公开(公告)号：US20220317066A1

公开(公告)日：2022-10-06

申请号：US17217103

申请日：2021-03-30

申请人： FEI Company

发明人： Bart BUIJSSE ,  Jaydeep Sanjay BELAPURE ,  Alexander HENSTRA ,  Michael Patrick JANUS ,  Stefano VESPUCCI

IPC分类号： G01N23/2055 ,  G01N23/20025 ,  G01N23/20058 ,  H01J37/147 ,  H01J37/22 ,  H01J37/28

摘要： Crystallographic information of crystalline sample can be determined from one or more three-dimensional diffraction pattern datasets generated based on diffraction patterns collected from multiple crystals. The crystals for diffraction pattern acquisition may be selected based on a sample image. At a location of each selected crystal, multiple diffraction patterns of the crystal are acquired at different angles of incidence by tilting the electron beam, wherein the sample is not rotated while the electron beam is directed at the selected crystal.

公开(公告)号：US20230298853A1

公开(公告)日：2023-09-21

申请号：US18321442

申请日：2023-05-22

申请人： FEI Company

发明人： Bart BUIJSSE ,  Bart Jozef JANSSEN

IPC分类号： H01J37/26 ,  H01J37/295

CPC分类号： H01J37/265 ,  H01J37/295 ,  H01J2237/04

摘要： Method and system for generating a diffraction image comprises acquiring multiple frames from a direct-detection detector responsive to irradiating a sample with an electron beam. Multiple diffraction peaks in the multiple frames are identified. A first dose rate of at least one diffraction peak in the identified diffraction peaks is estimated in the counting mode. If the first dose rate is not greater than a threshold dose rate, a diffraction image including the diffraction peak is generated by counting electron detection events. Values of pixels belonging to the diffraction peak are determined with a first set of counting parameter values corresponding to a first coincidence area. Values of pixels not belonging to any of the multiple diffraction peaks are determined using a second, set of counting parameter values corresponding to a second, different, coincidence area.

公开(公告)号：US20240077436A1

公开(公告)日：2024-03-07

申请号：US17939932

申请日：2022-09-07

申请人： FEI Company

发明人： Stefano VESPUCCI ,  Bart BUIJSSE

IPC分类号： G01N23/2055 ,  G01N23/20058

CPC分类号： G01N23/2055 ,  G01N23/20058

摘要： The crystal structure is determined based on one or more second electron diffraction patterns acquired at selected zone axes at which the strength of dynamical effect is strong. The zone axes are selected by ranking the accessible zone axes determined from multiple first electron diffraction patterns.

公开(公告)号：US20230020957A1

公开(公告)日：2023-01-19

申请号：US17374459

申请日：2021-07-13

申请人： FEI Company

发明人： Bart BUIJSSE ,  Bart Jozef JANSSEN

IPC分类号： H01J37/26 ,  H01J37/295

摘要： Method and system for generating a diffraction image comprises acquiring multiple frames from a direct-detection detector responsive to irradiating a sample with an electron beam. Multiple diffraction peaks in the multiple frames are identified. A first dose rate of at least one diffraction peak in the identified diffraction peaks is estimated in the counting mode. If the first dose rate is not greater than a threshold dose rate, a diffraction image including the diffraction peak is generated by counting electron detection events. Values of pixels belonging to the diffraction peak are determined with a first set of counting parameter values corresponding to a first coincidence area. Values of pixels not belonging to any of the multiple diffraction peaks are determined using a second, set of counting parameter values corresponding to a second, different, coincidence area.

公开(公告)号：US20220317067A1

公开(公告)日：2022-10-06

申请号：US17219627

申请日：2021-03-31

申请人： FEI Company

发明人： Bart BUIJSSE ,  Hans RAAIJMAKERS ,  Peter Christiaan TIEMEIJER

IPC分类号： G01N23/2055 ,  G01N23/207 ,  G01N23/20025

摘要： Molecular structure of a crystal may be solved based on at least two diffraction tilt series acquired from a sample. The two diffraction tilt series include multiple diffraction patterns of at least one crystal of the sample acquired at different electron doses. In some examples, the two diffraction tilt series are acquired at different magnifications.