公开(公告)号：US20220317067A1

公开(公告)日：2022-10-06

申请号：US17219627

申请日：2021-03-31

Applicant: FEI Company

Inventor： Bart BUIJSSE ,  Hans RAAIJMAKERS ,  Peter Christiaan TIEMEIJER

IPC: G01N23/2055 ,  G01N23/207 ,  G01N23/20025

Abstract: Molecular structure of a crystal may be solved based on at least two diffraction tilt series acquired from a sample. The two diffraction tilt series include multiple diffraction patterns of at least one crystal of the sample acquired at different electron doses. In some examples, the two diffraction tilt series are acquired at different magnifications.

公开(公告)号：US20240029993A1

公开(公告)日：2024-01-25

申请号：US18474982

申请日：2023-09-26

Applicant: FEI Company

Inventor： Maarten BISCHOFF ,  Peter Christiaan TIEMEIJER ,  Tjerk Gerrit SPANJER ,  Stan Johan Pieter KONINGS

IPC: H01J37/153 ,  H01J37/147 ,  H01J37/20 ,  H01J37/22 ,  H01J37/28

CPC classification number: H01J37/153 ,  H01J37/1478 ,  H01J37/20 ,  H01J37/222 ,  H01J37/28 ,  H01J2237/1516 ,  H01J2237/1534 ,  H01J2237/202 ,  H01J2237/221 ,  H01J2237/2802

Abstract: A method for reducing throughput time in a sample image acquisition session in transmission electron microscopy comprises: providing an electron microscope comprising a sample component, a beam generator, an adjusting component, and a filtering component; securing a sample by using the sample component; generating an electron beam by using the beam generator; generating an image beam by directing the beam to the sample component; adjusting at least one of the beam and the image beam by using the adjusting component to obtain at least one modified image beam, wherein the adjusting is performed in such a way, that off-axial aberration of the modified image beam is minimized; and filtering the modified image beam via the filtering component to reduce resolution-deteriorating effect of chromatic aberration on the modified image beam resulting from the adjusting of the at least one of the beam and the image beam.

公开(公告)号：US20190311880A1

公开(公告)日：2019-10-10

申请号：US15946177

申请日：2018-04-05

Applicant: FEI Company

Inventor： Peter Christiaan TIEMEIJER

IPC: H01J37/24 ,  H01J37/26 ,  H01J37/285

Abstract: Adjustable resolution electron energy loss spectroscopy methods and apparatus are disclosed herein. An example method includes operating an electron microscope in a first state, the first state including operating a source of the electron microscope at a first temperature, obtaining, by the electron microscope, a first EELS spectrum of a sample at a first resolution, the first resolution based on the first temperature, operating the electron microscope in a second state, the second state including operating the source of the electron microscope at a second temperature, the second temperature different than the first temperature, and obtaining, by the electron microscope, a second EELS spectrum of the sample at a second resolution, the second resolution based on the second temperature, wherein the second resolution is different than the first resolution.

公开(公告)号：US20230223231A1

公开(公告)日：2023-07-13

申请号：US18159261

申请日：2023-01-25

Applicant: FEI Company

Inventor： Maarten BISCHOFF ,  Peter Christiaan TIEMEIJER ,  Tjerk Gerrit SPANJER ,  Stan Johan Pieter KONINGS

IPC: H01J37/153 ,  H01J37/22 ,  H01J37/28 ,  H01J37/147 ,  H01J37/20

CPC classification number: H01J37/153 ,  H01J37/222 ,  H01J37/28 ,  H01J37/1478 ,  H01J37/20 ,  H01J2237/202 ,  H01J2237/1516 ,  H01J2237/221 ,  H01J2237/1534 ,  H01J2237/2802

Abstract: A method for electron microscopy comprises: adjusting at least one of an electron beam and an image beam in such a way that off-axial aberrations inflicted on at least one of the electron beam and the image beam are minimized, the adjusting performed by using a beam adjusting component to obtain at least one modified image beam, wherein the adjusting comprises applying both shifting and tilting to at least one of the electron beam and the image beam and wherein the amount of tilting of at least one of the electron beam and the image beam depends on the amount of shifting of at least one of the electron beam and the image beam respectively and wherein the amount of tilting is computed based on at least one of coma and astigmatism introduced as a consequence of the shift.

