公开(公告)号：US20170092803A1

公开(公告)日：2017-03-30

申请号：US15290054

申请日：2016-10-11

申请人： FIRST SOLAR, INC.

发明人： John Barden ,  Rick C. Powell

IPC分类号： H01L31/18 ,  H01L31/046 ,  C23C16/448 ,  H01L31/0296

CPC分类号： H01L31/1828 ,  C23C14/228 ,  C23C14/24 ,  C23C14/243 ,  C23C14/56 ,  C23C16/448 ,  H01L21/02557 ,  H01L21/02562 ,  H01L31/02963 ,  H01L31/046 ,  Y02E10/543 ,  Y02P70/521

摘要： An improved feeder system and method for continuous vapor transport deposition that includes at least two vaporizers couple to a common distributor through an improved seal for separately vaporizing and collecting at least any two vaporizable materials for deposition as a material layer on a substrate. Multiple vaporizer provide redundancy and allow for continuous deposition during vaporizer maintenance and repair.

公开(公告)号：US10749068B2

公开(公告)日：2020-08-18

申请号：US16185966

申请日：2018-11-09

申请人： First Solar, Inc.

发明人： John Barden ,  Rick C. Powell

IPC分类号： C23C16/00 ,  H01L31/18 ,  H01L21/02 ,  C23C16/448 ,  C23C14/22 ,  C23C14/24 ,  C23C14/56 ,  H01L31/046 ,  H01L31/0296

摘要： An improved feeder system and method for continuous vapor transport deposition that includes at least two vaporizers couple to a common distributor through an improved seal for separately vaporizing and collecting at least any two vaporizable materials for deposition as a material layer on a substrate. Multiple vaporizer provide redundancy and allow for continuous deposition during vaporizer maintenance and repair.

公开(公告)号：US09490120B2

公开(公告)日：2016-11-08

申请号：US13671195

申请日：2012-11-07

申请人： FIRST SOLAR, INC.

发明人： John Barden ,  Rick C. Powell

IPC分类号： C23C16/00 ,  H01L21/02 ,  C23C16/448 ,  C23C14/22 ,  C23C14/24 ,  C23C14/56 ,  H01L31/18

CPC分类号： H01L31/1828 ,  C23C14/228 ,  C23C14/24 ,  C23C14/243 ,  C23C14/56 ,  C23C16/448 ,  H01L21/02557 ,  H01L21/02562 ,  H01L31/02963 ,  H01L31/046 ,  Y02E10/543 ,  Y02P70/521

摘要： An improved feeder system and method for continuous vapor transport deposition that includes at least two vaporizers couple to a common distributor through an improved seal for separately vaporizing and collecting at least any two vaporizable materials for deposition as a material layer on a substrate. Multiple vaporizer provide redundancy and allow for continuous deposition during vaporizer maintenance and repair.

摘要翻译： 一种用于连续蒸气传输沉积的改进的馈送系统和方法，其包括通过改进的密封件耦合到公共分配器的至少两个蒸发器，用于分别蒸发并收集至少任何两种可蒸发材料，以沉积作为基底上的材料层。 多个蒸发器提供冗余并允许蒸发器维护和修理期间的连续沉积。

公开(公告)号：US20240247363A1

公开(公告)日：2024-07-25

申请号：US18628285

申请日：2024-04-05

申请人： First Solar, Inc.

发明人： Zhigang Ban ,  John Barden ,  Jerry Drennan ,  Litian Liu ,  Rick Powell ,  Nirav Vora ,  Yaojun Xu

IPC分类号： C23C14/24

CPC分类号： C23C14/243

摘要： Distributor assemblies for vapor transport deposition systems, and methods of conducting vapor transport deposition, are described.

公开(公告)号：US20180323332A1

公开(公告)日：2018-11-08

申请号：US16040173

申请日：2018-07-19

申请人： First Solar, Inc.

发明人： John Barden ,  Changming Jin ,  Feng Liao ,  Rick C. Powell ,  Gang Xiong

IPC分类号： H01L31/18 ,  C23C14/58 ,  C23C14/02 ,  H01L21/677 ,  H01L21/67 ,  C23C14/22 ,  C23C14/06

CPC分类号： H01L31/18 ,  C23C14/024 ,  C23C14/0629 ,  C23C14/228 ,  C23C14/58 ,  H01L21/67173 ,  H01L21/6776 ,  H01L31/1828 ,  Y02E10/543 ,  Y02P70/521

摘要： A vapor transport deposition system and method that includes a vaporizer and distributor unit and at least one auxiliary process unit for integrating thin-film layer deposition with one or more pre- or post-deposition processes.

