged using the SEM to generate a second SEM image of the selected defect location, and a further determination is made as to whether the defect is visible or non-visible in the second SEM image. Other embodiments, aspects and features are also disclosed.
Abstract:
A method, performed by a user device, may include detecting an incoming call; determining whether the incoming call is associated with a very important person contact; directing the incoming call to a voicemail system, when the incoming call is not associated with a very important person contact; and providing, when the incoming call is associated with the very important person contact, an instant response message to a device associated with the incoming call without answering the incoming call. The method may further include providing reminder, including a ranked callback list of missed calls, to the user at particular intervals.
Abstract:
A method may include determining whether a mobile communication device is in a driver compartment of an automobile. The method may include determining whether the automobile is in motion or not in motion. Further, the method may include redirecting a call to the mobile communication device when the mobile communication device is in the driver compartment and the automobile is in motion.
Abstract:
The present invention discloses a drug carrier with the capability of systemic administration through intravenous injection, its preparation methods and it is used for tumor gene therapy, it is belong to the field of tumor-targeted therapy. The carrier of the present invention is a novel liposome which is composed of DOTAP or its analogue and lecithin or its derivative in molar ratio of 20:(7-13), it can form stable complex with bioactive materials, and can deliver these bioactive material to the targeted cells cultured in vitro or in vivo. The complex of the present invention has a larger packaging capability, and the particle size is greatly reduced, that is optimized to 200 nm and below, in an environment of high serum concentration, it maintains high transfection efficiency. The carrier of the present invention packages DNA of tumor suppressor genes or cell suicide gene by forming complexes which can be specifically delivered into tumor cells in vitro, ex vivo or in vivo for gene therapeutic purposes.
Abstract:
The present invention relates to the technical field of data or file synchronization. In particular, the present invention relates to a method and system for data synchronization using character string matching. Provided are a method, computer program product, and system for data synchronization between a source node and target node. An old copy and a new copy of data to be synchronized is received. A block map is generated according to the difference determined using character string matching between the old copy and the new copy. The block map, which includes the position information of unchanged blocks and the position information and contents of changed blocks, is transmitted to a target node.
Abstract:
A method may include determining whether a mobile communication device is in a driver compartment of an automobile. The method may include determining whether the automobile is in motion or not in motion. Further, the method may include redirecting a call to the mobile communication device when the mobile communication device is in the driver compartment and the automobile is in motion.