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    Electrodeposition systems and methods that minimize anode and/or plating solution degradation
    1.
    发明授权
    Electrodeposition systems and methods that minimize anode and/or plating solution degradation 有权

    公开(公告)号：US10041183B2

    公开(公告)日：2018-08-07

    申请号：US15482938

    申请日：2017-04-10

    Applicant: GlobalFoundries Inc.

    Inventor： Charles L. Arvin ,  Harry D. Cox ,  Eric D. Perfecto

    IPC: C25D21/12 ,  C25D5/18 ,  C25D17/10

    Abstract: Disclosed are electrodeposition systems and methods wherein at least three electrodes are placed in a container containing a plating solution. The electrodes are connected to a polarity-switching unit and include a first electrode, a second electrode and a third electrode. The polarity-switching unit establishes a constant polarity state between the first and second electrodes in the solution during an active plating mode, wherein the first electrode has a negative polarity and the second electrode has a positive polarity, thereby allowing a plated layer to form on a workpiece at the first electrode. The polarity-switching unit further establishes an oscillating polarity state between the second and third electrodes during a non-plating mode (i.e., when the first electrode is removed from the plating solution), wherein the second electrode and the third electrode have opposite polarities that switch at regular, relatively fast, intervals, thereby limiting degradation of the second electrode and/or the plating solution.

    ELECTRODEPOSITION SYSTEMS AND METHODS THAT MINIMIZE ANODE AND/OR PLATING SOLUTION DEGRADATION
    6.
    发明申请
    ELECTRODEPOSITION SYSTEMS AND METHODS THAT MINIMIZE ANODE AND/OR PLATING SOLUTION DEGRADATION 审中-公开

    公开(公告)号：US20170211199A1

    公开(公告)日：2017-07-27

    申请号：US15482938

    申请日：2017-04-10

    Applicant: GlobalFoundries Inc.

    Inventor： Charles L. Arvin ,  Harry D. Cox ,  Eric D. Perfecto

    IPC: C25D5/18 ,  C25D17/10 ,  C25D21/12

    CPC classification number: C25D5/18 ,  C25D17/10 ,  C25D21/12

    Abstract: Disclosed are electrodeposition systems and methods wherein at least three electrodes are placed in a container containing a plating solution. The electrodes are connected to a polarity-switching unit and include a first electrode, a second electrode and a third electrode. The polarity-switching unit establishes a constant polarity state between the first and second electrodes in the solution during an active plating mode, wherein the first electrode has a negative polarity and the second electrode has a positive polarity, thereby allowing a plated layer to form on a workpiece at the first electrode. The polarity-switching unit further establishes an oscillating polarity state between the second and third electrodes during a non-plating mode (i.e., when the first electrode is removed from the plating solution), wherein the second electrode and the third electrode have opposite polarities that switch at regular, relatively fast, intervals, thereby limiting degradation of the second electrode and/or the plating solution.

    Electrodeposition systems and methods that minimize anode and/or plating solution degradation
    7.
    发明授权
    Electrodeposition systems and methods that minimize anode and/or plating solution degradation 有权

    公开(公告)号：US09689084B2

    公开(公告)日：2017-06-27

    申请号：US14284932

    申请日：2014-05-22

    Applicant: GLOBALFOUNDRIES INC.

    Inventor： Charles L. Arvin ,  Harry D. Cox ,  Eric D. Perfecto

    IPC: C25D21/12 ,  C25D17/10

    CPC classification number: C25D5/18 ,  C25D17/10 ,  C25D21/12

    Abstract: Disclosed are electrodeposition systems and methods wherein at least three electrodes are placed in a container containing a plating solution. The electrodes are connected to a polarity-switching unit and include a first electrode, a second electrode and a third electrode. The polarity-switching unit establishes a constant polarity state between the first and second electrodes in the solution during an active plating mode, wherein the first electrode has a negative polarity and the second electrode has a positive polarity, thereby allowing a plated layer to form on a workpiece at the first electrode. The polarity-switching unit further establishes an oscillating polarity state between the second and third electrodes during a non-plating mode (i.e., when the first electrode is removed from the plating solution), wherein the second electrode and the third electrode have opposite polarities that switch at regular, relatively fast, intervals, thereby limiting degradation of the second electrode and/or the plating solution.

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