公开(公告)号：US10910193B2

公开(公告)日：2021-02-02

申请号：US16356539

申请日：2019-03-18

Applicant: EL-MUL TECHNOLOGIES LTD.

Inventor： Eli Cheifetz ,  Amit Weingarten ,  Semyon Shopman ,  Silviu Reinhorn ,  Dmitry Shur

IPC: H01J37/244 ,  H01J37/22 ,  H01J37/26

Abstract: An electron detector assembly configured for detecting electrons emitted from a sample irradiated by an electron beam, including a scintillator configured with a scintillator layer formed with a scintillating surface. The scintillator layer emits light signals corresponding to impingement of electrons upon the scintillating surface. A light guide plate is coupled to the scintillator layer and includes a peripheral surface. One or more silicon photomultiplier devices are positioned upon the peripheral surface, wherein one or more silicon photomultiplier devices are arranged perpendicularly or obliquely relative to the scintillating surface. The silicon photomultiplier device is configured to yield an electrical signal from an electron impinging upon the scintillator surface.

公开(公告)号：US11031210B2

公开(公告)日：2021-06-08

申请号：US16810879

申请日：2020-03-06

Applicant: EL-MUL TECHNOLOGIES LTD

Inventor： Dmitry Shur ,  Eli Cheifetz ,  Armin Schon

IPC: H01J37/244 ,  H01J37/22 ,  G02B27/10 ,  H01J37/05

Abstract: A scintillator assembly including an entrance surface for receiving charged particles into the scintillator assembly, the charged particles including first charged particles at a first energy level and second charged particles at a second energy level. A first scintillator structure configured for receiving the first charged particles and generating a corresponding first signal formed of first photons with a first wavelength of λ1, a second scintillator structure configured for receiving the second charged particles and generating a corresponding second signal of second photons with a second wavelength of λ2, and an emitting surface for egress of a combined signal from the scintillator assembly, the combined signal including the first and second photons, and at least one beam splitter for receiving the combined signal and separating the combined signal to first and second photons.