公开(公告)号：US20130203202A1

公开(公告)日：2013-08-08

申请号：US13754535

申请日：2013-01-30

申请人： FIRST SOLAR, INC.

发明人： Gang Xiong ,  John Barden ,  Feng Liao ,  Rick C. Powell ,  Changming Jin

IPC分类号： H01L31/18

CPC分类号： H01L31/18 ,  C23C14/024 ,  C23C14/0629 ,  C23C14/228 ,  C23C14/58 ,  H01L21/67173 ,  H01L21/6776 ,  H01L31/1828 ,  Y02E10/543 ,  Y02P70/521

摘要： vapor transport deposition system and method that includes a vaporizer and distributor unit and at least one auxiliary process unit for integrating thin-film layer deposition with one or more pre- or post-deposition processes.

摘要翻译： 蒸气输送沉积系统和方法，其包括蒸发器和分配器单元以及用于将薄膜层沉积与一个或多个沉积前或沉积后工艺集成的至少一个辅助处理单元。

公开(公告)号：US20210301387A1

公开(公告)日：2021-09-30

申请号：US17267189

申请日：2019-08-09

申请人： First Solar, Inc.

发明人： John Barden ,  Rick Powell ,  Aaron Roggelin ,  Nirav Vora

IPC分类号： C23C14/22 ,  C23C14/26 ,  C23C14/56 ,  C23C16/448

摘要： Distributor assemblies for vapor transport deposition systems, and methods of conducting vapor transport deposition, are described.

公开(公告)号：US20190081199A1

公开(公告)日：2019-03-14

申请号：US16185966

申请日：2018-11-09

申请人： First Solar, Inc.

发明人： John Barden ,  Rick C. Powell

IPC分类号： H01L31/18 ,  C23C14/22 ,  C23C14/24 ,  C23C16/448 ,  H01L21/02 ,  H01L31/0296 ,  H01L31/046 ,  C23C14/56

摘要： An improved feeder system and method for continuous vapor transport deposition that includes at least two vaporizers couple to a common distributor through an improved seal for separately vaporizing and collecting at least any two vaporizable materials for deposition as a material layer on a substrate. Multiple vaporizer provide redundancy and allow for continuous deposition during vaporizer maintenance and repair.

公开(公告)号：US10147838B2

公开(公告)日：2018-12-04

申请号：US15290054

申请日：2016-10-11

申请人： FIRST SOLAR, INC.

发明人： John Barden ,  Rick C. Powell

IPC分类号： C23C16/448 ,  H01L31/18 ,  H01L21/02 ,  C23C14/22 ,  C23C14/24 ,  C23C14/56 ,  H01L31/046 ,  H01L31/0296

摘要： An improved feeder system and method for continuous vapor transport deposition that includes at least two vaporizers coupled to a common distributor through an improved seal for separately vaporizing and collecting at least any two vaporizable materials for deposition as a material layer on a substrate. Multiple vaporizers provide redundancy and allow for continuous deposition during vaporizer maintenance and repair.

公开(公告)号：US20130130475A1

公开(公告)日：2013-05-23

申请号：US13671195

申请日：2012-11-07

申请人： First Solar, Inc.

发明人： John Barden ,  Rick C. Powell

IPC分类号： H01L21/02 ,  C23C16/448

CPC分类号： H01L31/1828 ,  C23C14/228 ,  C23C14/24 ,  C23C14/243 ,  C23C14/56 ,  C23C16/448 ,  H01L21/02557 ,  H01L21/02562 ,  H01L31/02963 ,  H01L31/046 ,  Y02E10/543 ,  Y02P70/521

摘要： An improved feeder system and method for continuous vapor transport deposition that includes at least two vaporizers couple to a common distributor through an improved seal for separately vaporizing and collecting at least any two vaporizable materials for deposition as a material layer on a substrate. Multiple vaporizer provide redundancy and allow for continuous deposition during vaporizer maintenance and repair.

摘要翻译： 一种用于连续蒸气传输沉积的改进的馈送系统和方法，其包括通过改进的密封件耦合到公共分配器的至少两个蒸发器，用于分别蒸发并收集至少任何两种可蒸发材料，以沉积作为基底上的材料层。 多个蒸发器提供冗余并允许蒸发器维护和修理期间的连续沉积。