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    Biomolecule measuring device
    1.
    发明授权
    Biomolecule measuring device 有权

    公开(公告)号：US10481125B2

    公开(公告)日：2019-11-19

    申请号：US15026657

    申请日：2014-10-02

    Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

    Inventor： Takayuki Kawahara ,  Yoshimitsu Yanagawa ,  Naoshi Itabashi ,  Riichiro Takemura

    IPC: G01N27/414

    Abstract: To a biomolecule measuring apparatus, a semiconductor sensor for detecting ions generated by a reaction between a biomolecular sample and a reagent is set. The semiconductor sensor has a plurality of cells which are arranged on a semiconductor substrate, and each of which detects ions, and a plurality of readout wires. Each of the plurality of cells has an ISFET which has a floating gate and which detects ions, a first MOSFET M2 for amplifying an output from the ISFET, and a second MOSFET M3 which selectively transmits an output from the first MOSFET to a corresponding readout wire R1. Each of the plurality of cells is provided with a third MOSFET M1 which generates hot electrons in the ISFET and which injects a charge to the floating gate of the ISFET. Here, the second MOSFET and the third MOSFET are separately controlled.

    Fixed position controller and method
    2.
    发明授权
    Fixed position controller and method 有权

    公开(公告)号：US10031083B2

    公开(公告)日：2018-07-24

    申请号：US15518341

    申请日：2014-10-16

    Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

    Inventor： Michiru Fujioka ,  Tsuyoshi Sonehara ,  Naoshi Itabashi

    IPC: G01J3/44 ,  G01N21/65 ,  G01N33/487 ,  G01Q60/22 ,  G11B23/03 ,  G11B7/08 ,  G11B7/1387 ,  G11B7/085 ,  G11B7/22

    Abstract: The purpose of the present invention is to control, with a simple structure and high accuracy, irradiation of excitation light to a multi-nanopore substrate without interrupting a measurement. Irradiation of excitation light is performed concurrently to at least one nanopore and at least one reference object on a substrate mounted in an observation container 103. A position irradiated with the excitation light in a measurement sample is calculated on the basis of a signal generated from the reference object detected by a detector 109, and the measurement and a fixed position control is performed concurrently by performing measurement of the measurement object while a drive control part 115 controlling the position of the irradiation of the excitation light to the measurement sample on the basis of the calculation result, whereby an analysis of the measurement sample can be performed in a short time.

    BIOMOLECULE DETECTION METHOD, BIOMOLECULE DETECTION DEVICE AND ANALYSIS DEVICE
    5.
    发明申请
    BIOMOLECULE DETECTION METHOD, BIOMOLECULE DETECTION DEVICE AND ANALYSIS DEVICE 有权
    生物分子检测方法，生物分子检测装置和分析装置

    公开(公告)号：US20150308977A1

    公开(公告)日：2015-10-29

    申请号：US14418480

    申请日：2013-06-28

    Applicant: Hitachi High-Technologies Corporation

    Inventor： Toshiro Saito ,  Kenta Imai ,  Kyoko Imai ,  Kazumichi Imai ,  Itaru Yanagi ,  Yoshimitsu Yanagawa ,  Masahiko Ando ,  Naoshi Itabashi

    IPC: G01N27/414 ,  G01N33/543

    CPC classification number: G01N27/4145 ,  G01N27/4148 ,  G01N33/48721 ,  G01N33/543 ,  G01N33/54306 ,  G01N37/00

    Abstract: The present invention is intended to provide a method and a device for detecting a biomolecule with high sensitivity and high throughput over a wide dynamic range without requiring concentration adjustments of a sample in advance. The present invention specifically binds charge carriers to a detection target biomolecule, and detects the detection target biomolecule one by one by measuring a current change that occurs as the conjugate of the biomolecule and the charge carriers passes through a micropore. High-throughput detection of a biomolecule sample is possible with an array of detectors.

