公开(公告)号：US20200035450A1

公开(公告)日：2020-01-30

申请号：US16509694

申请日：2019-07-12

Applicant: Hitachi High-Technologies Corporation

Inventor： Shunsuke MIZUTANI ,  Yuuji KASAI ,  Minoru YAMAZAKI ,  Makoto SUZUKI

IPC: H01J37/28 ,  H01J37/145 ,  H01J37/244 ,  H01J37/06

Abstract: The present disclosure is to provide a charged particle beam device capable of achieving both high resolution by setting of a short WD and improvement of detection efficiency when setting a long WD. According to an aspect for achieving the above-described object, there is suggested a charged particle beam device including: an objective lens for converging a charged particle beam emitted from a charged particle source; a sample stage having a first driving mechanism for moving a sample to be irradiated with the charged particle beam between a first position and a second position more separated from the objective lens than the first position; a detection surface for detecting charged particles emitted from the sample; and a second driving mechanism for moving the detection surface between within a movable range of the sample between the first position and the second position and out of the movable range of the sample.

公开(公告)号：US20200020504A1

公开(公告)日：2020-01-16

申请号：US16494454

申请日：2017-03-27

Applicant: Hitachi High-Technologies Corporation

Inventor： Akio YAMAMOTO ,  Kazuki IKEDA ,  Wen LI ,  Hiroyuki TAKAHASHI ,  Shahedul HOQUE ,  Shunsuke MIZUTANI

IPC: H01J37/22 ,  H01J37/244

Abstract: A charged-particle beam system comprises: a charged-particle beam device containing a detection unit for detecting electrons generated by irradiating a sample with a charged-particle beam released from a charged particle source; and a signal detection unit in which a detection signal from the detection unit is input through a wiring. The signal detection unit comprises: a separation unit for separating into a rising signal and a falling signal the detection signal from the detection unit; a falling signal processing unit for at least eliminating ringing in the falling signal; and a combination unit generating and delivering a combined signal produced by combining the rising signal, which has been separated by the separation unit, with the falling signal wherefrom the ringing has been eliminated by the falling signal processing unit.

公开(公告)号：US20190355552A1

公开(公告)日：2019-11-21

申请号：US16482765

申请日：2017-03-24

Applicant: Hitachi High-Technologies Corporation

Inventor： Shunsuke MIZUTANI ,  Shahedul HOQUE ,  Uki IKEDA ,  Makoto SUZUKI

IPC: H01J37/28 ,  H01J37/147 ,  H01J37/244

Abstract: The present invention provides a charged particle beam apparatus that covers a wide range of detection angles of charged particles emitted from a sample. Accordingly, the present invention proposes a charged particle beam apparatus that is provided with an objective lens for converging charged particle beams emitted from a charged particle source, and a detector for detecting charged particles emitted from a sample, wherein: the objective lens includes an inner magnetic path and an outer magnetic path which are formed so as to enclose a coil; the inner magnetic path comprises a first inner magnetic path disposed at a position opposite to an optical axis of the charged particle beams and a second inner magnetic path which is formed at a slant with respect to the optical axis of the charged particle beams and which includes a leading end of the magnetic path; and a detection surface of the detector is disposed at the outer side from a virtual straight line that passes through the leading end of the magnetic path and that is parallel to the optical axis of the charged particle beams.

公开(公告)号：US20190355549A1

公开(公告)日：2019-11-21

申请号：US16475726

申请日：2018-01-25

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Shin IMAMURA ,  Takashi OHSHIMA ,  Tomonobu TSUCHIYA ,  Hajime KAWANO ,  Shahedul HOQUE ,  Shunsuke MIZUTANI ,  Makoto SUZUKI

IPC: H01J37/244 ,  H01J49/02 ,  G01T1/20 ,  H01J37/28 ,  G01N23/2258

Abstract: The disclosure provides a charged particle detector including a scintillator that emits light with stable intensity and obtains high light emission intensity regardless of an energy of an incident electron. The disclosure provides the charged particle detector including: a first light-emitting part (21) in which a layer containing Ga1-x-yAlxInyN (where 0≤x