公开(公告)号：US20170205631A1

公开(公告)日：2017-07-20

申请号：US15478683

申请日：2017-04-04

Applicant: Gigaphoton Inc.

Inventor： Yoshinobu WATABE ,  Miwa IGARASHI ,  Koji ASHIKAWA

IPC: G02B27/10 ,  H01S3/101 ,  H01S3/00 ,  G02B27/09 ,  H01S3/03 ,  H01S3/225

CPC classification number: G02B27/1086 ,  G02B27/0972 ,  H01S3/005 ,  H01S3/03 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/101 ,  H01S3/105 ,  H01S3/225

Abstract: A narrow band laser apparatus may include: a laser chamber; a line narrow module configured to narrow a band width of a laser beam outputted from the laser chamber and return the laser beam to the laser chamber, the line narrow module including a grating; a housing accommodating the line narrow module; three mounts fixed to the housing; and a housing moving device configured to support the housing and the line narrow module by supporting each of the three mounts and move the line narrow module by moving the housing with respect to the laser chamber in a direction substantially perpendicular to a dispersion plane of the grating.

公开(公告)号：US20240146011A1

公开(公告)日：2024-05-02

申请号：US18408777

申请日：2024-01-10

Applicant: Gigaphoton Inc.

Inventor： Koji ASHIKAWA ,  Shinichi MATSUMOTO

IPC: H01S3/034 ,  H01S3/036 ,  H01S3/038 ,  H01S3/134 ,  H01S3/225

CPC classification number: H01S3/034 ,  H01S3/036 ,  H01S3/038 ,  H01S3/134 ,  H01S3/225

Abstract: A gas laser device includes a chamber device including electrodes at an inside thereof to be filled with laser gas and configured to output, through a window to an outside thereof, light generated from the laser gas when a voltage is applied to the electrodes; a mirror arranged at the outside of the chamber device and configured to reflect at least a part of the light output through the window; a holding portion holding the mirror; a support member configured to support the holding portion to be movable along a plane perpendicular to an optical axis of the light output through the window; a moving mechanism configured to move the holding portion with respect to the support member along the plane; and an angle maintaining mechanism configured to maintain an inclination angle of the holding portion with respect to the support member at a predetermined angle.

公开(公告)号：US20210016390A1

公开(公告)日：2021-01-21

申请号：US17061796

申请日：2020-10-02

Applicant: Gigaphoton Inc.

Inventor： Koji ASHIKAWA

IPC: B23K26/0622

Abstract: An optical pulse stretcher includes a separation optical element configured to separate pulsed laser light incident on a first surface thereof into first transmitted light and first reflected light, a reflective optical system configured to guide the first reflected light to be incident on a second surface of the separation optical element that is the surface opposite the first surface, and a holding member that has a through hole having an opening area smaller than the area of a reflective surface of a reflective optical element provided in the reflective optical system, is disposed on the rear side of the reflective optical element, and is configured to hold the reflective optical element.

公开(公告)号：US20170093119A1

公开(公告)日：2017-03-30

申请号：US15379192

申请日：2016-12-14

Applicant: Gigaphoton Inc.

Inventor： Akiyoshi SUZUKI ,  Osamu WAKABAYASHI ,  Masaki ARAKAWA ,  Koji ASHIKAWA ,  Yasuhiro KAMBA

IPC: H01S3/23 ,  H01S3/00 ,  G02B27/12 ,  B23K26/00 ,  H01L21/67 ,  H01L21/02 ,  H01L27/12 ,  H01S3/081 ,  G02B27/10

CPC classification number: H01S3/23 ,  B23K26/0006 ,  B23K26/032 ,  B23K26/0608 ,  B23K26/0622 ,  B23K26/082 ,  B23K26/352 ,  B23K26/707 ,  B23K2101/40 ,  B23K2103/50 ,  B23K2103/56 ,  G02B27/106 ,  G02B27/123 ,  G02B27/126 ,  H01L21/02532 ,  H01L21/02592 ,  H01L21/02686 ,  H01L21/67115 ,  H01L27/1285 ,  H01S3/0071 ,  H01S3/081 ,  H01S3/225 ,  H01S3/2383

Abstract: A laser system may include a plurality of laser apparatuses, a beam delivery device configured to bundle pulse laser beams emitted from respective laser apparatuses of the plurality of laser apparatuses to emit a bundled laser beam, and a controller configured to control operated laser apparatuses of the plurality of laser apparatuses such that, at a change in a number representing how many laser apparatuses are operated, a beam parameter of the bundled laser beam emitted from the beam delivery device approaches a beam parameter of the bundled laser beam emitted before the change.