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公开(公告)号：US12117600B2
公开(公告)日：2024-10-15
申请号：US17442238
申请日：2020-03-26
CPC分类号： G02B21/0048 , G01N21/6458 , G02B21/0032 , G02B21/0076 , G02B21/16 , G02B26/0833 , G02B27/14
摘要： A confocal microscope unit according to an embodiment includes: a first subunit which includes a light source, a pinhole plate, and a photodetector; a second subunit which includes a light source, a pinhole plate, and a photodetector; a scan mirror which scans excitation light on a sample and guides fluorescence generated from the sample to the first and second subunits; a scan lens which guides the excitation light and guides the fluorescence to the scan mirror; and a main housing which is attachable to a connection port and to which the scan mirror, the scan lens, and the subunits are fixed, wherein the first subunit includes a dichroic mirror that separates the excitation light and fluorescence handled by the own unit from those handled by the second subunit.
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公开(公告)号：US11513075B2
公开(公告)日：2022-11-29
申请号：US16478859
申请日：2017-10-12
摘要： An observation device is an observation device observing an observation target and includes: an emission light source that generates emission light; a projection light source that generates projection light; a scanning mirror that scans the emission light and the projection light toward the observation target along the same optical path; a light guide optical system that guides detection target light generated in the observation target in accordance with emission of the emission light without it passing through the scanning mirror; an optical detector that detects the detection target light guided by the light guide optical system; and a control unit that controls an intensity of the projection light on the basis of a result of the detection of the detection target light.
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公开(公告)号：US10607900B2
公开(公告)日：2020-03-31
申请号：US16360424
申请日：2019-03-21
IPC分类号： H01L21/66 , B23K26/00 , B23K26/03 , B23K26/402 , B23K26/359 , B23K26/364 , B23K26/352 , B23K26/361 , B23K26/70 , B23K26/362 , G06T7/00 , H01L21/67 , H01L23/544 , B23K101/42 , B23K103/10 , B23K103/16 , G02B5/20
摘要： An inspection system includes a laser light source, an optical system for laser marking that irradiates a semiconductor device with laser light from a metal layer side, a control unit that controls the laser light source to control laser marking, a two-dimensional camera that detects light from the semiconductor device on a substrate side and outputs an optical reflection image, and an analysis unit that generates a pattern image of the semiconductor device, and the control unit controls the laser light source so that laser marking is performed until a mark image appears in a pattern image.
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公开(公告)号：US12078789B2
公开(公告)日：2024-09-03
申请号：US17442163
申请日：2020-03-26
CPC分类号： G02B21/0048 , G01N21/6458 , G02B21/0032 , G02B21/0076 , G02B21/16 , G02B26/0833 , G02B27/14
摘要： A confocal microscope unit according to an embodiment includes: a first subunit which includes a light source, a pinhole plate, and a photodetector; a second subunit which includes a light source, a pinhole plate, and a photodetector; a scan mirror which scans excitation light output from the first and second subunits on a sample via a microscope optical system and guides fluorescence generated from the sample in response to the excitation light and focused by the microscope optical system to the first and second subunits; and a main housing which is attachable to a connection port and to which the scan mirror, the first subunit, and the second subunit are fixed, wherein the first subunit and the second subunit are disposed in the main housing so that incident angles of two excitation lights to the scan mirror are displaced from each other by a predetermined angle.
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公开(公告)号：US10312166B2
公开(公告)日：2019-06-04
申请号：US15547858
申请日：2016-01-08
IPC分类号： H01L23/544 , H01L21/66 , B23K26/70 , B23K26/362 , G06T7/00 , H01L21/67 , B23K26/00 , B23K26/03 , B23K26/402 , B23K26/359 , B23K26/364 , B23K26/352 , G02B5/20 , B23K101/42 , B23K103/10 , B23K103/16
摘要： An inspection system includes a laser light source, an optical system for laser marking that irradiates a semiconductor device with laser light from a metal layer side, a control unit that controls the laser light source to control laser marking, a two-dimensional camera that detects light from the semiconductor device on a substrate side and outputs an optical reflection image, and an analysis unit that generates a pattern image of the semiconductor device, and the control unit controls the laser light source so that laser marking is performed until a mark image appears in a pattern image.
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