Abstract:
This mass spectrometric device is provided with a sample container (8) for placing a measurement sample (12) therein, a detector (9) analyzing the mass of a sample and detecting a drug, or the like, in the sample, a dielectric container (3) linked to the sample container for running a discharge current into air to provoke ionization, a valve (2) for sending air intermittently to the sample container, the dielectric container and the detector, a barrier discharge high-voltage power source (6) to be discharged by the dielectric container, a current detection unit (5) connected to the barrier discharge high-voltage power source for detecting a discharge current (28), a discharge-start timing detection unit (7) connected to the current detection unit for detecting the discharge-start timing based on the current detection result from the current detection unit to send a discharge-start timing signal (17), and a control unit (11) for controlling each constituent.
Abstract:
A charged-particle beam system comprises: a charged-particle beam device containing a detection unit for detecting electrons generated by irradiating a sample with a charged-particle beam released from a charged particle source; and a signal detection unit in which a detection signal from the detection unit is input through a wiring. The signal detection unit comprises: a separation unit for separating into a rising signal and a falling signal the detection signal from the detection unit; a falling signal processing unit for at least eliminating ringing in the falling signal; and a combination unit generating and delivering a combined signal produced by combining the rising signal, which has been separated by the separation unit, with the falling signal wherefrom the ringing has been eliminated by the falling signal processing unit.