公开(公告)号：US09708727B2

公开(公告)日：2017-07-18

申请号：US14684355

申请日：2015-04-11

申请人： GLOBALWAFERS CO., LTD.

发明人： Lu-Chung Chuang ,  Chih-Chieh Yu ,  Wen-Chieh Lan ,  Jiunn-Yih Chyan ,  I-Ching Li ,  Wen-Ching Hsu

IPC分类号： C30B15/30 ,  C30B11/00 ,  C30B11/06 ,  C30B29/06

CPC分类号： C30B11/007 ,  C30B11/065 ,  C30B15/305 ,  C30B29/06 ,  Y10T117/1024

摘要： A stirring apparatus of an ingot casting furnace includes a rotating shaft and at least one fin. The fin is provided onto the rotating shaft, and has a first edge, a second edge of unequal length provided correspondingly, and a third edge connecting the first and the second edges. The rotating shaft can be driven to rotate, which consequently drives the at least one fin to stir materials in a crucible. The length of the first edge is different from that of the second edge in order for the materials in the crucible can be mixed with dopants more uniformly during the stirring process to produce ingots of stable quality.

公开(公告)号：US10053797B2

公开(公告)日：2018-08-21

申请号：US14675220

申请日：2015-03-31

申请人： GLOBALWAFERS CO., LTD.

发明人： Lu-Chung Chuang ,  Chih-Chieh Yu ,  Wen-Chieh Lan ,  I-Ching Li ,  Wen-Ching Hsu ,  Jiunn-Yih Chyan

IPC分类号： C30B35/00 ,  C30B15/10 ,  C30B15/14 ,  C30B11/00

CPC分类号： C30B35/002 ,  C30B11/002 ,  C30B15/10 ,  C30B15/14 ,  C30B35/00 ,  Y10T117/1068 ,  Y10T117/1092

摘要： A crystal growth apparatus includes a crucible, a heating device, a thermal insulation cover, and a driving device. The crucible contains materials to be melted, wherein the heating device heats the crucible to melt the materials; the thermal insulation cover is provided upon the materials, wherein the thermal insulation cover includes a main body, which has a bottom surface facing an interior of the crucible, and a insulating member being provided at the main body; the driving device moves the thermal insulation cover towards or away from the materials, whereby, the thermal insulation cover effectively blocks heat conduction and heat convection, which prevents thermal energy from escaping out of the crucible.

公开(公告)号：US20160312379A1

公开(公告)日：2016-10-27

申请号：US15076683

申请日：2016-03-22

申请人： GlobalWafers Co., Ltd.

发明人： Chun-Hung Chen ,  Wen-Chieh Lan ,  Masami Nakanishi ,  Chi-Tse Lee ,  Ying-Ru Shih ,  Wen-Ching Hsu

IPC分类号： C30B15/20 ,  C30B15/30 ,  C30B29/06 ,  G01B11/14

CPC分类号： C30B29/06 ,  C30B15/26 ,  G01B11/14 ,  G01F23/00 ,  G01F23/292

摘要： A melt gap measuring apparatus is adapted to measure the gap between the bottom of the heat insulating cover and the surface of the raw material melt inside a crucible. The melt gap measuring apparatus includes a first light-guiding probe having a first upper side and a first bottom side which are opposite to each other. The first upper side is exposed to an inner wall of the heat insulating cover, and the first bottom side protrudes from the bottom side of the heat insulating cover. An image capturing device is disposed above the heat insulating cover to capture the image of the first upper side. Moreover, a crystal growth apparatus and a method of measuring the melt gap are also provided.

摘要翻译： 熔融间隙测量装置适于测量隔热盖的底部和坩埚内的原料熔体表面之间的间隙。 熔融物间隙测量装置包括具有彼此相对的第一上侧和第一底侧的第一导光探针。 第一上侧暴露于绝热罩的内壁，第一底面从绝热罩的底面突出。 图像捕获装置设置在隔热盖上方以捕获第一上侧的图像。 此外，还提供了晶体生长装置和测量熔体间隙的方法。