    Abstract translation: 本发明旨在提供一种用于在宽动态范围内检测具有高灵敏度和高产量的生物分子的方法和装置，而不需要预先对样品进行浓度调节。 本发明将电荷载体特异性地结合到检测目标生物分子，并且通过测量随着生物分子和电荷载体的共轭体通过微孔而发生的电流变化逐个检测检测目标生物分子。 生物分子样品的高通量检测是可能的与一组检测器。

    Plasma processing method and plasma processing apparatus
    6.
    发明授权
    Plasma processing method and plasma processing apparatus 有权
    等离子体处理方法和等离子体处理装置

    公开(公告)号：US09076637B2

    公开(公告)日：2015-07-07

    申请号：US14033338

    申请日：2013-09-20

    Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

    Inventor： Masahito Mori ,  Naoyuki Kofuji ,  Naoshi Itabashi

    IPC: C23F1/00 ,  H01J37/32 ,  C23F4/00 ,  H01L21/311 ,  H01L21/3213 ,  H01L29/51

    CPC classification number: H01J37/32798 ,  C23F4/00 ,  H01J37/32009 ,  H01J37/32183 ,  H01J37/32706 ,  H01L21/31116 ,  H01L21/31138 ,  H01L21/32136 ,  H01L21/32137 ,  H01L29/517

    Abstract: The invention provides a plasma processing apparatus and a dry etching method for etching a multilayered film structure having steps with high accuracy. The plasma processing apparatus comprises a vacuum reactor 107, a lower electrode 113 placed within a processing chamber of the vacuum reactor and having a wafer 112 to be etched mounted on the upper surface thereof, bias supplying units 118 and 120 for supplying high frequency power for forming a bias potential to the lower electrode 113, a gas supply means 111 for feeding reactive gas into the processing chamber, an electric field supplying means 101 through 103 for supplying a magnetic field for generating plasma in the processing chamber, and a control unit 127 for controlling the distribution of ion energy in the plasma being incident on the wafer 112 via the high frequency power.

    Abstract translation: 本发明提供一种用于蚀刻具有高精度步骤的多层膜结构的等离子体处理装置和干蚀刻方法。 等离子体处理装置包括真空反应器107，放置在真空反应器的处理室内的下部电极113，并且具有要在其上表面上安装的晶片112的偏压供给单元118和120，用于向 向下电极113形成偏置电位，用于将反应性气体供给到处理室中的气体供给装置111，用于在处理室中提供用于产生等离子体的磁场的电场供给装置101至103以及控制单元127 用于控制通过高频功率入射在晶片112上的等离子体中的离子能量的分布。

    BIOMOLECULE MEASURING DEVICE
    10.
    发明申请
    BIOMOLECULE MEASURING DEVICE 审中-公开
    生物分子测量装置

    公开(公告)号：US20160245777A1

    公开(公告)日：2016-08-25

    申请号：US15026657

    申请日：2014-10-02

    Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

    Inventor： Takayuki Kawahara ,  Yoshimitsu Yanagawa ,  Naoshi Itabashi ,  Riichiro Takemura

    IPC: G01N27/414

    CPC classification number: G01N27/4145 ,  G01N27/4148

    Abstract: To a biomolecule measuring apparatus, a semiconductor sensor for detecting ions generated by a reaction between a biomolecular sample and a reagent is set. The semiconductor sensor has a plurality of cells which are arranged on a semiconductor substrate, and each of which detects ions, and a plurality of readout wires. Each of the plurality of cells has an ISFET which has a floating gate and which detects ions, a first MOSFET M2 for amplifying an output from the ISFET, and a second MOSFET M3 which selectively transmits an output from the first MOSFET to a corresponding readout wire R1. Each of the plurality of cells is provided with a third MOSFET M1 which generates hot electrons in the ISFET and which injects a charge to the floating gate of the ISFET. Here, the second MOSFET and the third MOSFET are separately controlled.

    Abstract translation: 对于生物分子测定装置，设置用于检测由生物分子样品和试剂之间的反应产生的离子的半导体传感器。 半导体传感器具有布置在半导体衬底上的多个单元，每个单元检测离子，以及多条读出导线。 多个单元中的每一个具有ISFET，其具有浮置栅极并且检测离子，用于放大来自ISFET的输出的第一MOSFET M2和选择性地将来自第一MOSFET的输出传输到相应读出线的第二MOSFET M3 R1。 多个单元中的每一个都具有在ISFET中产生热电子并且向ISFET的浮置栅极注入电荷的第三MOSFET M1。 这里，分别控制第二MOSFET和第三MOSFET。

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