公开(公告)号：US08975692B2

公开(公告)日：2015-03-10

申请号：US14100780

申请日：2013-12-09

Applicant: Electronics and Telecommunications Research Institute

Inventor： Sang Gi Kim ,  Jin-Gun Koo ,  Seong Wook Yoo ,  Jong-Moon Park ,  Jin Ho Lee ,  Kyoung Il Na ,  Yil Suk Yang ,  Jongdae Kim

IPC: H01L29/76 ,  H01L29/78 ,  H01L21/225 ,  H01L29/06 ,  H01L29/10 ,  H01L29/66

CPC classification number: H01L29/7813 ,  H01L21/2255 ,  H01L29/0634 ,  H01L29/0653 ,  H01L29/1095 ,  H01L29/66727 ,  H01L29/66734 ,  H01L29/7811

Abstract: Provided are a semiconductor device and a method of fabricating the same. The method includes: forming a trench in a semiconductor substrate of a first conductive type; forming a trench dopant containing layer including a dopant of a second conductive type on a sidewall and a bottom surface of the trench; forming a doping region by diffusing the dopant in the trench dopant containing layer into the semiconductor substrate; and removing the trench dopant containing layer.

Abstract translation: 提供半导体器件及其制造方法。 该方法包括：在第一导电类型的半导体衬底中形成沟槽; 在所述沟槽的侧壁和底表面上形成包含第二导电类型的掺杂剂的沟槽掺杂剂层; 通过将所述沟槽掺杂剂含量层中的掺杂剂扩散到所述半导体衬底中来形成掺杂区域; 并去除含沟槽掺杂剂层。

公开(公告)号：US09031365B2

公开(公告)日：2015-05-12

申请号：US13934006

申请日：2013-07-02

Applicant: Electronics and Telecommunications Research Institute

Inventor： Sahnggi Park ,  Sang Gi Kim ,  Seong Wook Yoo ,  Gyungock Kim

IPC: G02B6/12 ,  G02B6/293 ,  G02B6/42 ,  G02B6/34

CPC classification number: H04B10/27 ,  G02B6/12004 ,  G02B6/29373 ,  G02B6/34 ,  G02B6/4214 ,  G02B2006/12114

Abstract: An optical device module includes a substrate, an interlayer insulating layer on the substrate, an optical waveguide on the interlayer insulating layer, an optical device on the optical waveguide, and a prism disposed between the optical device and the optical waveguide. The prism has a refractive index greater than a refractive index of the optical waveguide.

Abstract translation: 光学器件模块包括衬底，衬底上的层间绝缘层，层间绝缘层上的光波导，光波导上的光学器件，以及设置在光学器件和光波导之间的棱镜。 棱镜的折射率大于光波导的折射率。

公开(公告)号：US09900098B2

公开(公告)日：2018-02-20

申请号：US14684195

申请日：2015-04-10

Applicant: Electronics and Telecommunications Research Institute

Inventor： Sahnggi Park ,  Sang Gi Kim ,  Seong Wook Yoo ,  Gyungock Kim

IPC: G02B6/34 ,  H04B10/27 ,  G02B6/12 ,  G02B6/293 ,  G02B6/42

CPC classification number: H04B10/27 ,  G02B6/12004 ,  G02B6/29373 ,  G02B6/34 ,  G02B6/4214 ,  G02B2006/12114

Abstract: An optical device module includes a substrate, an interlayer insulating layer on the substrate, an optical waveguide on the interlayer insulating layer, an optical device on the optical waveguide, and a prism disposed between the optical device and the optical waveguide. The prism has a refractive index greater than a refractive index of the optical waveguide.