Process for manufacturing coated plastic body
    1.
    发明授权
    Process for manufacturing coated plastic body 失效
    制造涂层塑料体的工艺

    公开(公告)号:US06383573B1

    公开(公告)日:2002-05-07

    申请号:US09572089

    申请日:2000-05-17

    IPC分类号: C08J718

    CPC分类号: C23C14/022 C23C16/0245

    摘要: A process is provided for producing coated synthetic bodies during which, before the coating, the surface to be coated is subjected to a pretreatment in an excited gas atmosphere. The surface is then coated. The gas atmosphere is predominantly formed of a noble gas and nitrogen and/or hydrogen, and the ionic energy in the gas atmosphere and in the are of the surface to be coated is not more than 50 eV. The ionic energy is selected to be not more than 20 eV, preferable not more than 10 eV. The gas atmosphere is excited by means of a plasma discharge or by means of UV radiation.

    摘要翻译: 提供了一种制造涂覆合成物体的方法,其中在涂覆之前,待被涂覆的表面在受激气体气氛中进行预处理。 然后涂覆表面。 气体气氛主要由惰性气体和氮气和/或氢气形成,气体气氛中和被涂覆表面的离子能量不超过50eV。 离子能量选择为不超过20eV,优选不大于10eV。 通过等离子体放电或通过紫外线辐射来激发气体气氛。

    Process and apparatus for generating and igniting a low-voltage
    2.
    发明授权
    Process and apparatus for generating and igniting a low-voltage 失效
    用于产生和点燃低电压的方法和装置

    公开(公告)号:US5384018A

    公开(公告)日:1995-01-24

    申请号:US60365

    申请日:1993-05-11

    CPC分类号: H01J37/3402

    摘要: A cathode chamber (1) with a thermionic cathode (3) generates a low-voltage arc discharge in a vacuum treatment chamber (11). Arcing on wall portions of the treatment chamber (11) is prevented by providing a screen (20), operated so as to be electrically floating, in the region of a diaphragm (9), through which diaphragm (9) the discharge is drawn from the cathode chamber (1) into the treatment chamber (11). The discharge is ignited by impressing portions of the cathode chamber wall with the ignition potential, with respect to the potential of the cathode (3).

    摘要翻译: 具有热离子阴极(3)的阴极室(1)在真空处理室(11)中产生低电压电弧放电。 通过在隔膜(9)的区域中设置屏蔽(20),通过在其上抽出隔膜(9),从而使隔膜(9)从其中抽出,从而防止在处理室(11)的壁部上的电弧 阴极室(1)进入处理室(11)。 相对于阴极(3)的电位,通过使具有点火电位的阴极室壁的部分压印来点燃放电。

    Process for manufacturing component parts, use of same, with air bearing supported workpieces and vacuum processing chamber
    3.
    发明申请
    Process for manufacturing component parts, use of same, with air bearing supported workpieces and vacuum processing chamber 审中-公开
    制造零部件的工艺,使用方法,带空气轴承支撑的工件和真空处理室

    公开(公告)号:US20050172983A1

    公开(公告)日:2005-08-11

    申请号:US10600511

    申请日:2003-06-23

    摘要: A vacuum treatment chamber generates disk-shaped workpieces with directly bondable surface. The chamber is a stand-alone chamber in ambient atmosphere and has a plasma discharge section. A gas supply is operatively connected with a gas tank arrangement predominantly containing nitrogen. A workpiece holding arrangement is formed by a magazine with a multitude of slits, each for a workpiece to be simultaneously treated in said vacuum treatment chamber.

    摘要翻译: 真空处理室产生具有可直接结合的表面的盘形工​​件。 室是环境气氛中的独立室,具有等离子体放电部分。 气体供应与主要包含氮气的气罐装置可操作地连接。 工件保持装置由具有多个狭缝的盒形成,每个狭缝用于在所述真空处理室中同时处理的工件。

    Process for manufacturing component parts, use of same, with air bearing supported workpieces and vacuum processing chamber
    4.
    发明授权
    Process for manufacturing component parts, use of same, with air bearing supported workpieces and vacuum processing chamber 有权
    制造零部件的工艺,使用方法,带空气轴承支撑的工件和真空处理室

    公开(公告)号:US06605175B1

    公开(公告)日:2003-08-12

    申请号:US09257207

    申请日:1999-02-25

    IPC分类号: B32B3100

    摘要: A method is disclosed for manufacturing parts with intimate connection of least two material phases, of which at least one is a solid body phase. Prior to intimate connection, at least the surface of the solid body phase to be connected is pretreated by a plasma-activated gas that contains nitrogen. The method is used, for example, for connecting integrated circuits with an HLST or for the electrical connection of the printed circuits by wire bonding or for the sheathing of electrical circuits joined with HLST and connected by wire bonding, with a potting compound. A workpiece stored in air is characterized by a surface exposed to the air, by contrast with a surface of the workpiece produced directly, having an elevated nitrogen concentration, detectable for example by a “Fourier transform infrared spectroscopy” with “attenuated total reflection” FTIR-ATR and/or with “nuclear reaction analysis,” NRA and/or with “time of flight secondary ion mass spectrometry,” TO-SIMS. Also disclosed is a vacuum processing chamber with a plasma discharge section, a gas supply to the chamber, connected with a gas tank arrangement, as well as with a workpiece holding device. The gas tank arrangement contains a gas with nitrogen and the holding arrangement has at least one access slit open to the discharge chamber for a disk-shaped or plate-shaped workpiece.

    摘要翻译: 公开了用于制造具有至少两个材料相的紧密连接的部件的方法,其中至少一个是固体相。 在紧密连接之前,至少要连接的固体相的表面由含有氮的等离子体活化气体预处理。 该方法例如用于将集成电路与HLST连接或通过引线接合或通过与HLST连接并通过引线接合连接的电路的护套与封装化合物连接印刷电路。 存储在空气中的工件的特征在于暴露于空气的表面与通过直接生产的具有升高的氮浓度的工件的表面形成对比,该表面可以例如通过具有“衰减全反射”FTIR的“傅里叶变换红外光谱” -ATR和/或“核反应分析”,NRA和/或“飞行时间二次离子质谱法”TO-SIMS。 还公开了一种具有等离子体放电部分的真空处理室,与气罐装置连接的室的气体供给以及工件保持装置。 气罐装置包含具有氮气的气体,并且保持装置具有至少一个通向用于盘形或板状工件的排放室的进入狭缝。

    Method of removing material from a surface in a vacuum chamber
    5.
    发明授权
    Method of removing material from a surface in a vacuum chamber 失效
    从真空室中的表面去除材料的方法

    公开(公告)号:US5308950A

    公开(公告)日:1994-05-03

    申请号:US870945

    申请日:1992-04-20

    摘要: In order to remove material from the surfaces in a vacuum chamber it is proposed to activate hydrogen gas in a plasma with the aid of a low voltage arc discharge which is supported by a hot emitting electrode in a cathode chamber. The removing method allows the cleaning of surfaces onto which subsequently safely adhering layers of a highest purity can be precipitated. The method can also be used for cleaning vacuum chambers. The small expenditures regarding apparatuses with the high rates of removal to be obtained produce a highly economical practicing of the method.

    摘要翻译: 为了从真空室中的表面去除材料,提出了借助于由阴极室中的热发射电极支撑的低电压电弧放电来激活等离子体中的氢气。 去除方法允许清洁表面,其上可以沉淀出最高纯度的随后安全粘附的层。 该方法也可用于清洁真空室。 对于要获得高拆卸率的设备的小支出可以实现该方法的高度经济实践。