公开(公告)号：US20170045457A1

公开(公告)日：2017-02-16

申请号：US15305367

申请日：2015-04-28

Applicant: HORIBA JOBIN YVON SAS

Inventor： Simon RICHARD ,  Jean-Paul GASTON ,  Olivier ACHER ,  Patrick CHAPON

IPC: G01N21/67 ,  G01N21/68 ,  G01B11/22

CPC classification number: G01N21/67 ,  G01B11/22 ,  G01J3/443 ,  G01N21/68 ,  G01N2201/06113 ,  G01N2201/0612 ,  H01J37/32018 ,  H01J37/32963 ,  H01J37/32972 ,  H01J2237/334

Abstract: A glow discharge spectrometry system includes a glow discharge lamp suitable for receiving a solid sample (10) and forming a glow discharge etching plasma (19). The system (100) for measuring in situ the depth of the erosion crater generated by etching of the sample (10) includes an optical separator (3), optical elements (4) suitable for directing a first incident beam (21) toward a first zone (11) of the sample, the first zone being exposed to the etching plasma, and a second incident beam (22) toward a second zone (12) of the same side of the sample, the second zone being protected from the etching plasma, respectively, and an optical recombining device (3) suitable for forming an interferometric beam (30) so as to determine the depth (d) of the erosion crater.

Abstract translation: 辉光放电光谱测定系统包括适于接收固体样品（10）并形成辉光放电蚀刻等离子体（19）的辉光放电灯。 用于原位测量通过蚀刻样品（10）产生的侵蚀坑的深度的系统（100）包括光学分离器（3），适于将第一入射光束（21）引向第一入射光束（21）的光学元件（4） 区域（11），第一区域暴露于蚀刻等离子体，以及朝向样品相同侧的第二区域（12）的第二入射光束（22），第二区域被保护免受蚀刻等离子体 以及适于形成干涉光束（30）以便确定侵蚀坑的深度（d）的光学重组装置（3）。

公开(公告)号：US20150300876A1

公开(公告)日：2015-10-22

申请号：US14649065

申请日：2013-11-29

Applicant: HORIBA JOBIN YVON SAS

Inventor： Olivier ACHER ,  Simon RICHARD

IPC: G01J3/02 ,  G01J3/447

CPC classification number: G01J3/0224 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/1804 ,  G01J3/447 ,  G01J2003/1208

Abstract: A spectrometer (100) for analyzing the spectrum of an upstream light beam (1) includes an entrance slit (101) and angular dispersing elements (130). The angular dispersing elements include at least one polarization-dependent diffraction grating that is suitable for, at the plurality of wavelengths (1, 2, 3), diffracting a corrected light beam (20) into diffracted light beams (31, 32, 33) in a given particular diffraction order of the polarization-dependent diffraction grating, which is either the +1 diffraction order or the −1 diffraction order, when the corrected light beam has a preset corrected polarization state that is circular; and the spectrometer includes elements for modifying polarization (1100) placed between the entrance slit and the angular dispersion elements, which are suitable for modifying the polarization state of the upstream light beam in order to generate the corrected light beam with a preset corrected polarization state.

Abstract translation: 用于分析上游光束（1）的光谱的光谱仪（100）包括入射狭缝（101）和角度分散元件（130）。 角分散元件包括至少一个偏振相关衍射光栅，其适于在多个波长（1,2,3）处将经校正的光束（20）衍射成衍射光束（31,32,33） 在偏光相关衍射光栅的给定特定衍射级中，其为+1衍射级或-1衍射级，当校正光束具有预设的校正偏振态为圆形时; 并且光谱仪包括用于改变放置在入射狭缝和角分散元件之间的偏振（1100）的元件，其适于修改上游光束的偏振状态，以便产生具有预设校正偏振状态的校正光束。

公开(公告)号：US20150316476A1

公开(公告)日：2015-11-05

申请号：US14649096

申请日：2013-11-29

Applicant: HORIBA JOBIN YVON SAS

Inventor： Olivier ACHER ,  Simon RICHARD ,  Christian BRACH ,  Viviane MILLET ,  Sebastien CORDE ,  Daphne HERAN

IPC: G01N21/64 ,  G01J3/18 ,  G01J3/447 ,  G01J3/02

CPC classification number: G01N21/645 ,  G01J3/021 ,  G01J3/0224 ,  G01J3/18 ,  G01J3/447 ,  G01N2201/063 ,  G01N2201/0633 ,  G02B5/1866 ,  G02B27/283

Abstract: A spectrometer (100) for analyzing the spectrum of an upstream light beam (1), includes an entrance slit (101) and collimating elements (110) suitable for generating, from the upstream light beam, a collimated light beam (10), characterized in that it also includes: a polarization-dependent diffraction grating (120) suitable for diffracting, at each wavelength (11, 12) of the spectrum of the upstream light beam, the collimated light beam into a first diffracted light beam (11, 12) and a second diffracted light beam (21, 22); optical recombining elements (130) including a planar optical reflecting surface (130) perpendicular to the grating and suitable for deviating at least the second diffracted light beam; and focussing elements (140) suitable for focussing, at each wavelength, the first diffracted light beam and the second diffracted light beam onto one and the same focussing area (141).

Abstract translation: 用于分析上游光束（1）的光谱的光谱仪（100）包括入射狭缝（101）和适于从上游光束产生准直光束（10）的准直元件（110），其特征在于 因为它还包括：适用于在上游光束的光谱的每个波长（11,12）衍射的偏振相关衍射光栅（120），准直光束成为第一衍射光束（11,12 ）和第二衍射光束（21,22）; 光学重组元件（130），包括垂直于光栅的平面光学反射表面（130），并且适于至少偏离第二衍射光束; 以及适于在每个波长处将第一衍射光束和第二衍射光束聚焦到同一聚焦区域（141）上的聚焦元件（140）。