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8 条记录 (耗时 0.023 秒)

    Jet plasma process and apparatus
    1.
    发明授权
    Jet plasma process and apparatus 失效
    喷射等离子体工艺和设备

    公开(公告)号：US5464667A

    公开(公告)日：1995-11-07

    申请号：US291111

    申请日：1994-08-16

    申请人： Gunter A. Kohler ,  Seth M. Kirk ,  Gary J. Follett

    发明人： Gunter A. Kohler ,  Seth M. Kirk ,  Gary J. Follett

    IPC分类号： C23C4/04 ,  C23C4/12 ,  C23C16/26 ,  C23C16/50 ,  C23C16/513 ,  H01J37/32 ,  B05D3/06

    CPC分类号： H01J37/32009 ,  C23C16/26 ,  C23C16/50 ,  C23C16/513 ,  C23C4/04 ,  C23C4/137 ,  H01J37/32596

    摘要： A process and apparatus for the plasma deposition of a carbon-rich coating onto a substrate is provided. This method includes the steps of: providing a substrate in a vacuum chamber; and generating a carbon-rich plasma in the vacuum chamber by injecting a plasma gas into a hollow cathode slot system containing a cathode made of two electrode plates arranged parallel to each other, providing a sufficient voltage to create and maintain a carbon-rich plasma in the hollow cathode slot system, and maintaining a vacuum in the vacuum chamber sufficient for maintaining the plasma. The plasma is deposited on the substrate to form a carbon-rich coating.

    摘要翻译： 提供了一种用于将富碳涂层等离子体沉积到基底上的方法和装置。 该方法包括以下步骤：在真空室中提供衬底; 并通过将等离子体气体注入包含由彼此平行布置的两个电极板制成的阴极的空心阴极狭槽系统中，在真空室中产生富碳等离子体，提供足够的电压以产生并维持富含碳的等离子体 中空阴极槽系统，并且在真空室中保持足以维持等离子体的真空。 将等离子体沉积在基底上以形成富含碳的涂层。

    Surface characterization apparatus and method
    3.
    发明授权
    Surface characterization apparatus and method 失效

    公开(公告)号：US5053625A

    公开(公告)日：1991-10-01

    申请号：US606530

    申请日：1990-10-31

    申请人： Gary J. Follett

    发明人： Gary J. Follett

    IPC分类号： G01N1/28

    CPC分类号： G01N1/28

    摘要： An apparatus for conducting surface characterizations of sample materials comprises an enclosure defining first and second substantially isolated operating chambers or regions. The operating regions are separated by narrow channels, and are preferably differentially pumped. An elongate substrate extends between the first and second regions. During operation, a sample surface to be studied is prepared on the substrate in the first region, is transported into the second region, and is analyzed thereat. In a preferred embodiment a continuous loop and pulley arrangement is provided, for the substrate. Also, for a preferred embodiment the first region is divided into first and second isolated chambers, through which the substrate is extended. A method is provided, whereby a surface can be prepared and analyzed. According to the method, the sample is applied to a substrate in a first region, and the substrate is transported into a second isolated region, through an elongate narrow channel. Differential pumping facilitates isolation of environments in the various regions.

    Surface characterization apparatus and method
    6.
    发明授权
    Surface characterization apparatus and method 失效
    表面表征装置及方法

    公开(公告)号：US5001939A

    公开(公告)日：1991-03-26

    申请号：US228396

    申请日：1988-08-04

    申请人： Gary J. Follett

    发明人： Gary J. Follett

    IPC分类号： G01N23/227 ,  G01N1/28 ,  G01N1/32

    CPC分类号： G01N1/28

    摘要： An apparatus for conducting surface characterizations of sample materials comprises an enclosure defining first and second substantially isolated operating chambers or regions. The operating regions are separated by narrow channels, and are preferably differentially pumped. An elongate substrate extends between the first and second regions. During operation, a sample surface to be studied is prepared on the substrate in the first region, is transported into the second region, and is analyzed thereat. In a preferred embodiment a continuous loop and pulley arrangement is provided, for the substrate. Also, for a preferred embodiment the first region is divided into first and second isolated chambers, through which the substrate is extended. A method is provided, whereby a surface can be prepared and analyzed. According to the method, the sample is applied to a substrate in a first region, and the substrate is transported into a second isolated region, through an elongate narrow channel. Differential pumping facilitates isolation of environments in the various regions.

    摘要翻译： 用于进行样品材料的表面表征的装置包括限定第一和第二基本隔离的操作室或区域的外壳。 操作区域由窄通道分开，优选地是差分泵浦的。 细长衬底在第一和第二区域之间延伸。 在操作期间，在第一区域的基板上准备要研究的样品表面，将其输送到第二区域，并在其上进行分析。 在一个优选实施例中，为衬底提供连续的环和滑轮装置。 此外，对于优选实施例，第一区域被分成第一和第二隔离室，衬底通过其延伸。 提供了一种可以制备和分析表面的方法。 根据该方法，将样品施加到第一区域中的基底，并且通过细长的窄通道将基底输送到第二隔离区域。 差分泵浦有利于隔离各个区域的环境。