公开(公告)号：US10910193B2

公开(公告)日：2021-02-02

申请号：US16356539

申请日：2019-03-18

Applicant: EL-MUL TECHNOLOGIES LTD.

Inventor： Eli Cheifetz ,  Amit Weingarten ,  Semyon Shopman ,  Silviu Reinhorn ,  Dmitry Shur

IPC: H01J37/244 ,  H01J37/22 ,  H01J37/26

Abstract: An electron detector assembly configured for detecting electrons emitted from a sample irradiated by an electron beam, including a scintillator configured with a scintillator layer formed with a scintillating surface. The scintillator layer emits light signals corresponding to impingement of electrons upon the scintillating surface. A light guide plate is coupled to the scintillator layer and includes a peripheral surface. One or more silicon photomultiplier devices are positioned upon the peripheral surface, wherein one or more silicon photomultiplier devices are arranged perpendicularly or obliquely relative to the scintillating surface. The silicon photomultiplier device is configured to yield an electrical signal from an electron impinging upon the scintillator surface.

公开(公告)号：US09673019B2

公开(公告)日：2017-06-06

申请号：US14859391

申请日：2015-09-21

Applicant: EL-MUL TECHNOLOGIES LTD.

Inventor： Eli Cheifetz ,  Amir Weingarten ,  Semyon Shofman

IPC: H01J37/00 ,  H01J37/147 ,  H01J37/285 ,  H01J37/08 ,  H01J37/244 ,  H01J37/317

CPC classification number: H01J37/1472 ,  H01J37/08 ,  H01J37/244 ,  H01J37/285 ,  H01J37/317 ,  H01J2237/15 ,  H01J2237/2448 ,  H01J2237/2806 ,  H01J2237/31749

Abstract: An electron detection system for detecting secondary electrons emitted from a sample irradiated by a Focused Ion Beam (FIB). The FIB emanates from a FIB column and travels along a beam axis within a beam region, which extends from the FIB column to the sample. The system comprises an electron detector configured for detecting the secondary electrons, and a deflecting field configured to deflect a trajectory of the secondary electrons, which were propagating towards the FIB column, to propel away from the beam axis and towards the electron detector. The deflecting field may be configured to divert the trajectory of secondary electrons while the secondary electrons are generally within the beam region.

公开(公告)号：US11031210B2

公开(公告)日：2021-06-08

申请号：US16810879

申请日：2020-03-06

Applicant: EL-MUL TECHNOLOGIES LTD

Inventor： Dmitry Shur ,  Eli Cheifetz ,  Armin Schon

IPC: H01J37/244 ,  H01J37/22 ,  G02B27/10 ,  H01J37/05

Abstract: A scintillator assembly including an entrance surface for receiving charged particles into the scintillator assembly, the charged particles including first charged particles at a first energy level and second charged particles at a second energy level. A first scintillator structure configured for receiving the first charged particles and generating a corresponding first signal formed of first photons with a first wavelength of λ1, a second scintillator structure configured for receiving the second charged particles and generating a corresponding second signal of second photons with a second wavelength of λ2, and an emitting surface for egress of a combined signal from the scintillator assembly, the combined signal including the first and second photons, and at least one beam splitter for receiving the combined signal and separating the combined signal to first and second photons.

公开(公告)号：US20150034822A1

公开(公告)日：2015-02-05

申请号：US14378098

申请日：2013-02-12

Applicant: EL-MUL TECHNOLOGIES LTD.

Inventor： Silviu Reinhorn ,  Eli Cheifetz ,  Amit Weingarten

IPC: H01J37/28

CPC classification number: H01J37/28 ,  G01N23/04 ,  H01J37/244 ,  H01J2237/221 ,  H01J2237/2443 ,  H01J2237/2445 ,  H01J2237/2446 ,  H01J2237/26 ,  H01J2237/2802 ,  H01J2237/2806

Abstract: A STEM system is disclosed wherein an imaging system is used to image the electron scatter pattern plane of the HAADF detector onto a two-dimensional array detector. A data acquisition system stores and processes the data from the two-dimensional array detector. For each illumination pixel of the STEM, one frame of data is generated and stored Each frame includes data of all scattered angles and can be analyzed in real time or in off-line at any time after the scan. A method is disclosed for detecting electrons emitted from a sample by detecting electrons scattered from the sample and generating plurality of corresponding signals, each signal indicative of scattering angle of a scattered electron; generating a plurality of signal groups, each signal group being a collection of signals of a user selected scattering angle.

Abstract translation: 公开了一种STEM系统，其中使用成像系统将HAADF检测器的电子散射图形平面成像到二维阵列检测器上。 数据采集​​系统存储和处理来自二维阵列检测器的数据。 对于STEM的每个照明像素，生成和存储一帧数据每帧包括所有散射角的数据，并且可以在扫描之后的任何时间实时或离线分析。 公开了一种通过检测从样品散射的电子并产生多个对应信号来检测从样品发射的电子的方法，每个信号指示散射电子的散射角; 产生多个信号组，每个信号组是用户选择的散射角的信号的集合。

公开(公告)号：US10236155B2

公开(公告)日：2019-03-19

申请号：US15253905

申请日：2016-09-01

Applicant: EL-MUL TECHNOLOGIES LTD.

Inventor： Eli Cheifetz ,  Amit Weingarten ,  Semyon Shofman ,  Silviu Reinhorn

IPC: H01J37/24 ,  H01J37/244

Abstract: An electron detector assembly configured for detecting electrons emitted from a sample irradiated by an electron beam, comprising a scintillator including a scintillator layer, the scintillator layer emitting light signals corresponding to impingement of electrons thereupon, a light guide plate coupled to the scintillator layer and comprising a peripheral surface, and a single or plurality of silicon photomultiplier devices positioned upon the peripheral surface and arranged perpendicularly or obliquely relative to the scintillating surface, the silicon photomultiplier device being configured to yield an electrical signal from an electron impinging upon the scintillator layer.