公开(公告)号：US20230005733A1

公开(公告)日：2023-01-05

申请号：US17363641

申请日：2021-06-30

Applicant: FEI Company

Inventor： Arthur Reinout HARTONG ,  Alexander HENSTRA ,  Sorin LAZAR ,  Peter Christiaan TIEMEIJER

IPC: H01J49/46

Abstract: An energy spectrometer with dynamic focus for a transmission electron microscope (TEM) is disclosed herein. An example energy spectrometer and TEM at least includes a charged particle column including a projection system arranged after a sample plane, the projection system is operated in a first configuration; an energy spectrometer coupled to the charged particle column to acquire one or more energy loss spectra. The energy spectrometer including a dispersive element, a bias tube, optics for magnifying the energy loss spectrum and for correcting aberrations, and a detector arranged conjugate to a spectrum plane of the energy spectrometer, wherein the energy spectrometer further includes an optical element electrically biased to refocus at least a portion of a spectrum onto the detector, and wherein the value of the electrical bias is at least partially based on the first configuration of the charged particle column.

公开(公告)号：US20240194466A1

公开(公告)日：2024-06-13

申请号：US18076813

申请日：2022-12-07

Applicant: FEI Company

Inventor： Peter Christiaan TIEMEIJER ,  Alexander HENSTRA

IPC: H01J49/00 ,  H01J49/44

CPC classification number: H01J49/0036 ,  H01J49/44

Abstract: Methods and systems for automatically tuning an EELS spectrometer according to the present disclosure include obtaining an initial measurement of an EELS spectrum, generating an simulated EELS spectrum fit to the initial measurement of the EELS spectrum, and estimating one or more values of one or more aberration parameters based on the simulated EELS spectrum. Then, using the value(s) of the aberration parameter(s) to tune the optical elements of the EELS spectrometer to remove and/or reduce aberrations in the EELS system.

公开(公告)号：US20230101108A1

公开(公告)日：2023-03-30

申请号：US17490522

申请日：2021-09-30

Applicant: FEI Company

Inventor： Ali MOHAMMADI-GHEIDARI ,  Peter Christiaan TIEMEIJER ,  Alexander HENSTRA ,  Tomas RADLICKA

IPC: H01J37/153 ,  H01J37/28 ,  H01J37/145 ,  H01J37/147

Abstract: An electron optical module for providing an off-axial electron beam with a tunable coma, according to the present disclosure includes a structure positioned downstream of an electron source and an electron lens assembly positioned between the structure and the electron source. The structure generates a decelerating electric field, and is positioned to prevent the passage of electrons along the optical axis of the electron lens assembly. The electron optical module further includes a micro-lens that is not positioned on the optical axis of the electron lens assembly and is configured to apply a lensing effect to an off-axial election beam. Aberrations applied to the off-axial electron beam by the micro-lens and the electron lens assembly combine so that a coma of the off-axial beam has a desired value in a downstream plane.

公开(公告)号：US20210272767A1

公开(公告)日：2021-09-02

申请号：US17253097

申请日：2018-12-20

Applicant: FEI Company

Inventor： Maarten BISCHOFF ,  Peter Christiaan TIEMEIJER ,  Tjerk Gerrit SPANJER ,  Stan Johan Pieter KONINGS

IPC: H01J37/153 ,  H01J37/20 ,  H01J37/22 ,  H01J37/147 ,  H01J37/28

Abstract: The invention relates to a method for electron microscopy. The method comprises providing an electron microscope, generating an electron beam and an image beam, adjusting one of the beam and of the beam and the image beam to reduce off-axial aberrations and correcting a diffraction pattern of the resulting modified beam. The invention also relates to a method for reducing throughput time in a sample image acquisition session in transmission electron microscopy. The method comprises providing an electron microscope, generating a beam and an image beam, adjusting one of the two to reduce off-axial aberrations and filtering the resulting modified image beam. The invention further relates to an electron microscope and to a non-transient computer-readable medium with a computer program for carrying out the methods.