公开(公告)号：US5384018A

公开(公告)日：1995-01-24

申请号：US60365

申请日：1993-05-11

Applicant: Jurgen Ramm ,  Eugen Beck ,  Hugo Frei ,  Albert Zueger ,  Gunter Peter

Inventor： Jurgen Ramm ,  Eugen Beck ,  Hugo Frei ,  Albert Zueger ,  Gunter Peter

IPC: C23F4/02 ,  H01J37/06 ,  H01J37/30 ,  H01J37/32 ,  H01J37/34 ,  C23C14/34

CPC classification number: H01J37/3402

Abstract: A cathode chamber (1) with a thermionic cathode (3) generates a low-voltage arc discharge in a vacuum treatment chamber (11). Arcing on wall portions of the treatment chamber (11) is prevented by providing a screen (20), operated so as to be electrically floating, in the region of a diaphragm (9), through which diaphragm (9) the discharge is drawn from the cathode chamber (1) into the treatment chamber (11). The discharge is ignited by impressing portions of the cathode chamber wall with the ignition potential, with respect to the potential of the cathode (3).

Abstract translation: 具有热离子阴极（3）的阴极室（1）在真空处理室（11）中产生低电压电弧放电。 通过在隔膜（9）的区域中设置屏蔽（20），通过在其上抽出隔膜（9），从而使隔膜（9）从其中抽出，从而防止在处理室（11）的壁部上的电弧 阴极室（1）进入处理室（11）。 相对于阴极（3）的电位，通过使具有点火电位的阴极室壁的部分压印来点燃放电。

公开(公告)号：US5308950A

公开(公告)日：1994-05-03

申请号：US870945

申请日：1992-04-20

Applicant: Jurgen Ramm ,  Eugen Beck ,  Albert Zueger

Inventor： Jurgen Ramm ,  Eugen Beck ,  Albert Zueger

IPC: C23C16/02 ,  C23C14/02 ,  C23C14/56 ,  C23F4/00 ,  C23F4/02 ,  C23G5/00 ,  H01L21/302 ,  H01L21/3065 ,  B23K9/00

CPC classification number: C23C14/564 ,  C23C14/022 ,  C23G5/00

Abstract: In order to remove material from the surfaces in a vacuum chamber it is proposed to activate hydrogen gas in a plasma with the aid of a low voltage arc discharge which is supported by a hot emitting electrode in a cathode chamber. The removing method allows the cleaning of surfaces onto which subsequently safely adhering layers of a highest purity can be precipitated. The method can also be used for cleaning vacuum chambers. The small expenditures regarding apparatuses with the high rates of removal to be obtained produce a highly economical practicing of the method.

Abstract translation: 为了从真空室中的表面去除材料，提出了借助于由阴极室中的热发射电极支撑的低电压电弧放电来激活等离子体中的氢气。 去除方法允许清洁表面，其上可以沉淀出最高纯度的随后安全粘附的层。 该方法也可用于清洁真空室。 对于要获得高拆卸率的设备的小支出可以实现该方法的高度经济实践。