公开(公告)号：US20200294756A1

公开(公告)日：2020-09-17

申请号：US16645511

申请日：2018-08-24

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Toshiyuki YOKOSUKA ,  Hajime KAWANO ,  Kouichi KUROSAWA ,  Hideyuki KAZUMI ,  Chahn LEE

IPC: H01J37/05 ,  H01J37/22 ,  H01J37/244 ,  H01J37/28

Abstract: The purpose of the present invention is to provide a charged particle ray device which is capable of simply estimating the cross-sectional shape of a pattern. The charged particle ray device according to the present invention acquires a detection signal for each different discrimination condition of an energy discriminator, and estimates the cross-sectional shape of a sample by comparing the detection signal for each discrimination condition with a reference pattern (see FIG. 5).

公开(公告)号：US20170345613A1

公开(公告)日：2017-11-30

申请号：US15533517

申请日：2014-12-10

Applicant: Hitachi High-Technologies Corporation

Inventor： Yuzuru MIZUHARA ,  Toshiyuki YOKOSUKA ,  Hideyuki KAZUMI ,  Kouichi KUROSAWA ,  Kenichi MYOCHIN

IPC: H01J37/12 ,  H01J37/244

Abstract: The purpose of the present invention is to reduce the amount of charged particles that are lost by colliding with the interior of a column of a charged particle beam device, and detect charged particles with high efficiency. To achieve this purpose, proposed is a charged particle beam device provided with: an objective lens that focuses a charged particle beam; a detector that is disposed between the objective lens and a charged particle source; a deflector that deflects charged particles emitted from a sample such that the charged particles separate from the axis of the charged particle beam; and a plurality of electrodes that are disposed between the deflector and the objective lens and that form a plurality of electrostatic lenses for focusing the charged particles emitted from the sample on a deflection point of the deflector.

公开(公告)号：US20200258713A1

公开(公告)日：2020-08-13

申请号：US16620065

申请日：2017-07-28

Applicant: Hitachi High-Technologies Corporation

Inventor： Yuzuru MIZUHARA ,  Kouichi KUROSAWA

IPC: H01J37/05 ,  H01J37/244

Abstract: The purpose of the present invention is to provide a charged-particle beam device capable of stable performance of processes such as a measurement or test, independent of fluctuations in sample electric electric potential or the like. To this end, this charged-particle beam device comprises an energy filter for filtering the energy of charged particles released from the sample and a deflector for deflecting the charged particles released from the sample toward the energy filter. A control device generates a first image on the basis of the output of a detector, adjusts the voltage applied to the energy filter so that the first image reaches a prescribed state, and calculates deflection conditions for the deflector on the basis of the post-adjustment voltage applied to the energy filter.