Invention Grant
- Patent Title: Vapor transport deposition method and system for material co-deposition
- Patent Title (中): 气相沉积方法和材料共沉积系统
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Application No.: US13671195Application Date: 2012-11-07
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Publication No.: US09490120B2Publication Date: 2016-11-08
- Inventor: John Barden , Rick C. Powell
- Applicant: FIRST SOLAR, INC.
- Applicant Address: US OH Perrysburg
- Assignee: FIRST SOLAR, INC.
- Current Assignee: FIRST SOLAR, INC.
- Current Assignee Address: US OH Perrysburg
- Agency: Blank Rome LLP
- Main IPC: C23C16/00
- IPC: C23C16/00 ; H01L21/02 ; C23C16/448 ; C23C14/22 ; C23C14/24 ; C23C14/56 ; H01L31/18
Abstract:
An improved feeder system and method for continuous vapor transport deposition that includes at least two vaporizers couple to a common distributor through an improved seal for separately vaporizing and collecting at least any two vaporizable materials for deposition as a material layer on a substrate. Multiple vaporizer provide redundancy and allow for continuous deposition during vaporizer maintenance and repair.
Public/Granted literature
- US20130130475A1 VAPOR TRANSPORT DEPOSITION METHOD AND SYSTEM FOR MATERIAL CO-DEPOSITION Public/Granted day:2013-05-23
Information query
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